A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.

An optical fiber fuse protection device includes an upstream optical fiber disposed on an upstream side, a downstream optical fiber disposed on a downstream side, and a wall interposed between a part of the upstream optical fiber and a part of the downstream optical fiber. The downstream optical fiber is fusion-spliced to the upstream optical fiber and is made of a single optical fiber or a plurality of optical fibers fusion-spliced to each other.

An apparatus for combining a plurality of coherent laser beams includes a splitting device configured to split an input laser beam into the plurality of coherent laser beams, a plurality of phase setting devices configured to adjust a respective phase of one of the plurality of coherent laser beams, and a beam combining device configured to combine the plurality of coherent laser beams, which emanate from a plurality of grid positions of a grid arrangement. The beam combining device includes a microlens arrangement having at least two microlens arrays. The apparatus further includes a controller configured to adjust a respective phase of a respective one of the plurality of coherent laser beams and/or vary a respective phase of a respective one of the plurality of coherent laser beams.

A method includes driving, while producing a burst of pulses at a pulse repetition rate, a spectral feature adjuster among a set of discrete states at a frequency correlated with the pulse repetition rate; and in between the production of the bursts of pulses (while no pulses are being produced), driving the spectral feature adjuster according to a driving signal defined by a set of parameters. Each discrete state corresponds to a discrete value of a spectral feature. The method includes ensuring that the spectral feature adjuster is in one of the discrete states that corresponds to a discrete value of the spectral feature of the amplified light beam when a pulse in the next burst is produced by adjusting one or more of: an instruction to the lithography exposure apparatus, the driving signal to the spectral feature adjuster, and/or the instruction to the optical source.

A hybrid semiconductor laser component comprising at least one first emitting module comprising an active zone shaped to emit electromagnetic radiation at a given wavelength; and an optical layer comprising at least one first waveguide optically coupled with the active zone, the waveguide forming with the active zone an optical cavity resonating at the given wavelength. The hybrid semiconductor laser component also comprises a heat-dissipating semiconductor layer, the heat-dissipating semiconductor layer being in thermal contact with the first emitting module on a surface of the first emitting module that is opposite the optical layer. The invention also relates to a method for manufacturing such a hybrid semiconductor laser component.

A laser device for optical communication comprises a first laser unit connected to a first optical fiber for supplying a transmission laser beam thereto. wherein the laser device is configured for providing a reference laser beam in addition to the transmission laser beam. For providing the reference laser beam the laser device further includes a second laser unit connected to a second optical fiber for supplying the reference laser beam to the second optical fiber. The first laser unit is configured for providing the transmission laser beam as a linear polarized beam that is polarized in a first polarization direction, and the second laser unit is configured for providing the reference laser beam as a linear polarized beam that is polarized in a second polarization direction. The first optical fiber and the second optical fiber are formed of polarization maintaining optical fibers, and the laser device further includes a polarization combiner connected to a third polarization maintaining optical fiber for conveying the transmission laser beam and the reference laser beam to an optical output of the laser device.

An apparatus is provided, the apparatus comprising: (i) a diode-pumped solid-state laser oscillator configured to generate a pulsed laser beam having predefined beam characteristics corresponding to a current setting selection of a controller; and (ii) an amplifier configured to amplify an energy and modify a beam profile of the pulse laser beam. A beam detector is coupled to the generated beam to monitor a combination of: (i) a beam pulse width; (ii) a beam diameter; and (iii) an energy level, and generates an error signal to be sent back as a feedback signal to the controller. The controller configures the current source to output a correction current to tune the DPSSL oscillator, the wave plate, and the first polarizer to rotate a correction polarization angle and adjust the energy amplification or temporal profile to within a defined performance tolerance.

A coherent fiber array laser power projection system scalable to large number of subapertures and includes sensors that produce signals dependent upon beam characteristics, and controllers configured to control beam characteristics to achieve either phasing of outgoing beams at transmitter plane or coherent beam combining at a remote target or both.