H01S3/23

Laser apparatus for generating extreme ultraviolet light

A system for generating extreme ultraviolet light, in which a target material inside a chamber is irradiated with a laser beam to be turned into plasma, includes a first laser apparatus configured to output a first laser beam, a second laser apparatus configured to output a pedestal and a second laser beam, and a controller connected to the first and second laser apparatuses and configured to cause the first laser beam to be outputted first, the pedestal to be outputted after the first laser beam, and the second laser beam having higher energy than the pedestal to be outputted after the pedestal.

Optically amplified repeater system and optical amplifier

An optically amplified repeater system includes optical transmission paths, a multi-channel optical amplifier, one or more Raman amplification pumping light sources, and a wavelength multiplexer. The multi-channel optical amplifier includes K simultaneous pumping light sources, N optical amplification media, and one or more optical couplers, and simultaneously amplifies, with the K simultaneous pumping light sources, light intensities of optical signals that pass through the N optical amplification media and propagate through the optical transmission paths. Light intensities of the wavelength band of the optical signals is Raman amplified by the Raman amplification pumping light. A light intensity of the Raman amplification pumping light output from the one or more Raman amplification pumping light sources is determined in accordance with characteristic differences between the optical signals passing through the optical transmission paths.

SPECTRAL FEATURE CONTROL APPARATUS
20230124587 · 2023-04-20 ·

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

LASER SOURCE FOR AN OPHTHALMIC SURGICAL SYSTEM
20230066391 · 2023-03-02 ·

A laser source for an ophthalmic surgical system includes a femtosecond seeder, an amplifier, a femtosecond pulse portion, a nanosecond pulse portion, and one or more switches. The femtosecond seeder generates femtosecond pulses. The amplifier amplifies laser pulses, which include the femtosecond pulses and nanosecond pulses. The amplifier amplifies the laser pulses by amplifying the femtosecond pulses and generating and amplifying the nanosecond pulses. The femtosecond pulse portion alters and outputs the femtosecond pulses, and the nanosecond pulse portion alters and outputs the nanosecond pulses. The switches receive the laser pulses from the amplifier, and direct the laser pulses to the femtosecond pulse portion or the nanosecond pulse portion. In other embodiments, the laser source includes a femtosecond seeder and a nanosecond seeder that generates the nanosecond pulses.

Laser amplification method
11664636 · 2023-05-30 · ·

A method and system for amplifying seed laser radiation which is irradiated along an irradiation direction into a lasing amplification medium has a transverse seed laser intensity profile that is transformed into a plateaued input intensity profile by a transformer element on the irradiation side.

Laser processing system and laser processing method
11465233 · 2022-10-11 · ·

A laser processing system includes: a wavelength-variable laser device configured to output each of a laser beam at an absorption line as a wavelength at which light is absorbed by oxygen and a laser beam at a non-absorption line as a wavelength at which the amount of light absorption by oxygen is smaller than at the absorption line; an optical system configured to irradiate a workpiece with the laser beam; and a laser control unit configured to control the wavelength-variable laser device, set the wavelength of the laser beam output from the wavelength-variable laser device to be the non-absorption line when laser processing is performed on the surface of the workpiece in gas containing oxygen, and set the wavelength of the laser beam output from the wavelength-variable laser device to be the absorption line when ozone cleaning is performed on the surface of the workpiece in gas containing oxygen.

Laser apparatus and laser processing system
11469568 · 2022-10-11 · ·

A laser apparatus includes: (A) a solid-state laser apparatus that outputs burst seed pulsed light containing a plurality of pulses; (B) an excimer amplifier that amplifies the burst seed pulsed light in a discharge space in a single occurrence of discharge and outputs the amplified light as amplified burst pulsed light; (C) an energy sensor that measures the energy of the amplified burst pulsed light; and (D) a laser controller that corrects the timing at which the solid-state laser apparatus is caused to output the burst seed pulsed light based on the relationship of the difference between the timing at which the solid-state laser apparatus outputs the burst seed pulsed light and the timing at which the discharge occurs in the discharge space with a measured value of the energy.

PARALLEL O-BAND AMPLIFIER
20220337018 · 2022-10-20 · ·

A system (e.g., an optical amplifier) comprising gain fibers (e.g., Bismuth-doped optical fiber) for amplifying optical signals. The optical signals have an operating center wavelength (λ0) that is centered between approximately 1260 nanometers (˜1260 nm) and ˜1360 nm (which is in the O-Band). The gain fibers are optically coupled to pump sources, with the number of pump sources being less than or equal to the number of gain fibers. The pump sources are (optionally) shared among the gain fibers, thereby providing more efficient use of resources.

OPTICAL AMPLIFIER

An objective of the present invention is to provide an optical amplifier having a cladding excitation configuration that improves amplification efficiency. The optical amplifier includes an optical amplification unit 36 in which n (n is a natural number equal to or greater than 2) amplification fibers 34 that optically amplify signal light propagating through cores with excitation light supplied to claddings and n−1 optical input/output units 35 that input/output the signal light to/from the cores and the outside of the amplification fibers 34 are connected in series such that the amplification fibers 34 and the optical input/output units 35 are disposed in an alternating manner, an excitation light generator 31 that outputs the excitation light in multi-mode, and optical multiplexer/demultiplexers 33 that cause the excitation light from the excitation light generator 31 that has been divided into two light beams to be incident on the claddings of the amplification fibers 34 disposed at both ends of the optical amplification unit 36 and cause the signal light to be input to/output from the cores of the amplification fibers 34 disposed at both ends of the optical amplification unit 36.

SINGLE PUMP, MULTIPLE STAGE POWER AMPLIFIER IN LIDAR APPLICATION
20220337019 · 2022-10-20 · ·

A multiple stage optical amplification device in a light detection and ranging (LiDAR) scanning system is provided. The system comprises a first power amplification stage receiving seed laser light and outputting first amplified laser light; a second power amplification stage receiving the first amplified laser light and outputting a second amplified laser light; and a single optical power pump coupled to the second power amplification stage. The second power amplification stage is configured to amplify the first amplified laser light to generate the second amplified laser light. A first portion of pump power provided by the optical power pump is deliverable to the first power amplification stage to amplify the seed laser light.