The present disclosure provides a substrate transfer apparatus. According to an aspect of the present disclosure, the substrate transfer apparatus includes: a planar motor provided in a transfer chamber and having coils arranged therein; a transfer unit movable on the planar motor; and a control unit configured to control an energization of the coils. The transfer unit includes two bases having magnets arranged thereon and configured to be movable on the planar motor, a substrate support member configured to support a substrate, and a link mechanism configured to connect the two bases and the substrate support member to each other.

A linear motor system, which is in particular a transport system and, for example, a multi-carrier system, includes a guide track having a plurality of electromagnets arranged distributed along the guide track; and at least one carrier that is guided by and movable along the guide track and that has a drive magnet for cooperating with the electromagnets to move the carrier. The linear motor system furthermore has at least one coupling element and at least one securing structure that extends along the guide track and that is held by the coupling element. The coupling element couples the securing structure to the carrier.

A linear motor system, which is in particular a transport system and, for example, a multi-carrier system, includes a guide track having a plurality of electromagnets arranged distributed along the guide track; and at least one carrier that is guided by and movable along the guide track and that has a drive magnet for cooperating with the electromagnets to move the carrier. The linear motor system furthermore has at least one coupling element and at least one securing structure that extends along the guide track and that is held by the coupling element. The coupling element couples the securing structure to the carrier.

An actuator comprises a coil, a first cooling plate and a second cooling plate. The cooling plates are configured to cool the coil. The first and second cooling plates are arranged at opposite sides of the coil to be in thermal contact with the coil. The coil comprises a first coil part and a second coil part, the first coil part facing the first cooling plate and the second coil part facing the second cooling plate, the first and second coil parts being separated by a spacing there between. The first cooling plate, the first coil part, the spacing, the second coil part and the second cooling plate form a stacked structure whereby the coil parts are arranged between the cooling plates and the spacing is arranged between the coil parts. The actuator further comprises a filling element arranged in the spacing. The filling element to push the first coil part towards the first cooling plate and to push the second coil part towards the second cooling plate.

A driving mechanism is provided, including a base, a movable module, and a driving assembly. The movable module has a movable member and a connecting member connected to the movable member. The driving assembly is connected to the base and the connecting member. The driving assembly has a driving element that generates a driving force to the connecting member and the movable member, so that the movable module moves relative to the base.

An elevator includes at least one elevator shaft and at least one elevator car traveling in the elevator shaft. The elevator has at least one elevator motor including at least one linear stator located vertically along the elevator shaft and at least one mover located in connection with the elevator car and co-acting with the stator. The elevator includes a vertical stator beam supporting at least one stator, which stator beam has at least one side face carrying ferromagnetic poles of said stator spaced apart by a pitch. The mover includes at least one counter-face facing the side face(s) of the stator beam, in which electro-magnetic components of the mover are located.

An elevator includes at least one elevator shaft and at least one elevator car traveling in the elevator shaft. The elevator has at least one elevator motor including at least one linear stator located vertically along the elevator shaft and at least one mover located in connection with the elevator car and co-acting with the stator. The elevator includes a vertical stator beam supporting at least one stator, which stator beam has at least one side face carrying ferromagnetic poles of said stator spaced apart by a pitch. The mover includes at least one counter-face facing the side face(s) of the stator beam, in which electro-magnetic components of the mover are located.

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for contactlessly holding the carrier (10) in a carrier transportation space (15), and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction. The second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet.

A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for contactlessly holding the carrier (10) in a carrier transportation space (15), and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction. The second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet.

An optical element driving mechanism is provided. The optical element driving mechanism includes a first holder, a second holder, a plate, a biasing assembly, and an electromagnetic driving assembly. The first holder holds a first optical element with a first optical axis. The second holder holds a second optical element with a second optical axis. The plate is disposed below the first holder and the second holder. The biasing assembly forces the first holder to move relative to the plate on a plane substantially perpendicular to the first optical axis, and includes a biasing element, wherein when a driving signal is applied to the biasing element, a length of the biasing element is changed. The electromagnetic driving assembly forces the second holder to move relative to the plate and comprising a first magnetic element and a coil.