Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

Disclosed is a directional coupler having a coupler, a forward resistive attenuator, a reflected resistive attenuator, a forward compensation capacitor, and a reflected compensation capacitor. A forward coupler side arm and reflected coupler side arm of the coupler are configured to obtain a sample of forward energy and a sample of reflected energy from the coupler transmission line section. The forward resistive attenuator and reflected resistive attenuator are configured to attenuate the sample of forward energy and the sample of reflected energy. The forward compensation capacitor and the reflected compensation capacitor are configured to receive the attenuated sample of forward energy and the attenuated sample of reflected energy and produce a frequency-compensated sample of forward energy and a frequency-compensated sample of reflected energy.

Various embodiments of the invention relate to attenuators with reduced temperature variation. By coordinating first-order resistance temperature (FORT) coefficients of resistors, embodiments of attenuator or attenuator cells are capable of achieving desired attenuation with reduced or minimized temperature variation. Such achievements in reducing temperature variation may be obtained without relying on resistors with large negative FORT coefficients. Attenuator cells may be configured as T-type attenuator cells, π-type attenuator cells, bridged-T attenuator cells, or shunt attenuators with various FORT coefficient combinations for the resistors incorporated within the attenuator cells. Furthermore, various attenuator cells may be cascaded together into a digital step attenuator with the temperature variation of those cells compensating or offsetting each other for an overall minimum temperature variation.

A clamping circuit that may be used to provide efficient and effective voltage clamping in an RF front end. The clamping circuit comprises two series coupled signal path switches and a bypass switch coupled in parallel with the series coupled signal path switches. A diode is coupled from a point between the series coupled signal path switches to a reference potential. In addition, an output selection switch within an RF front end has integrated voltage clamping to more effectively clamp the output voltage from the RF front end. Additional output clamping circuits can be used at various places along a direct gain signal path, along an attenuated gain path and along a bypass path.

A clamping circuit that may be used to provide efficient and effective voltage clamping in an RF front end. The clamping circuit comprises two series coupled signal path switches and a bypass switch coupled in parallel with the series coupled signal path switches. A diode is coupled from a point between the series coupled signal path switches to a reference potential. In addition, an output selection switch within an RF front end has integrated voltage clamping to more effectively clamp the output voltage from the RF front end. Additional output clamping circuits can be used at various places along a direct gain signal path, along an attenuated gain path and along a bypass path.

Various embodiments of the invention relate to attenuators with reduced temperature variation. By coordinating first-order resistance temperature (FORT) coefficients of resistors, embodiments of attenuator or attenuator cells are capable of achieving desired attenuation with reduced or minimized temperature variation. Such achievements in reducing temperature variation may be obtained without relying on resistors with large negative FORT coefficients. Attenuator cells may be configured as T-type attenuator cells, π-type attenuator cells, bridged-T attenuator cells, or shunt attenuators with various FORT coefficient combinations for the resistors incorporated within the attenuator cells. Furthermore, various attenuator cells may be cascaded together into a digital step attenuator with the temperature variation of those cells compensating or offsetting each other for an overall minimum temperature variation.

Various embodiments of the invention relate to attenuators with reduced temperature variation. By coordinating first-order resistance temperature (FORT) coefficients of resistors, embodiments of attenuator or attenuator cells are capable of achieving desired attenuation with reduced or minimized temperature variation. Such achievements in reducing temperature variation may be obtained without relying on resistors with large negative FORT coefficients. Attenuator cells may be configured as T-type attenuator cells, π-type attenuator cells, bridged-T attenuator cells, or shunt attenuators with various FORT coefficient combinations for the resistors incorporated within the attenuator cells. Furthermore, various attenuator cells may be cascaded together into a digital step attenuator with the temperature variation of those cells compensating or offsetting each other for an overall minimum temperature variation.

A micro-electro-mechanical system (MEMS) transfer switch is disclosed. The transfer switch comprises a single-pole, N-throw switch section having N selectable switches. Each selectable switch of the N selectable switches has an input, a control terminal and an output. An electrically conductive line is coupled to each of the selectable switches of the N selectable switches. The transfer switch includes a single-pole, M-throw switch section having M selectable switches coupled to the conductive line, each selectable switch of the M selectable switches having an output, a control terminal and an input. The single-pole, N-throw switch section and the single-pole, M-throw switch section are packaged in a single micro-electro-mechanical system (MEMS) die. The N and M are numbers between two and eight and the N selectable switches and the M selectable switches are different switches.

An integrated circuit (IC) device includes a first resistive strip having an input terminal and an output terminal. The IC device further includes a second resistive strip having a terminal coupled to a voltage. The second resistive strip may be coplanar with the first resistive strip. The IC device further includes a capacitor formed by the first resistive strip and the second resistive strip.

Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.