Disclosed is a MEMS chip that in certain embodiments includes a substrate with a back cavity, and a plate capacitor bank provided on the substrate; the plate capacitor bank at least includes a first plate capacitor structure and a second plate capacitor structure located below the first plate capacitor structure and arranged in parallel with the first plate capacitor structure; the first plate capacitor structure includes a first diaphragm and a first hack electrode; and the second plate capacitor structure includes a second. diaphragm and a second back electrode.

The invention relates to the technical field of microphones, in particular to an online trimmed MEMS microphone. The online trimmed MEMS microphone comprises an acoustic transducer for receiving an external ultrasonic signal and converting the ultrasonic signal into an electric signal; an ASIC (Application Specific Integrated Circuit) chip, coupled to the acoustic transducer, wherein the ASIC chip comprises: an amplifier unit for performing amplification on the electric signal and outputting an amplified signal; a decoding unit, connected to the amplifier unit, and configured to decode the amplified signal to obtain a decoded signal sequence; a matching unit, connected to the decoding unit, and configured to match the decoded signal sequence with a predetermined identification code to obtain a matched signal; a control unit, connected to the matching unit, and configured to generate one or more circuit adjusting parameters under the action of the matched signal.

The invention relates to the technical field of microphones, in particular to an online trimmed MEMS microphone. The online trimmed MEMS microphone comprises an acoustic transducer for receiving an external ultrasonic signal and converting the ultrasonic signal into an electric signal; an ASIC (Application Specific Integrated Circuit) chip, coupled to the acoustic transducer, wherein the ASIC chip comprises: an amplifier unit for performing amplification on the electric signal and outputting an amplified signal; a decoding unit, connected to the amplifier unit, and configured to decode the amplified signal to obtain a decoded signal sequence; a matching unit, connected to the decoding unit, and configured to match the decoded signal sequence with a predetermined identification code to obtain a matched signal; a control unit, connected to the matching unit, and configured to generate one or more circuit adjusting parameters under the action of the matched signal.

A digital microphone includes at least one integrator; a state detection and parameter control component directly coupled to an output of the integrator; and a signal processing component coupled to an output of the state detection and parameter control component, wherein a parameter of the signal processing component includes a first value in a first operational mode and a second value in a second operational mode different from the first operational mode.

In accordance with an embodiment, a system includes a digital calibration filter device configured to receive a digital input signal based on a sensor output signal from a sensor, receive a sensor-specific control signal, and perform digital filter processing of the digital input signal to produce a calibrated output signal, wherein the digital filter processing is based on the sensor-specific control signal; and a control device configured to select the sensor-specific control signal from a plurality of sensor-specific control signals based on an ascertained influencing parameter, and provide the sensor-specific control signal to the digital calibration filter device.

In accordance with an embodiment, a system includes a digital calibration filter device configured to receive a digital input signal based on a sensor output signal from a sensor, receive a sensor-specific control signal, and perform digital filter processing of the digital input signal to produce a calibrated output signal, wherein the digital filter processing is based on the sensor-specific control signal; and a control device configured to select the sensor-specific control signal from a plurality of sensor-specific control signals based on an ascertained influencing parameter, and provide the sensor-specific control signal to the digital calibration filter device.

A MEMS transducer for interacting with a volume flow of a fluid includes a substrate which includes a layer stack having a plurality of layers which form a plurality of substrate planes, and which includes a cavity within the layer stack. The MEMS transducer includes an electromechanical transducer connected to the substrate within the cavity and including an element which is deformable within at least one plane of movement of the plurality of substrate planes, deformation of the deformable element within the plane of movement and the volume flow of the fluid being causally correlated. The MEMS transducer includes an electronic circuit arranged within a layer of the layer stack, the electronic circuit being connected to the electromechanical transducer and being configured to provide a conversion between a deformation of the deformable element and an electric signal.

An impedance circuit for a charge pump arrangement and a charge pump arrangement are disclosed. In an embodiment, the impedance circuit includes a first current mirror circuit with a first bias serving as a current input terminal, a first output serving as a current output terminal and a first input for coupling with a pre-selected potential. The impedance circuit further includes a first charge pump for biasing the first current mirror circuit with a first reference current, wherein the first charge pump includes a first biasing output coupled with the first bias of the first current mirror circuit.

The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.

The application describes MEMS transducer structures comprising a membrane structure having a flexible membrane layer and at least one electrode layer. The electrode layer is spaced from the flexible membrane layer such that at least one air volume extends between the material of the electrode layer and the membrane layer. The electrode layer is supported relative to the flexible membrane by means of a support structure which extends between the first electrode layer and the flexible membrane layer.