In some embodiments, a microphone system may include a deformable element that may be made of a material that is subject to deformation in response to external phenomenon. Sensing ports may be in contact with a respective region of the deformable element and may be configured to sense a deformation of a region of the deformable element and generate a signal in response thereto. The plurality of signals may be useable to determine spatial dependencies of the external phenomenon. The external phenomenon may be pressure and the signals may be useable to determine spatial dependencies of the pressure.

In some embodiments, a microphone system may include a deformable element that may be made of a material that is subject to deformation in response to external phenomenon. Sensing ports may be in contact with a respective region of the deformable element and may be configured to sense a deformation of a region of the deformable element and generate a signal in response thereto. The plurality of signals may be useable to determine spatial dependencies of the external phenomenon. The external phenomenon may be pressure and the signals may be useable to determine spatial dependencies of the pressure.

A MEMS device includes a MEMS substrate with a movable element. Further included is a CMOS substrate with a cavity, the MEMS substrate disposed on top of the CMOS substrate. Additionally, a back cavity is connected to the CMOS substrate, the back cavity being formed at least partially by the cavity in the CMOS substrate and the movable element being acoustically coupled to the back cavity.

A microphone assembly includes an acoustic sensor and a voice activity detector on an integrated circuit coupled to an external-device interface. The acoustic sensor produces an electrical signal representative of acoustic energy detected by the sensor. A filter bank separates data representative of the acoustic energy into a plurality of frequency bands. A power tracker obtains a power estimate for at least one band, including a first estimate based on relatively fast changes in a power metric of the data and a second estimate based on relatively slow changes in a power metric of the data. The presence of voice activity in the electrical signal is based upon the power estimate.

A microphone assembly includes an acoustic sensor and a voice activity detector on an integrated circuit coupled to an external-device interface. The acoustic sensor produces an electrical signal representative of acoustic energy detected by the sensor. A filter bank separates data representative of the acoustic energy into a plurality of frequency bands. A power tracker obtains a power estimate for at least one band, including a first estimate based on relatively fast changes in a power metric of the data and a second estimate based on relatively slow changes in a power metric of the data. The presence of voice activity in the electrical signal is based upon the power estimate.

An analog signal is received from an acoustic transducer. The analog signal is converted into digital data. A determination is made as to whether acoustic activity exists within the digital data. The digital data is stored in a temporary memory storage device and a count is maintained of an amount of digital data in the temporary memory storage device. When the count exceeds a predetermined threshold, at least some of the digital data is transmitted from the temporary memory storage device to a processor.

An analog signal is received from an acoustic transducer. The analog signal is converted into digital data. A determination is made as to whether acoustic activity exists within the digital data. The digital data is stored in a temporary memory storage device and a count is maintained of an amount of digital data in the temporary memory storage device. When the count exceeds a predetermined threshold, at least some of the digital data is transmitted from the temporary memory storage device to a processor.

Provided are a silicon-based microphone device and an electronic apparatus. The silicon-based microphone device comprises: a circuit board, wherein at least two sound inlets are formed on the circuit board; a shielding housing that covers one side of the circuit board; an even number of differential silicon-based microphone chips that all are located in a sound cavity, wherein in each two differential silicon-based microphone chips, the first microphone structure of one differential silicon-based microphone chip is electrically connected to the second microphone structure of the other differential silicon-based microphone chip, and the second microphone structure of said one differential silicon-based microphone chip is electrically connected to the first microphone structure of said other differential silicon-based microphone chip; and a mounting plate, wherein an even number of holes communicated with the sound inlets are formed on the mounting plate.

Provided are a silicon-based microphone device and an electronic apparatus. The silicon-based microphone device comprises: a circuit board, wherein at least two sound inlets are formed on the circuit board; a shielding housing that covers one side of the circuit board; an even number of differential silicon-based microphone chips that all are located in a sound cavity, wherein in each two differential silicon-based microphone chips, the first microphone structure of one differential silicon-based microphone chip is electrically connected to the second microphone structure of the other differential silicon-based microphone chip, and the second microphone structure of said one differential silicon-based microphone chip is electrically connected to the first microphone structure of said other differential silicon-based microphone chip; and a mounting plate, wherein an even number of holes communicated with the sound inlets are formed on the mounting plate.

A robust MEMS transducer includes a kinetic energy diverter disposed within its frontside cavity. The kinetic energy diverter blunts or diverts kinetic energy in a mass of air moving through the frontside cavity, before that kinetic energy reaches a diaphragm of the MEMS transducer. The kinetic energy diverter renders the MEMS transducer more robust and resistant to damage from such a moving mass of air.