An MEMS capacitor microphone is provided, comprising a first substrate and a vibration diaphragm supported above the first substrate by a spacing portion, the first substrate, the spacing portion, and the vibration diaphragm enclosing a vacuum chamber, and a static deflection distance of the vibration diaphragm under an atmospheric pressure being less than a distance between the vibration diaphragm and the first substrate, wherein a lower electrode forming a capacitor structure with the vibration diaphragm is provided on a side of the first substrate that is adjacent to the vacuum chamber, and an electric field between the vibration diaphragm and the lower electrode is 100-300 V/μm.

A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate disposed on a side of the substrate, and a diaphragm movably disposed between the substrate and the backplate. The diaphragm includes a plurality of implantation portions, and the implantation portions have different concentration-depth profiles.

A micro-electro-mechanical system (MEMS) microphone is provided. The MEMS microphone includes a substrate, a backplate disposed on a side of the substrate, and a diaphragm movably disposed between the substrate and the backplate. The diaphragm includes a plurality of implantation portions, and the implantation portions have different concentration-depth profiles.

Techniques for biometric authentication using a voice accelerometer and an acoustic transducer includes receiving a first signal representing an output by a voice accelerometer of a device and a second signal representing an output by an acoustic transducer of the device. Characteristics of each of the first signal and the second signal are compared with stored biometric characteristics for a user of the device. The user of the device is then authenticated based on the comparison.

Techniques for biometric authentication using a voice accelerometer and an acoustic transducer includes receiving a first signal representing an output by a voice accelerometer of a device and a second signal representing an output by an acoustic transducer of the device. Characteristics of each of the first signal and the second signal are compared with stored biometric characteristics for a user of the device. The user of the device is then authenticated based on the comparison.

A hermetically-sealed multi-directional single-proof-mass accelophone that demonstrates a high sensitivity to micro-gravity level accelerations in a wide operational bandwidth by utilizing nano-scale transductions gaps and vacuum packaging. Stable operation of the wafer-level-packaged sensor is validated over a wide operational bandwidth greater than 10 kHz. Developing a noise-matched custom interface IC should enable a sensor noise performance near the Brownian noise floor of below 10 μg/√Hz. The sensor can be applied in detection of vital mechano-acoustic signals emanating from the body and can be easily incorporated in existing wearable health monitoring devices for multi-faceted health monitoring using a single integrated sensor.

A hermetically-sealed multi-directional single-proof-mass accelophone that demonstrates a high sensitivity to micro-gravity level accelerations in a wide operational bandwidth by utilizing nano-scale transductions gaps and vacuum packaging. Stable operation of the wafer-level-packaged sensor is validated over a wide operational bandwidth greater than 10 kHz. Developing a noise-matched custom interface IC should enable a sensor noise performance near the Brownian noise floor of below 10 μg/√Hz. The sensor can be applied in detection of vital mechano-acoustic signals emanating from the body and can be easily incorporated in existing wearable health monitoring devices for multi-faceted health monitoring using a single integrated sensor.

MEMS devices comprise a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate.

MEMS devices comprise a filter configured and arranged to inhibit the entry of particles into at least a region of the interior of the substrate cavity from a region underlying the substrate.

A microelectromechanical system (MEMS) transducer includes a transducer substrate including an opening; a back plate including a plurality of protrusions oriented substantially perpendicular to the back plate; and a diaphragm between the transducer substrate and the back plate. The diaphragm includes a lead and a plurality of spring members. The lead is structured to suspend the diaphragm over the transducer substrate. The spring members are structured to separate the diaphragm from the transducer substrate and the back plate in the absence of a bias voltage.