Embodiments of the present disclosure generally relate to a pedestal for increasing temperature uniformity in a substrate supported thereon. The pedestal comprises a body having a heater embedded therein. The body comprises a patterned surface that includes a first region having a first plurality of posts extending from a base surface of the body at a first height, and a second region surrounding the central region having a second plurality of posts extending from the base surface at a second height that is greater than the first height, wherein an upper surface of each of the first plurality of posts and the second plurality of posts are substantially coplanar and define a substrate receiving surface.

Embodiments of the present disclosure generally relate to a pedestal for increasing temperature uniformity in a substrate supported thereon. The pedestal comprises a body having a heater embedded therein. The body comprises a patterned surface that includes a first region having a first plurality of posts extending from a base surface of the body at a first height, and a second region surrounding the central region having a second plurality of posts extending from the base surface at a second height that is greater than the first height, wherein an upper surface of each of the first plurality of posts and the second plurality of posts are substantially coplanar and define a substrate receiving surface.

In one embodiment, the electronic vaping device includes a cartridge and a battery section. The cartridge and the battery section are connectable so as to define an air inlet between a portion of the cartridge and a portion of the battery section.

In one embodiment, the electronic vaping device includes a cartridge and a battery section. The cartridge and the battery section are connectable so as to define an air inlet between a portion of the cartridge and a portion of the battery section.

A pot structure of electronic cigarette for baking tobacco, the pot structure is disposed in a rod portion of the electronic cigarette, and the pot structure is in communication with a mouth piece of the electronic cigarette; the structure includes: a cage, configured to receive tobacco shreds; a heating device, configured to heat tobacco shreds within the cage to generate smoke; the heating device is a heating pot in a cup-shaped, and the cage is a cup-shaped body made of a good heat conductive material; the heating pot heats the tobacco shreds in the cage from a side of the cage, and the heat conductive tube is configured to bring the heat of the heating pot to the center of the tobacco shreds to heat the tobacco shreds, such that the heating to the tobacco shreds is more evenly.

A pot structure of electronic cigarette for baking tobacco, the pot structure is disposed in a rod portion of the electronic cigarette, and the pot structure is in communication with a mouth piece of the electronic cigarette; the structure includes: a cage, configured to receive tobacco shreds; a heating device, configured to heat tobacco shreds within the cage to generate smoke; the heating device is a heating pot in a cup-shaped, and the cage is a cup-shaped body made of a good heat conductive material; the heating pot heats the tobacco shreds in the cage from a side of the cage, and the heat conductive tube is configured to bring the heat of the heating pot to the center of the tobacco shreds to heat the tobacco shreds, such that the heating to the tobacco shreds is more evenly.

A radiant heater device for generating a radiant heat, includes a substrate portion having a plate shape and made of an electrically insulating material, a surface member having a sheet shape and disposed on one surface side of the substrate portion, and a heat generation portion formed on the other surface side of the substrate portion. The surface member is formed of a fiber fabric that is provided with a space portion recessed toward the substrate portion in a thickness direction of the surface member and that restricts a heat transfer in a surface direction of the surface member by the space portion.

A radiant heater device for generating a radiant heat, includes a substrate portion having a plate shape and made of an electrically insulating material, a surface member having a sheet shape and disposed on one surface side of the substrate portion, and a heat generation portion formed on the other surface side of the substrate portion. The surface member is formed of a fiber fabric that is provided with a space portion recessed toward the substrate portion in a thickness direction of the surface member and that restricts a heat transfer in a surface direction of the surface member by the space portion.

A heater for a semiconductor manufacturing apparatus, the heater includes an AlN ceramic substrate and a heating element embedded inside the AlN ceramic substrate. The AlN ceramic substrate contains O, C, Ti, Ca, and Y as impurity elements, includes an yttrium aluminate phase as a crystal phase, and has a Ti/Ca mass ratio of 0.13 or more, and a TiN phase is not detected in an XRD profile measured with Cu K-α radiation.

A flexible heating body includes: a sheet-shaped flexible base; at least one heating circuit disposed on the base; a conductive circuit disposed on the base and connected to both ends of the at least one heating circuit; and a flexible protective film covering the at least one heating circuit. In an embodiment, the at least one heating circuit, the conductive circuit, or the protective film are all formed by magnetron sputtering coating.