A graphitization furnace includes: a first electrode; a second electrode disposed so as to face the first electrode; a first energized heating element provided on a surface of the first electrode facing the second electrode; and a second energized heating element provided on a surface of the second electrode facing the first electrode. The first and second energized heating elements are configured to allow to be disposed therebetween, an object to be processed. The graphitization furnace is configured to heat and graphitize the object to be processed disposed between the first and second energized heating elements by energizing between the first and second electrodes.

In some examples, a heating assembly includes at least two electrical connectors and at least one heating module extending between the at least two electrical connectors. Each heating module is monolithic, includes graphite, and is configured to expand in a first direction and remain rigid in a second direction that is substantially perpendicular to the first direction.

In some examples, a heating assembly includes at least two electrical connectors and at least one heating module extending between the at least two electrical connectors. Each heating module is monolithic, includes graphite, and is configured to expand in a first direction and remain rigid in a second direction that is substantially perpendicular to the first direction.

There is provided a technique capable of shortening a temperature stabilization time in a process chamber by improving a heat insulation performance of a lower portion of the process chamber. A heat insulation structure is arranged in a vicinity of a furnace opening of a heat treatment furnace wherein a temperature gradient is formed at the vicinity of the furnace opening. The heat insulation structure includes a plurality of heat insulation plates with predetermined gaps therebetween. Each heat insulation plate includes a heat shield made of metal; and a seal made of quartz or ceramics and configured to cover a front surface and a rear surface of the heat shield. The heat shield is arranged in a vacuum cavity provided in the seal.

A heating element can be moved by a machine, such as a machine including a fan, an actuator, or a conveyor. The heating element can be attached to or embedded in a fan or an actuator. Or, the heating element can be attached to or embedded in a conveyor belt of a conveyor. A combination of a heating element and a mover machine can be further combined with a heat radiating wall. The heating element and the machine can be arranged behind the wall. And, when the heating element and the machine are powered on, the heating element converts electrical energy into heat, which increases the temperature of the wall, and the machine moves the heating element to be next to different areas of the wall. This allows for heat to be distributed more evenly to the wall than it would be if the heating element did not move.

An indirectly heated electrical rotary kiln including a longitudinal inner shell for conveying process material therethrough, the inner shell being rotatable about its longitudinal axis. The rotary kiln further includes a stationary shroud arranged along the length and around the cross-sectional perimeter of the inner shell, thereby surrounding said inner shell, and a shroud module detachable from the remaining shroud, and formed as a longitudinal section and a cross-sectional perimeter segment of the shroud. The rotary kiln further includes an electrical heating element provided on the shroud module on an inside of the shroud, said heating element being configured to heat the inner shell, when in use. Methods for replacing a heating element of the rotary kiln are also disclosed.

An indirectly heated electrical rotary kiln including a longitudinal inner shell for conveying process material therethrough, the inner shell being rotatable about its longitudinal axis. The rotary kiln further includes a stationary shroud arranged along the length and around the cross-sectional perimeter of the inner shell, thereby surrounding said inner shell, and a shroud module detachable from the remaining shroud, and formed as a longitudinal section and a cross-sectional perimeter segment of the shroud. The rotary kiln further includes an electrical heating element provided on the shroud module on an inside of the shroud, said heating element being configured to heat the inner shell, when in use. Methods for replacing a heating element of the rotary kiln are also disclosed.

Systems and methods are described for electrically heated chemical processes utilizing conductive refractory materials. A heating apparatus may include a conductive refractory material without separate heating elements; and a furnace for heating hydrocarbons. The furnace includes one or more process tubes that are configured to receive a process vapor or fluid such that the process vapor or fluid does not contact the conductive refractory material. The conductive refractory material may be at least partially disposed within the furnace and configured to receive electrical power from a power source and to generate heat such that the conductive refractory material directly radiates heat within the furnace. A method of operating a chemical process may include providing such a furnace; and applying electricity directly to the conductive refractory material such that the conductive refractory material increases in temperature and provides heat to a chemical process.

Systems and methods are described for electrically heated chemical processes utilizing conductive refractory materials. A heating apparatus may include a conductive refractory material without separate heating elements; and a furnace for heating hydrocarbons. The furnace includes one or more process tubes that are configured to receive a process vapor or fluid such that the process vapor or fluid does not contact the conductive refractory material. The conductive refractory material may be at least partially disposed within the furnace and configured to receive electrical power from a power source and to generate heat such that the conductive refractory material directly radiates heat within the furnace. A method of operating a chemical process may include providing such a furnace; and applying electricity directly to the conductive refractory material such that the conductive refractory material increases in temperature and provides heat to a chemical process.

A substrate processing apparatus comprises: an inner tube (100) forming a processing space (S1) in which a plurality of substrates are stacked and processed in a vertical direction ; a heater unit (200) installed to surround at least a portion of the inner tube (100) to form a heating space (S2) between itself and the inner tube (100), and generating heat by receiving power from outside ; and an outer tube (300) in which the heater unit (200) is disposed to form an internal space (S3) between itself and the heater unit (200), and having at least one openable/closable opening (302) formed on a side thereof to allow external access to the internal space (S3), wherein the heater unit (200) is electrically connected to a power supply unit (700) that transfers power through the outer tube (300) at a position corresponding to the opening (302).