A substrate processing apparatus comprises: an inner tube (100) forming a processing space (S1) in which a plurality of substrates are stacked and processed in a vertical direction ; a heater unit (200) installed to surround at least a portion of the inner tube (100) to form a heating space (S2) between itself and the inner tube (100), and generating heat by receiving power from outside ; and an outer tube (300) in which the heater unit (200) is disposed to form an internal space (S3) between itself and the heater unit (200), and having at least one openable/closable opening (302) formed on a side thereof to allow external access to the internal space (S3), wherein the heater unit (200) is electrically connected to a power supply unit (700) that transfers power through the outer tube (300) at a position corresponding to the opening (302).

In a component (1) with a layered structure, at least one heat-conducting layer (5) is provided, in which a conducting element (2) intended to receive a heat-conducting medium is accommodated. A heat storage layer (3) adjoins the heat conducting layer (5), wherein the heat storage layer (3) comprises a natural stone. The conducting element (2) is accommodated in the heat-conducting layer (5) in a heat transfer element (5), wherein the heat transfer element (5) consists essentially of a powdered natural stone. The building element (1) is prefabricated in a production facility before it is transported to a construction site by connecting, preferably gluing, a heat-conducting layer (5), in which a conducting element (2) receiving a heat-conducting medium is accommodated in a heat transfer element (5) consisting essentially of a powdered natural stone, on one broad side to a heat storage layer (3) made of a natural stone and on the opposite broad side to a supporting and/or insulating layer (4; 9).

In a component (1) with a layered structure, at least one heat-conducting layer (5) is provided, in which a conducting element (2) intended to receive a heat-conducting medium is accommodated. A heat storage layer (3) adjoins the heat conducting layer (5), wherein the heat storage layer (3) comprises a natural stone. The conducting element (2) is accommodated in the heat-conducting layer (5) in a heat transfer element (5), wherein the heat transfer element (5) consists essentially of a powdered natural stone. The building element (1) is prefabricated in a production facility before it is transported to a construction site by connecting, preferably gluing, a heat-conducting layer (5), in which a conducting element (2) receiving a heat-conducting medium is accommodated in a heat transfer element (5) consisting essentially of a powdered natural stone, on one broad side to a heat storage layer (3) made of a natural stone and on the opposite broad side to a supporting and/or insulating layer (4; 9).