Disclosed is an electrostatic chuck apparatus which is configured of: an electrostatic chuck section; an annular focus ring section provided to surround the electrostatic chuck section; and a cooling base section which cools the electrostatic chuck section and the focus ring section. The focus ring section is provided with an annular focus ring, an annular heat conducting sheet, an annular ceramic ring, a nonmagnetic heater, and an electrode section that supplies power to the heater.

The invention is based on a protective device for a heating unit, in particular for a cooking apparatus (10), for protecting a heating unit against a hot air flow (44). To achieve an effective cooling effect, it is proposed that the protective device for a heating unit comprises a shielding element (68), which is provided for this purpose to shield a space (46) provided for a cold cooling air flow (42) for cooling the heating unit (14) against the hot air flow (44).

A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the heater zones. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having heater zones, branch transmission lines, common transmission lines and vias. The heating plate is capable of being driven by AC current or direct current phase alternating power, which has an advantage of minimizing DC magnetic field effects above the substrate support assembly and reduce plasma non-uniformity caused by DC magnetic fields.

A burner element for a cooktop includes a heat source for providing heat to a cooking zone positioned above the heat source and an automatic thermostat switch in communication with the cooking zone and the heat source. The automatic thermostat switch senses an actual temperature of the cooking zone, and when the actual temperature reaches a predetermined maximum temperature the automatic thermostat switch moves to an open position defined by the automatic thermostat switch at least partially impeding the heat source. The open position of the automatic thermostat switch is further defined by a decrease in the actual temperature of the cooking zone from approximately the predetermined maximum temperature to a control temperature. When the actual temperature of the cooking zone reaches the control temperature the automatic thermostat switch defines a closed position, wherein the automatic thermostat switch is substantially free of impeding the heat source.

A cooking appliance has a cooktop including a plurality of separately controlled cooking areas. A first heating element and a second heating element are positioned below one of the separately controlled cooking areas. A control switch is electrically coupled to the first heating element and the second heating element and is operable to selectively energize the first heating element with single-phase AC power and selectively energize the second heating element with two-phase AC power.

A cooking appliance has a cooktop including a plurality of separately controlled cooking areas. A first heating element and a second heating element are positioned below one of the separately controlled cooking areas. A control switch is electrically coupled to the first heating element and the second heating element and is operable to selectively energize the first heating element with single-phase AC power and selectively energize the second heating element with two-phase AC power.

A heater is provided having at least one thermally sprayed resistive heating layer, the resistive heating layer comprising a first metallic component that is electrically conductive and capable of reacting with a gas to form one or more carbide, oxide, nitride, and boride derivative; one or more oxide, nitride, carbide, and boride derivative of the first metallic component that is electrically insulating; and a third component capable of stabilizing the resistivity of the resistive heating layer. In some embodiments, the third component is capable of pinning the grain boundaries of the first metallic component deposited in the resistive heating layer and/or altering the structure of aluminum oxide grains deposited in the resistive heating layer.

A heater is provided having at least one thermally sprayed resistive heating layer, the resistive heating layer comprising a first metallic component that is electrically conductive and capable of reacting with a gas to form one or more carbide, oxide, nitride, and boride derivative; one or more oxide, nitride, carbide, and boride derivative of the first metallic component that is electrically insulating; and a third component capable of stabilizing the resistivity of the resistive heating layer. In some embodiments, the third component is capable of pinning the grain boundaries of the first metallic component deposited in the resistive heating layer and/or altering the structure of aluminum oxide grains deposited in the resistive heating layer.

A vending machine configured to dispense foodstuffs includes a plurality of cartridges having a plurality of slots with each slot releasably retaining a foodstuff; a heating section configured to receive at least one foodstuff from at least one of the plurality of slots and to heat the at least one foodstuff; and a dispensing drawer configured to receive the at least one foodstuff passing through the heating section and to permit access to the foodstuff.

A vending machine configured to dispense foodstuffs includes a plurality of cartridges having a plurality of slots with each slot releasably retaining a foodstuff; a heating section configured to receive at least one foodstuff from at least one of the plurality of slots and to heat the at least one foodstuff; and a dispensing drawer configured to receive the at least one foodstuff passing through the heating section and to permit access to the foodstuff.