In a substrate processing apparatus, neutralization processing is performed on a substrate by a neutralization device provided in a thermal processing section. In the neutralization device, at least one of a holder that holds the substrate and an emitter that emits vacuum ultraviolet rays is moved relative to another one in one direction. At this time, one surface of the substrate is irradiated with the vacuum ultraviolet rays emitted by the emitter. When the entire one surface of the substrate is irradiated with the vacuum ultraviolet rays, the neutralization processing ends. Thereafter, the substrate on which the neutralization processing has been performed is transported to a coating processing unit in a coating processing section. In the coating processing unit, a film of a processing liquid is formed on the one surface of the substrate on which the neutralization processing has been performed.

Provided is a soft X-ray static electricity removal apparatus that has achieved an increase in the amount of ionized air discharged, with a simple structure. A soft X-ray static electricity removal apparatus (1) includes a soft X-ray generation device (90), a container (10), a soft X-ray shielding sheet (20), and an insulating layer (50). The soft X-ray generation device generates soft X-rays (92). The container (10) has an outlet (12) from which ionized air (100) that has been ionized with the soft X-rays flows out. The soft X-ray shielding sheet (20) is used at the outlet of the container and includes a first outer sheet (30), an interlayer sheet (34), and a second outer sheet (40) which are formed of a material opaque to the soft X-rays. The first outer sheet has supply ports (32) for the ionized air formed therein; the interlayer sheet has an ionized air passage (38) formed therein, which includes ionized air inlet openings (36) that communicate with the supply ports; and the second outer sheet has a discharge port (42) formed therein, which communicates with the ionized air passage. The supply ports, the ionized air passage, and the discharge port communicate with each other to provide an ionized air transmission portion (44). The insulating layer insulates the soft X-ray shielding sheet and the container from each other.

Provided is a soft X-ray static electricity removal apparatus that has achieved an increase in the amount of ionized air discharged, with a simple structure. A soft X-ray static electricity removal apparatus (1) includes a soft X-ray generation device (90), a container (10), a soft X-ray shielding sheet (20), and an insulating layer (50). The soft X-ray generation device generates soft X-rays (92). The container (10) has an outlet (12) from which ionized air (100) that has been ionized with the soft X-rays flows out. The soft X-ray shielding sheet (20) is used at the outlet of the container and includes a first outer sheet (30), an interlayer sheet (34), and a second outer sheet (40) which are formed of a material opaque to the soft X-rays. The first outer sheet has supply ports (32) for the ionized air formed therein; the interlayer sheet has an ionized air passage (38) formed therein, which includes ionized air inlet openings (36) that communicate with the supply ports; and the second outer sheet has a discharge port (42) formed therein, which communicates with the ionized air passage. The supply ports, the ionized air passage, and the discharge port communicate with each other to provide an ionized air transmission portion (44). The insulating layer insulates the soft X-ray shielding sheet and the container from each other.

Provided is a static eliminator that efficiently eliminates static electricity from a tray of a droplet ejection device of a tray transport type. A static eliminator 20 includes a movable part 22 which is pushed by a tray 12 due to movement of the tray 12 and moves, and an ion generator 24 disposed on a movement path of the tray 12 and configured to generate ions according to the movement of the movable part 22.

Provided is a static eliminator that efficiently eliminates static electricity from a tray of a droplet ejection device of a tray transport type. A static eliminator 20 includes a movable part 22 which is pushed by a tray 12 due to movement of the tray 12 and moves, and an ion generator 24 disposed on a movement path of the tray 12 and configured to generate ions according to the movement of the movable part 22.

Apparatuses for converting a non-ionized gas stream into an ionized gas stream are disclosed. Disclosed apparatus include an ionizing wire electrode at least partially disposed within and stationary relative to a channel. A frame has plural support elements for supporting the ionizing wire. The frame is configured to make full rotations around the channel in a first rotation direction while applying tension to the ionizing wire. The support elements are configured to physically remove material from the ionizing wire while the support elements are moved along the wire by the frame rotation.

Apparatuses for converting a non-ionized gas stream into an ionized gas stream are disclosed. Disclosed apparatus include an ionizing wire electrode at least partially disposed within and stationary relative to a channel. A frame has plural support elements for supporting the ionizing wire. The frame is configured to make full rotations around the channel in a first rotation direction while applying tension to the ionizing wire. The support elements are configured to physically remove material from the ionizing wire while the support elements are moved along the wire by the frame rotation.

Various aspects of the disclosure provides for an ionized air blower that can be used to neutralize static charge on a target surface or provide a charge on the target surface. The ionized air blower may comprise a fan configured to generate airflow toward a target surface, an ionizer configured to produce positive ions and negative ions in the airflow, and control circuitry. The control circuitry is configured to control one or both of a speed of the airflow from the blower and ionization of the airflow. The ionization is performed by a selected one of ion imbalanced mode or ion balanced mode of the blower.

Various aspects of the disclosure provides for an ionized air blower that can be used to neutralize static charge on a target surface or provide a charge on the target surface. The ionized air blower may comprise a fan configured to generate airflow toward a target surface, an ionizer configured to produce positive ions and negative ions in the airflow, and control circuitry. The control circuitry is configured to control one or both of a speed of the airflow from the blower and ionization of the airflow. The ionization is performed by a selected one of ion imbalanced mode or ion balanced mode of the blower.

A flavor inhaler includes a control unit configured to control operation of the flavor inhaler; a main switch electrically connected to an input side of the control unit, the main switch configured to send a signal to the control unit to start operation of the control unit; and a sub switch electrically connected to the control unit, the sub switch configured to send a signal to the control unit to start supplying liquid from a liquid holding unit accommodating an aerosol base.