A photocathode comprises a substrate in which a cavity is formed and a film of material disposed on the substrate. The film of material comprises an electron emitting surface configured to emit electrons when illuminated by a beam of radiation. The electron emitting surface is on an opposite side of the film of material from the cavity.

A method for controlling a density distribution of electrons provided by an electron source for use in hard X-ray, soft X-ray and/or extreme ultraviolet generation, the method comprising generating a plurality of electrons from a pattern of ultracold excited atoms using an ionization laser inside a cavity, wherein the electrons have a density distribution determined by at least one of the patterns of excited atoms and the ionization laser, and accelerating the electrons out of the cavity using a non-static acceleration profile, wherein the acceleration profile controls the density distribution of the electrons as they exit the cavity.

Provided is a variable energy and miniaturized accelerator. It is impossible to change the energy of the extraction beam in the related cyclotron or to miniaturize an accelerator in the related synchrotron. The accelerator includes a pair of magnets which form a magnetic field therebetween; an ion source which injects ions between the magnets; an acceleration electrode which accelerates the ions; and a beam extraction path which extracts the ions to the outside. A plurality of ring-shaped beam closed orbits formed by the pair of magnets, in which the ions of different energies respectively circulate, are aggregated on one side. The frequency of the radiofrequency electric field fed to the ions by the acceleration electrode is modulated by the beam closed orbits.

Provided is a variable energy and miniaturized accelerator. It is impossible to change the energy of the extraction beam in the related cyclotron or to miniaturize an accelerator in the related synchrotron. The accelerator includes a pair of magnets which form a magnetic field therebetween; an ion source which injects ions between the magnets; an acceleration electrode which accelerates the ions; and a beam extraction path which extracts the ions to the outside. A plurality of ring-shaped beam closed orbits formed by the pair of magnets, in which the ions of different energies respectively circulate, are aggregated on one side. The frequency of the radiofrequency electric field fed to the ions by the acceleration electrode is modulated by the beam closed orbits.

A compact light source based on electron beam accelerator technology includes a storage ring, a booster ring, a linear accelerator and an undulator for providing light having the characteristics for actinic mask inspection at 13.5 nm. The booster ring and the storage ring are located at different levels in a concentric top view arrangement in order to keep the required floor space small and to reduce interference effects. Quasi-continuous injection by enhanced top-up injection leads to high intensity stability and combats lifetime reductions due to elastic beam gas scattering and Touschek scattering. Injection into the storage ring and extraction from the booster ring are performed diagonal in the plane which is defined by the parallel straight section orbits of the booster ring and the storage ring. For the top-up injection from the booster ring into the storage ring two antisymmetrically arranged Lambertson septa are used.

When accelerating first ions, radio frequency power is fed to a drift tube linear accelerator so that the phase difference between an accelerating half cycle for accelerating the first ions in one of the plurality of drift tube gaps and the accelerating half cycle for accelerating the accelerated first ions reaching the next drift tube gap is set to a first accelerating cycle phase difference; and when accelerating second ions having a charge-to-mass ratio lower than the first ions, the radio frequency power is fed to the drift tube linear accelerator so that the phase difference between an accelerating half cycle for accelerating the second ions in the one drift tube gap and the accelerating half cycle for the accelerated second ions reaching the next drift tube gap is set to a second accelerating cycle phase difference that is larger than the first accelerating cycle phase difference.

When accelerating first ions, radio frequency power is fed to a drift tube linear accelerator so that the phase difference between an accelerating half cycle for accelerating the first ions in one of the plurality of drift tube gaps and the accelerating half cycle for accelerating the accelerated first ions reaching the next drift tube gap is set to a first accelerating cycle phase difference; and when accelerating second ions having a charge-to-mass ratio lower than the first ions, the radio frequency power is fed to the drift tube linear accelerator so that the phase difference between an accelerating half cycle for accelerating the second ions in the one drift tube gap and the accelerating half cycle for the accelerated second ions reaching the next drift tube gap is set to a second accelerating cycle phase difference that is larger than the first accelerating cycle phase difference.

A system has a linear accelerator, ion pump and a compensating magnet. The ion pump includes an ion pump magnet position, an ion pump magnet shape, an ion pump magnet orientation, and an ion pump magnet magnetic field profile. The compensating magnet has a position, a shape, an orientation, and a magnetic field profile, where at least one of the position, shape, orientation, and magnetic field profile of the compensating magnet reduce at least one component of a magnetic field in the linear accelerator resulting from the ion pump magnet.

Embodiments of the present invention disclose methods and systems for performing particle acceleration using a cyclotron RF resonator with an asymmetrical fixed tuner. A cyclotron RF resonator includes a single shorting plate tuner inside and a fixed short stem, and does not require top-bottom mirror symmetry. Small movements in relation to the wavelengths of the maximum acceleration voltage is bound by the capacitance of the accelerating surfaces. As such, the resonator may perform particle acceleration using asymmetrical tuning to reduce design complexity, cost of maintenance, fabrication and installation complexity, failure rate, and software complexity (e.g., control software), for example.

Embodiments of the present invention disclose methods and systems for performing particle acceleration using a cyclotron RF resonator with an asymmetrical fixed tuner. A cyclotron RF resonator includes a single shorting plate tuner inside and a fixed short stem, and does not require top-bottom mirror symmetry. Small movements in relation to the wavelengths of the maximum acceleration voltage is bound by the capacitance of the accelerating surfaces. As such, the resonator may perform particle acceleration using asymmetrical tuning to reduce design complexity, cost of maintenance, fabrication and installation complexity, failure rate, and software complexity (e.g., control software), for example.