Patent classifications
H10B12/20
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH METAL LAYERS
A semiconductor device, the device including: a first silicon layer including a first single crystal silicon; a first metal layer disposed over the first silicon layer; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the plurality of transistors include a second single crystal silicon; a third metal layer disposed over the first level; a fourth metal layer disposed over the third metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 40 nm alignment error; and a via disposed through the first level, where the first level thickness is less than two microns.
Methods for producing 3D semiconductor memory device and structure utilizing alignment marks
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.
3D semiconductor memory device and structure
A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where the first transistors each include a single crystal channel; first metal layers interconnecting at least the first transistors; and a second level including a second single crystal layer, the second level including second transistors, where the second level overlays the first level, where the second level is bonded to the first level, where the bonded includes oxide to oxide bonds, where the second level includes an array of memory cells, and where each of the memory cells includes at least one recessed-channel-array-transistor (RCAT).
Dual-port semiconductor memory and first in first out (FIFO) memory having electrically floating body transistor
Multi-port semiconductor memory cells including a common floating body region configured to be charged to a level indicative of a memory state of the memory cell. The multi-port semiconductor memory cells include a plurality of gates and conductive regions interfacing with said floating body region. Arrays of memory cells and method of operating said memory arrays are disclosed for making a memory device.
Memory cell comprising first and second transistors and methods of operating
Semiconductor memory cells, array and methods of operating are disclosed. In one instance, a memory cell includes a bi-stable floating body transistor and an access device; wherein the bi-stable floating body transistor and the access device are electrically connected in series.
MEMORY DEVICE INCLUDING PILLAR-SHAPED SEMICONDUCTOR ELEMENT AND METHOD FOR MANUFACTURING THE SAME
On P layer bases extending in a band shape in a first direction in plan view, N.sup.+ layers also extending in a band shape in the first direction and Si pillars are formed. Subsequently, a gate insulating layer and gate conductor layers are formed so as to surround the Si pillars. Subsequently, contact holes whose bottom portions are in contact with the N.sup.+ layers are formed in an insulating layer, and first conductor W layers are formed at the bottom portions of the contact holes. Subsequently, insulating layers each having a hole are formed in the contact holes. Subsequently, a second conductor W layer is formed in a second direction perpendicular to the first direction so as to be connected to the gate conductor layers.
METHODS FOR PRODUCING A 3D SEMICONDUCTOR MEMORY DEVICE
A method for producing a 3D memory device, including: providing a first level including a single crystal layer and control circuits, the control circuits include a plurality of first single crystal transistors; forming at least one second level disposed above the first level; processing to form a plurality of second transistors, where the processing includes forming a plurality of memory cells, each of the plurality of memory cells includes at least one of the plurality of second transistors, where the control circuits control the plurality of memory cells, where at least one of the plurality of memory cells is at least partially atop a portion of the control circuits, where processing the control circuits accounts for a thermal budget associated with processing of the second transistors by adjusting annealing of the first transistors accordingly; processing to replace gate material of at least one of the plurality of second transistors.
Semiconductor memory having both volatile and non-volatile functionality comprising resistive change material and method of operating
A semiconductor memory cell including a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to the cell, and a non-volatile memory comprising a bipolar resistive change element, and methods of operating.
MEMORY DEVICE HAVING 2-TRANSISTOR VERTICAL MEMORY CELL AND A COMMON PLATE
Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes a substrate, a conductive plate located over the substrate to couple a ground connection, a data line located between the substrate and the conductive plate, a memory cell, and a conductive line. The memory cell includes a first transistor and a second transistor. The first transistor includes a first region electrically coupled between the data line and the conductive plate, and a charge storage structure electrically separated from the first region. The second transistor includes a second region electrically coupled to the charge storage structure and the data line. The conductive line is electrically separated from the first and second regions and spans across part of the first region of the first transistor and part of the second region of the second transistor and forming a gate of the first and second transistors.
3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH METAL LAYERS
A semiconductor device, the device including: a first substrate; a first metal layer disposed over the substrate; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the plurality of transistors include a second single crystal silicon; a third metal layer disposed over the first level; a fourth metal layer disposed over the third metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 100 nm alignment error; and a via disposed through the first level, where the via has a diameter of less than 450 nm, where the fourth metal layer provides a global power distribution, and where a typical thickness of the fourth metal layer is at least 50% greater than a typical thickness of the third metal.