A semiconductor memory instance is provided that includes an array of memory cells. The array includes a plurality of semiconductor memory cells arranged in at least one column and at least one row. Each of the semiconductor memory cells includes a floating body region configured to be charged to a level indicative of a state of the memory cell. Further includes are a plurality of buried well regions, wherein each of the buried well regions can be individually selected, and a decoder circuit to select at least one of the buried well regions.

A memory structure includes a substrate; a first gate structure, a second gate structure and a third gate structure disposed on the substrate, separated from each other along the first direction and respectively extending along the second direction and the third direction; channel bodies separated from each other and passing through the first gate structure, the second gate structure and the third gate structure along the first direction; dielectric films disposed between the first gate structure, the second gate structure, the third gate structure and the channel bodies; and a first side plug electrically connected to the substrate and the channel bodies. The first gate structure, the second gate structure and the third gate structure surround each of the dielectric films and each of the channel bodies, and the dielectric films do not include a charge storage structure.

A 3D semiconductor device including: a first single crystal layer with first transistors; overlaid by a first metal layer; a second metal layer overlaying the first metal layer and being overlaid by a third metal layer; a logic gates including at least the first metal layer interconnecting the first transistors; second transistors disposed atop the third metal layer; third transistors disposed atop the second transistors; a top metal layer disposed atop the third transistors; and a memory array including word-lines, and at least four memory mini arrays, where each of the memory mini arrays includes at least four rows by four columns of memory cells, where each of the memory cells includes at least one of the second transistors or third transistors, sense amplifier circuit(s) for each of the memory mini arrays, the second metal layer provides a greater current carrying capacity than the third metal layer.

A method of manufacturing a vertical transistor device comprises forming a bottom source region on a semiconductor substrate, forming a channel region extending vertically from the bottom source region, forming a top drain region on an upper portion of the channel region, forming a first gate region having a first gate length around the channel region, and forming a second gate region over the first gate region and around the channel region, wherein the second gate region has a second gate length different from the first gate length, and wherein at least one dielectric layer is positioned between the first and second gate regions.

A semiconductor device, the device including: a first silicon layer including first single crystal silicon; an isolation layer disposed over the first silicon layer; a first metal layer disposed over the isolation layer; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the isolation layer includes an oxide to oxide bond surface, where the plurality of transistors include a second single crystal silicon region; and a third metal layer disposed over the first level, where a typical first thickness of the third metal layer is at least 50% greater than a typical second thickness of the second metal layer.

An N.sup.+ layer 21 connected to a source line SL at both ends of Si pillars 23a to 23d standing in a vertical direction; N.sup.+ layers 30a and 30b connected to a bit line BL1; N.sup.+ layers 30c and 30d connected to a bit line BL2; the Si pillars 23a to 23d connected to the N+ layer 21; gate insulating layers 27a to 27d surrounding the Si pillars 23a to 23d; first gate conductor layers 28a and 28b surrounding the gate insulating layers 27a t 27d and connected to plate lines PL1 and PL2; and second gate conductor layers 29a and 29b connected to word lines WL1 and WL2 are disposed on a substrate 1. The Si pillars 23a and 23c have sections partially overlap each other in perspective view of the sections along line X1-X1′ and line X2-X2′, and the same applies to the Si pillars 23b and 23d.

A first dynamic flash memory cell formed on a first Si pillar 25a including an N.sup.+ layer 21a, a P layer 22a, and an N.sup.+ layer 21b, and a second dynamic flash memory cell formed on a second Si pillar 25b including a P layer 22b and an N.sup.+ layer 21c, the first dynamic flash memory cell and the second dynamic flash memory cell sharing the N.sup.+ layer 21b that is connected to a first bit line BL1, are stacked on top of one another on a P-layer substrate 20 to form a dynamic flash memory. In plan view, a first plate line PL1, a first word line WL1, a second word line WL2, and a second plate line PL2 extend in the same direction and are formed to be perpendicular to a direction in which the first bit line BL1 extends.

A semiconductor structure for a DRAM is described having multiple layers of arrays of memory cells. Memory cells in a vertical string extending through the layers have an electrical connection to one terminal of the memory cells in that string. Word lines couple the strings together. Each layer of the array also includes bit line connections to memory cells on that layer. Select transistors enable the use of folded bit lines. The memory cells preferably are thyristors. Methods of fabricating the array are described.

The present disclosure provides a semiconductor memory device and a manufacturing method thereof, and relates to the technical field of semiconductors. The semiconductor memory device includes a substrate, a source structure, a laminated structure, a floating body, a trench region, a drain structure and a gate structure. The source structure is formed on the substrate. The laminated structure includes a nitride layer and an oxide layer that are alternately laminated on the source structure. The floating body is formed in the oxide layer, and a through hole is formed in the floating body along a lamination direction of the laminated structure. The trench region is formed inside the floating body, a through hole is also formed in the trench region along the lamination direction, and the trench region is in contact with the source structure.

A 3D semiconductor device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each transistor of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the transistors of the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where the via includes contact with at least one of the plurality of transistors.