Patent classifications
H10B12/50
Unified semiconductor devices having processor and heterogeneous memories and methods for forming the same
Embodiments of semiconductor devices and fabrication methods thereof are disclosed. In an example, a semiconductor device includes NAND memory cells and a first bonding layer including first bonding contacts. The semiconductor device also includes a second semiconductor structure including DRAM cells and a second bonding layer including second bonding contacts. The semiconductor device also includes a third semiconductor structure including a processor, SRAM cells, and a third bonding layer including third bonding contacts. The semiconductor device further includes a first bonding interface between the first and third bonding layers, and a second bonding interface between the second and third bonding layers. The first bonding contacts are in contact with a first set of the third bonding contacts at the first bonding interface. The second bonding contacts are in contact with a second set of the third bonding contacts at the second bonding interface. The first and second bonding interfaces are in a same plane.
Semiconductor device, electronic system, and electrostatic discharge protection method for semiconductor device thereof
The present application discloses a semiconductor device, an electronic system and an electrostatic discharge (ESD) protection method for a semiconductor device thereof. The semiconductor device includes a substrate, an operation solder structure disposed on a first surface of the substrate for receiving an operation signal, a detection solder structure disposed on the first surface of the substrate for receiving a chip connection signal, and a semiconductor chip disposed on a second surface of the substrate. The semiconductor chip includes an operation electrical contact coupled to the operation solder structure, a detection electrical contact coupled to the detection solder structure, an ESD protection unit coupled to the operation electrical contact, and a logic circuit coupled to the detection electrical contact for adjusting capacitance of the ESD protection unit according to the chip connection signal.
3D semiconductor device and structure with metal layers and a connective path
A 3D semiconductor device including: a first level including a plurality of first metal layers; a second level, where the second level overlays the first level, where the second level includes at least one single crystal silicon layer, where the second level includes a plurality of transistors, where each transistor of the plurality of transistors includes a single crystal channel, where the second level includes a plurality of second metal layers, where the plurality of second metal layers include interconnections between the transistors of the plurality of transistors, and where the second level is overlaid by a first isolation layer; and a connective path between the plurality of transistors and the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, and where the via includes contact with at least one of the plurality of transistors.
MEMORY CELL AND MANUFACTURING METHOD THEREOF, AND MEMORY AND MANUFACTURING METHOD THEREOF
The present disclosure provides a memory cell and a manufacturing method thereof, and a memory and a manufacturing method thereof, and relates to the technical field of semiconductors. The memory unit includes a first dielectric layer and a second dielectric layer that are stacked. A first transistor is disposed in the first dielectric layer. A second transistor is disposed in the second dielectric layer. The first dielectric layer is connected to the second dielectric layer by using a connecting wire.
MICROELECTRONIC DEVICES, AND RELATED ELECTRONIC SYSTEMS AND METHODS OF FORMING MICROELECTRONIC DEVICES
A microelectronic device comprises a first microelectronic device structure, a second microelectronic device structure attached to the first microelectronic device structure. The first microelectronic device structure comprises a first memory array region comprising memory cells, each of the memory cells comprising an access device and a charge storage device operably coupled to the access device. The first microelectronic device structure further comprises a first base structure comprising first control logic devices configured to effectuate one or more control operations of the memory cells of the first memory array region. The second microelectronic device structure comprises a second memory array region comprising additional memory cells, each of the additional memory cells comprising an additional access device and an additional charge storage device operably coupled to the additional access device. The second microelectronic device further a second base structure comprising second control logic devices configured to effectuate one or more control operations of the additional memory cells of the second memory array region. Related microelectronic devices, electronic systems, and methods are also described.
METHODS OF FORMING MICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES AND ELECTRONIC SYSTEMS
A method of forming a microelectronic device comprises forming a microelectronic device structure comprising memory cells, digit lines, word lines, and at least one isolation material covering and surrounding the memory cells, the digit lines, and the word lines. An additional microelectronic device structure comprising control logic devices and at least one additional isolation material covering and surrounding the control logic devices is formed. The additional microelectronic device structure is attached to the microelectronic device structure. Contact structures are formed to extend through the at least one isolation material and the at least one additional isolation material. Some of the contact structures are coupled to some of the digit lines and some of the control logic devices. Some other of the contact structures are coupled to some of the word lines and some other of the control logic devices. Microelectronic devices, electronic systems, and additional methods are also described.
METHODS OF FORMING MICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES AND ELECTRONIC SYSTEMS
A method of forming a microelectronic device comprises forming a first microelectronic device structure comprising a first semiconductor structure, a first isolation material over the first semiconductor structure, and first conductive routing structures over the first semiconductor structure and surrounded by the first isolation material. A second microelectronic device structure comprising a second semiconductor structure and a second isolation material over the second semiconductor structure is formed. The second isolation material is bonded to the first isolation material to attach the second microelectronic device structure to the first microelectronic device structure. Memory cells comprising portions of the second semiconductor structure are formed after attaching the second microelectronic device structure to the first microelectronic device structure. Control logic devices including transistors comprising portions of the first semiconductor structure are formed after forming the memory cells. Microelectronic devices, electronic systems, and additional methods are also described.
METHODS OF FORMING MICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES AND ELECTRONIC SYSTEMS
A method of forming a microelectronic device comprises forming a first microelectronic device structure comprising a first semiconductor structure, control logic circuitry at least partially overlying the first semiconductive structure, first back-end-of-line (BEOL) structures over and in electrical communication with the control logic circuitry, and first isolation material covering the control logic circuitry and the first BEOL structures. A second microelectronic device structure is bonded over the first BEOL structures to form a first assembly. The first assembly is vertically inverted. A third microelectronic device structure comprising a second semiconductor structure is bonded over the vertically inverted first assembly to form a second assembly. Memory cells comprising portions of the second semiconductor structure are formed after forming the second assembly. Second BEOL structures are formed over the memory cells. Microelectronic devices, electronic systems, and additional methods are also described.
SEMICONDUCTOR MEMORY DEVICE
A semiconductor memory device comprises: a memory cell array including a word line stack including word lines vertically stacked; and a sub word line driver block including sub word lines disposed below an end portion of the word line stack, wherein the word lines and the sub word lines extend in directions, respectively, crossing each other.
METHODS OF FORMING MICROELECTRONIC DEVICES, AND RELATED MICROELECTRONIC DEVICES AND ELECTRONIC SYSTEMS
A method of forming a microelectronic device comprises forming a first microelectronic device structure comprising a first semiconductor structure, control logic circuitry including transistors at least partially overlying the first semiconductor structure, and a first isolation material covering the first semiconductor structure and the control logic circuitry. A second microelectronic device structure comprising a second semiconductor structure and a second isolation material over the second semiconductor structure is formed. The second isolation material of the second microelectronic device structure is bonded to the first isolation material of the first microelectronic device structure to attach the second microelectronic device structure to the first microelectronic device structure. Memory cells comprising portions of the second semiconductor structure are formed after attaching the second microelectronic device structure to the first microelectronic device structure. Microelectronic devices, electronic systems, and additional methods are also described.