A level shifting circuit generates a pulse signal, when both of the logic levels of two complementary input signals of a level shifter has changed while both of the logic levels of two output signals of the level shifter present at low logic level, to pull up either one of the output signals of the level shifter to a second high logic level. Once the logic level of both output signals at the first output node and the second output node present complementary, the level shifting circuit stops pulling up the output signal.

An integrated circuit includes two different types of embedded memories, with cells that have different retention characteristics, and situated in different areas of the substrate. In some applications the cells are both non-volatile memories sharing a common gate layer but with different oxide layers, different thicknesses, etc. The first type of cell is a conventional flash cell which can be part of a logic/memory region, while the second type of cell uses capacitive coupling and can be located in a high voltage region. Because of their common features, the need for additional masks, manufacturing steps, etc. can be mitigated.

According to principles as discussed herein, an EEPROM cell is provided and then, after testing the code, using the exact same architecture, transistors, memory cells, and layout, the EEPROM cell is converted to a read-only memory (ROM) cell. This conversion is done on the very same integrated circuit die using the same layout, design, and timing with only a single change in an upper level mask in the memory array. In one embodiment, the mask change is the via mask connecting metal 1 to poly. This allows the flexibility to store the programming code as non-volatile memory code, and then after it has been tested, at time selected by the customer, some or all of that code from a code that can be written to a read-only code that is stored in a ROM cell that is composed the same transistors and having the same layout.

Memory dies on a wafer may include multiple memory blocks including bit lines extending along different directions. A memory die may include a first-type plane including first memory blocks and a second-type plane including second memory blocks. In this case, memory blocks having different bit line directions may be formed within a same memory die. An exposure field may include multiple types of memory dies that are oriented in different orientations. The bit line directions may be oriented differently in the multiple types of memory dies. Each lithographic exposure process may include a first step in which lithographic patterns in first exposure fields are oriented in one direction, and a second step in which lithographic patterns in second exposure fields are oriented in another direction. The different orientations of bit lines and word lines may change local directions of stress to reduce wafer distortion.

There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.

A nonvolatile memory device may operate with a logic transistor, which includes a transistor gate formed of a material. The memory device includes a floating gate formed of the material, a first-type fin, and a second-type fin. The first-type fin includes a first-type channel, a first-type source, and a first-type drain. The first-type channel, the first-type source, and the first-type drain have a first conductivity type. The second-type fin includes a second-type channel, a second-type source, and a second-type drain. The second-type source and the second-type drain have the first conductivity type. The second-type channel has a second conductivity type opposite to the first conductivity type. The floating gate is positioned on the first-type channel and the second-type channel.

A three-dimensional memory device may include an alternating stack of insulating layers and spacer material layers formed over a carrier substrate. The spacer material layers are formed as, or are subsequently replaced with, electrically conductive layers. Memory stack structures are formed through the alternating stack. Each memory stack structure includes a respective vertical semiconductor channel and a respective memory film. Drain regions and bit lines can be formed over the memory stack structures to provide a memory die. The memory die can be bonded to a logic die containing peripheral circuitry for supporting operations of memory cells within the memory die. A distal end of each of the vertical semiconductor channels is physically exposed by removing the carrier substrate. A source layer is formed directly on the distal end each of the vertical semiconductor channels. A bonding pad can be formed on the source layer.

A nonvolatile memory device may operate with a logic transistor, which includes a transistor gate formed of a material. The memory device includes a floating gate formed of the material, a first-type fin, and a second-type fin. The first-type fin includes a first-type channel, a first-type source, and a first-type drain. The first-type channel, the first-type source, and the first-type drain have a first conductivity type. The second-type fin includes a second-type channel, a second-type source, and a second-type drain. The second-type source and the second-type drain have the first conductivity type. The second-type channel has a second conductivity type opposite to the first conductivity type. The floating gate is positioned on the first-type channel and the second-type channel.

A method of fabricating a tunnel oxide layer for a semiconductor memory device, the method comprising: fabricating on a substrate a first oxide layer by a plasma oxidation process; and fabricating at least one further oxide layer by a furnace oxidation process, wherein during fabrication of the at least one further oxide layer, reactive gases penetrate the first oxide layer and react with the silicon substrate to form at least a first portion of the at least one further oxide layer beneath the first oxide layer.

Devices and methods of forming a device are disclosed. The device includes a substrate defined with at least a device region. A multi-gate transistor disposed in the device region which includes first and second gates both having first and second gate sidewalls. The multi-gate transistor also includes first source/drain (S/D) regions disposed adjacent to the first gate sidewall of the first and second gate, a common second S/D region disposed adjacent to the second gate sidewall of the first and second gate. A negative capacitance element is disposed within the second gate to reduce total overlap capacitance of the transistor. An interlevel dielectric (ILD) layer is disposed over the substrate and covering the transistor. First and second contacts are disposed in the ILD layer which are coupled to the first and second S/D regions respectively.