Patent classifications
H10B53/40
Using ferroelectric field-effect transistors (FeFETs) as capacitive processing units for in-memory computing
An electronic circuit includes a plurality of word lines; a plurality of bit lines intersecting said plurality of word lines at a plurality of grid points; and a plurality of in-memory processing cells located at said plurality of grid points. Each of said in-memory processing cells includes a first switch having a first terminal coupled to a corresponding one of said word lines and a second terminal; a second switch having a first terminal coupled to said second terminal of said first switch and a second terminal coupled to a corresponding one of said bit lines; and a non-volatile tunable capacitor having one electrode coupled to said second terminal of said first switch and said first terminal of said switch, and having another electrode coupled to ground.
IC'S WITH MULTPLE LEVELS OF EMBEDDED MEMORY
Integrated circuits with embedded memory having multiple levels. Each memory array level includes ferroelectric capacitors coupled to an array of thin film access transistors according to a 1T-1F or 1T-many F bit-cell architecture. The levels of embedded memory are monolithically fabricated, one over the other, or after monolithically fabricating one level of embedded memory in a host IC structure, a second IC structure with another level of memory array is directly bonded to a front or backside of the host IC structure in a face-to-face or face-to-back orientation. The second IC structure may include additional peripheral CMOS circuitry, such as sense amps or decoders, or not.
IC'S WITH MULTPLE LEVELS OF EMBEDDED MEMORY
Integrated circuits with embedded memory having multiple levels. Each memory array level includes ferroelectric capacitors coupled to an array of thin film access transistors according to a 1T-1F or 1T-many F bit-cell architecture. The levels of embedded memory are monolithically fabricated, one over the other, or after monolithically fabricating one level of embedded memory in a host IC structure, a second IC structure with another level of memory array is directly bonded to a front or backside of the host IC structure in a face-to-face or face-to-back orientation. The second IC structure may include additional peripheral CMOS circuitry, such as sense amps or decoders, or not.
EMBEDDED MEMORY IC'S WITH POWER SUPPLY DROOP CIRCUITRY COUPLED TO FERROELECTRIC CAPACITORS
Integrated circuits with embedded memory that includes ferroelectric capacitors having first conductor structures coupled to an underlying array of access transistors, and second conductors coupled to independent plate lines that are shunted by a metal strap having a pitch similar to that of the capacitors. The independent plate lines may reduce bit-cell disturbs and/or simplify read/write process while the plate line straps reduce series resistance of the plate lines. The metal straps may be subtractively patterned lines in direct contact with the second capacitor conductors, or may be damascene structures coupled to the second capacitor conductors through vias that also have a pitch similar to that of the capacitors.
EMBEDDED MEMORY IC'S WITH POWER SUPPLY DROOP CIRCUITRY COUPLED TO FERROELECTRIC CAPACITORS
Integrated circuits with embedded memory that includes ferroelectric capacitors having first conductor structures coupled to an underlying array of access transistors, and second conductors coupled to independent plate lines that are shunted by a metal strap having a pitch similar to that of the capacitors. The independent plate lines may reduce bit-cell disturbs and/or simplify read/write process while the plate line straps reduce series resistance of the plate lines. The metal straps may be subtractively patterned lines in direct contact with the second capacitor conductors, or may be damascene structures coupled to the second capacitor conductors through vias that also have a pitch similar to that of the capacitors.
INTEGRATED PLANAR TRANSISTORS AND MEMORY CELL ARRAY ARCHITECTURES
Memory device architectures including integrated high voltage planar transistor support circuitry underlying memory cell arrays are discussed related to improving density and device performance Such memory device architectures include planar transistors having wide band gap channel materials integrated with memory cell arrays using a number of metallization layers. The metallization layers between the planar transistors and the memory cells are predominantly tungsten and the metallization layers in which the memory cells are embedded are predominantly a metal other than tungsten.
EMBEDDED MEMORY WITH DOUBLE-WALLED FERROELECTRIC CAPACITORS
Integrated circuits with embedded memory that includes double-walled ferroelectric capacitors over an array of access transistors. Capacitor access transistors may be recessed channel array transistors (RCATs) implemented in a monocrystalline material that has been transferred from a donor wafer, or implemented in an amorphous or polycrystalline semiconductor material that has been deposited, such as a metal oxide semiconductor.
DUAL HYDROGEN BARRIER LAYER FOR MEMORY DEVICES
A device includes, in a first region, a first conductive interconnect, an electrode structure on the first conductive interconnect, where the electrode structure includes a first conductive hydrogen barrier layer and a first conductive fill material. A memory device including a ferroelectric material or a paraelectric material is on the electrode structure. A second dielectric includes an amorphous, greater than 90% film density hydrogen barrier material laterally surrounds the memory device. A via electrode including a second conductive hydrogen barrier material is on at least a portion of the memory device. A second region includes a conductive interconnect structure embedded within a less than 90% film density material.
Memory cell arrangement and methods thereof
A memory cell arrangement is provided that may include: a plurality of electrode layers, wherein each of the plurality of electrode layers comprises a plurality of through holes, each of the plurality of through holes extending from a first surface to a second surface of a respective electrode layer; a plurality of electrode pillars, wherein each of the plurality of electrode pillars comprises a plurality of electrode portions, wherein each of the plurality of electrode portions is disposed within a corresponding one of the plurality of through holes; wherein the respective electrode layer and a respective electrode portion of the plurality of electrode portions form a first electrode and a second electrode of a capacitor and wherein at least one memory material portion is disposed in each of the plurality of through holes in a gap between the respective electrode layer and the respective electrode portion.
Integrated components which have both horizontally-oriented transistors and vertically-oriented transistors
Some embodiments include an integrated assembly. The integrated assembly has a first transistor with a horizontally-extending channel region between a first source/drain region and a second source/drain region; has a second transistor with a vertically-extending channel region between a third source/drain region and a fourth source/drain region; and has a capacitor between the first and second transistors. The capacitor has a first electrode, a second electrode, and an insulative material between the first and second electrodes. The first electrode is electrically connected with the first source/drain region, and the second electrode is electrically connected with the third source/drain region. A digit line is electrically connected with the second source/drain region. A conductive structure is electrically connected with the fourth source/drain region.