Embodiments herein describe techniques for a semiconductor device including a RRAM memory cell. The RRAM memory cell includes a FinFET transistor and a RRAM storage cell. The FinFET transistor includes a fin structure on a substrate, where the fin structure includes a channel region, a source region, and a drain region. An epitaxial layer is around the source region or the drain region. A RRAM storage stack is wrapped around a surface of the epitaxial layer. The RRAM storage stack includes a resistive switching material layer in contact and wrapped around the surface of the epitaxial layer, and a contact electrode in contact and wrapped around a surface of the resistive switching material layer. The epitaxial layer, the resistive switching material layer, and the contact electrode form a RRAM storage cell. Other embodiments may be described and/or claimed.

An RRAM cell stack is formed over an opening in a dielectric layer. The dielectric layer is sufficiently thick and the opening is sufficiently deep that an RRAM cell can be formed by a planarization process. The resulting RRAM cells may have a U-shaped profile. The RRAM cell area includes contributions from a bottom portion in which the RRAM cell layers are stacked parallel to the substrate and a side portion in which RRAM cell layers are stacked roughly perpendicular to the substrate. The combined side and bottom portions of the curved RRAM cell provide an increased area in comparison to a planar cell stack. The increased area lowers forming and set voltages for the RRAM cell.

A first phase change material layer vertically aligned above a bottom electrode, a dielectric layer vertically aligned above the first phase change material layer, a second phase change material layer vertically aligned above the dielectric layer, an inner electrode physically and electrically connected to the first phase change material layer and the second phase change material layer, the inner electrode surrounded by the dielectric layer, a top electrode vertically aligned above the second phase change material layer. A first phase change material layer vertically aligned above a bottom electrode, a filament layer vertically aligned above the first phase change material layer, a second phase change material layer vertically aligned above the filament layer, an inner break in the filament layer connecting the first phase change material layer and the second phase change material layer, a top electrode vertically aligned above the second phase change material layer.

A variable resistance non-volatile memory includes a semiconductor substrate, a first electrode line extending in a first direction away from the semiconductor substrate, a second electrode line extending in the first direction parallel to the first electrode line, an insulating film between the first and second electrode lines, a variable resistance film formed on the first electrode line, a low electrical resistance layer formed on the variable resistance film and having a lower electrical resistance than the variable resistance film, a semiconductor film in contact with the low electrical resistance layer and the insulating film, and formed on opposite surfaces of the second electrode line, a gate insulator film extending in the first direction and in contact with the semiconductor film, and a voltage application electrode that extends in a second direction that crosses the first direction, and is in contact with the gate insulator film.

According to one embodiment, a memory device includes a memory element provided above a substrate in a first direction perpendicular to a first surface of the substrate; a switching element provided between the substrate and the memory element; and a first layer provided between the memory element and the switching element. The first layer includes at least one selected from the group including boron, carbon, silicon, magnesium, aluminum, scandium, titanium, vanadium, gallium, germanium, yttrium, zirconium, niobium, molybdenum, palladium, silver, hafnium, tantalum, tungsten, iridium, and platinum. The first layer includes an air gap.

A memory device is provided. The memory device includes a memory stack on a first dielectric layer, and a sidewall spacer on the memory stack. The memory device further includes a conductive cap on the sidewall spacer and the memory stack and an upper metal line on the conductive cap and the sidewall spacer, wherein the upper metal line wraps around the conductive cap, sidewall spacer, and memory stack.

A semiconductor device may include: a plurality of first conductive lines; a plurality of second conductive lines disposed over the first conductive lines to be spaced apart from the first conductive line, a variable resistance layer disposed above the first conductive line and below the second conductive line; at least one of a first interlayer dielectric layer or a second interlayer dielectric layer; at least one of a first contact or a second contact, wherein the first selector layer is disposed in a portion of the first interlayer dielectric layer below the first contact and the second selector layer is disposed in a portion of the second dielectric layer below the second contact, wherein the first selector layer includes a dielectric material of the first interlayer dielectric layer and a dopant, and the second selector layer includes a dielectric material of the second interlayer dielectric layer and a dopant.

A variable resistance memory device includes a substrate, a cell array region including a plurality of memory cells on the substrate, a wiring region which includes an inter-wiring insulating film stacked on the cell array region, and an upper wiring structure in the inter-wiring insulating film and a protective film which covers an upper surface of the cell array region, between the cell array region and the wiring region, wherein each of the memory cells includes a switching pattern and a variable resistance pattern, the cell array region further includes first conductive lines extending in a first direction, and a second conductive lines extending in a second direction intersecting the first direction, and the plurality of memory cells are disposed at an intersections of the first conductive lines and the second conductive lines.

A variable resistance memory device includes a substrate, a cell array region including a plurality of memory cells on the substrate, a wiring region which includes an inter-wiring insulating film stacked on the cell array region, and an upper wiring structure in the inter-wiring insulating film and a protective film which covers an upper surface of the cell array region, between the cell array region and the wiring region, wherein each of the memory cells includes a switching pattern and a variable resistance pattern, the cell array region further includes first conductive lines extending in a first direction, and a second conductive lines extending in a second direction intersecting the first direction, and the plurality of memory cells are disposed at an intersections of the first conductive lines and the second conductive lines.

The present invention disclosures a phase change memory unit, wherein comprising from bottom to top: a bottom electrode, a heating electrode, a phase change unit and a top electrode, the phase change unit is a longitudinally arranged column, which comprises: a cylindrical selector layer, a circular barrier layer and a circular phase change material layer form inside to outside; wherein, the bottom electrode, the heating electrode and the circular phase change material layer are sequentially connected, and the selector layer is connected to the top electrode. The present invention using trench sidewall deposition or via filling, forming the cylindrical phase change unit which is a circular nested structure, which can improve reliability of a device, greatly reduce volume of a phase change operation area and heat energy required, thus heating efficiency is improved obviously, the power consumption of the device is reduced, and high-density storage is realized.