A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.

A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

A MEMS piezoelectric device includes a monolithic semiconductor body having first and second main surfaces extending parallel to a horizontal plane formed by first and second horizontal axes. A housing cavity is arranged within the monolithic semiconductor body. A membrane is suspended above the housing cavity at the first main surface. A piezoelectric material layer is arranged above a first surface of the membrane with a proof mass coupled to a second surface, opposite to the first surface, along the vertical axis. An electrode arrangement is provided in contact with the piezoelectric material layer. The proof mass causes deformation of the piezoelectric material layer in response to environmental mechanical vibrations. The proof mass is coupled to the membrane by a connection element arranged, in a central position, between the membrane and the proof mass in the direction of the vertical axis.

The present invention relates to an acoustic wave transmission device for moving a fluid or fine particles inside the fluid to a desired position using acoustic waves, and more particularly, to an acoustic wave transmission device including an acoustic wave transmission medium that minimizes acoustic wave interference due to the acoustic wave transmission medium by reducing reflection and refraction that may be generated when acoustic waves pass through the acoustic wave transmission medium in which a fluid is accommodated, and a manufacturing method of the acoustic wave transmission medium.

The piezoelectric device includes a first electrode, a second electrode, piezoelectric elongate nano-objects in contact with the first electrode, and extending between the first electrode and the second electrode, a first layer of an electrically-insulating first material, the first layer surrounding a first longitudinal portion of each of the piezoelectric elongate nano-objects, a second layer of an electrically-insulating second material, the second layer surrounding a second longitudinal portion of each of the piezoelectric elongate nano-objects. The first layer is arranged between the first electrode and the second layer. The thickness of the first layer is strictly smaller than the thickness of the second layer. The first material has a Young's modulus strictly higher than the Young's modulus of the second material.

Provided is a piezoelectric film capable of sufficiently exhibiting both piezoelectric properties and transparency. A piezoelectric film including, by stacking: a transparent piezoelectric base film made of a fluororesin; and

a transparent coating layer having a thickness of 0.20 to 2.5 μm, wherein the transparent coating layer forms an interface with the transparent piezoelectric base film over an entire region overlapping the transparent piezoelectric base film.

Provided is a piezoelectric film capable of sufficiently exhibiting both piezoelectric properties and transparency. A piezoelectric film including, by stacking: a transparent piezoelectric base film made of a fluororesin; and

a transparent coating layer having a thickness of 0.20 to 2.5 μm, wherein the transparent coating layer forms an interface with the transparent piezoelectric base film over an entire region overlapping the transparent piezoelectric base film.

A piezoelectric device includes a base portion and an upper layer on an upper side of and supported by the base portion. The upper layer includes a membrane portion that does not overlap with the base portion in plan view. The membrane portion includes at least one piezoelectric layer sandwiched by electrode layers from a top and a bottom thereof. An intermediate layer is between a lower electrode and the base portion. The intermediate layer includes one or more individual layers, and an individual layer exposed as a lower surface of the membrane portion among the one or more individual layers includes a bent portion, which extends from the lower surface of the membrane portion to a lateral wall, on a boundary between a portion defining and functioning as the lower surface of the membrane portion and a portion overlapping with the base portion.

The invention provides a planarization method, which can make the local flatness of the product to be processed more uniform. The product has a cavity filled with oxide and includes a first electrode layer, a piezoelectric layer and a second electrode layer superposed on the cavity. The first electrode layer covers the cavity and includes a first inclined face around the first electrode layer, and the piezoelectric layer covers the first electrode layer and is arranged on the first electrode layer. The planarization method includes: depositing a passivation layer on the second electrode layer and etching the passivation layer completely until the thickness of the passivation layer is reduced to the required thickness.

A piezo actuator for carrying out an actuating movement is disclosed, with a piezo bending transducer made of a carrier layer which is at least partially covered on one or two sides with a piezo lamella, with a movable end and with a housing, with a reference stop connected to the housing for determining a reference position for the actuating movement, with a first bearing region which comprises regions of the piezo actuator and the housing and which allows for twists ϕ1 of the piezo bending transducer, with a second bearing region having a surface on the side of the bending transducer and a surface on the side of the housing, and an intermediate layer between the surfaces, which connects them and which can be liquefied, and with a pressure element for generating a bias torque on the piezo bending transducer around the first bearing region against the reference stop.