A product includes an array of cold spray-formed structures. Each of the structures is characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material. A product includes a cold spray-formed structure characterized by having a defined feature size in at least one dimension of less than 100 microns as measured in a plane of deposition of the structure, at least 90% of a theoretical density of a raw material from which the structure is formed, and essentially the same functional properties as the raw material.

A transducer includes a supporting body and a suspended structure mechanically coupled to the supporting body. The suspended structure has a first and a second surface opposite to one another along an axis, and is configured to oscillate in an oscillation direction having at least one component parallel to the axis. A first piezoelectric transducer is disposed on the first surface of the suspended structure, and a second piezoelectric transducer is disposed on the second surface of the suspended structure.

A piezoelectric sensor device comprising a piezoelectric element and at least one metallic body, with an insulating body arranged between each metallic body and the piezoelectric element. The insulating body substantially consists of a crystalline material or ceramics. At least one surface of the insulating body in contact with the metallic body is covered by a metallic layer in order to suppress noise signals due to a stick-slip effect and differing thermal expansion coefficients

A piezoelectric sensor device comprising a piezoelectric element and at least one metallic body, with an insulating body arranged between each metallic body and the piezoelectric element. The insulating body substantially consists of a crystalline material or ceramics. At least one surface of the insulating body in contact with the metallic body is covered by a metallic layer in order to suppress noise signals due to a stick-slip effect and differing thermal expansion coefficients

A piezoelectric micromachined ultrasonic transducer (PMUT) device includes a substrate having an opening therethrough and a membrane attached to the substrate over the opening. An actuating structure layer on a surface of the membrane includes a piezoelectric layer sandwiched between the membrane and an upper electrode layer. The actuating structure layer is patterned to selectively remove portions of the actuating structure from portions of the membrane to form in a central portion proximate a center of the open cavity and three or more rib portions projecting radially outward from the central portion.

An etching method for forming a vertical structure is provided. The etching method may include: positioning a mask on a substrate, wherein the mask includes an opening pattern and a compensation pattern, and the compensation pattern is disposed at a corner of two adjacent sides of the opening pattern and includes a concave compensation pattern that is indented from one of the two adjacent sides; and forming the vertical structure on the substrate through the opening pattern of the mask by a dry etching process.

In some embodiments, in response to the user selecting a first node in the tree to be pinned, the system displays a first detail panel for the first node, wherein the first detail panel displays state information for the first node, wherein the state information is frozen at the time of pinning. Moreover, in response to the user selecting a second node in the tree to be pinned, the system displays a second detail panel for the second node, wherein the second detail panel displays state information for the second node, wherein the state information is frozen at the time of pinning. Note that the first detail panel is displayed concurrently with the second detail panel to facilitate comparing state information between the first and second nodes.

A method of forming an ultrasonic transducer comprises coupling a front polymer layer of uniform thickness to a piezoelectric element. A front metal layer is coupled to the polymer layer on a side of the front polymer layer opposite the piezoelectric element for transmitting acoustic energy between the front polymer layer and a propagation medium. The front polymer layer and the front metal layer define a front acoustic impedance converter, wherein the front polymer layer completely isolates the piezoelectric element from the front metal layer.

A piezoelectric micromechanical ultrasonic transducer (PMUT) includes a multilayer stack disposed on a substrate. The multilayer stack may include an anchor structure disposed over the substrate, a piezoelectric layer stack disposed over the anchor structure, and a mechanical layer disposed proximate to the piezoelectric layer stack. The piezoelectric layer stack may be disposed over a cavity. The mechanical layer may seal the cavity and, together with the piezoelectric layer stack, is supported by the anchor structure and forms a membrane over the cavity, the membrane being configured to undergo one or both of flexural motion and vibration when the PMUT receives or transmits ultrasonic signals.

A vibration device, including a housing having accommodating space, a vibrator, a stator and an elastic member for making the vibrator suspended in the accommodating space, the vibrator, the stator and the elastic member are accommodated in the housing, one of the vibrator and the stator includes a magnetic circuit unit while the other one includes a coil, the housing includes a pair of first side walls symmetrically arranged in a long axis direction of the housing and a pair of second side walls symmetrically arranged in a short axis direction, the elastic member includes a sheet-like spring perpendicular to vibrating direction of the vibrator, the spring includes a first fixing portion fixedly connected with the housing, a second fixing portion fixedly connected with the vibrator, and an N-shaped connecting portion connects the first fixing portion with the second fixing portion and extends along the short axis direction.