A method of manufacture for an acoustic resonator device. The method includes forming a nucleation layer characterized by nucleation growth parameters overlying a substrate and forming a strained piezoelectric layer overlying the nucleation layer. The strained piezoelectric layer is characterized by a strain condition and piezoelectric layer parameters. The process of forming the strained piezoelectric layer can include an epitaxial growth process configured by nucleation growth parameters and piezoelectric layer parameters to modulate the strain condition in the strained piezoelectric layer. By modulating the strain condition, the piezoelectric properties of the resulting piezoelectric layer can be adjusted and improved for specific applications.

In some embodiments, in response to the user selecting a first node in the tree to be pinned, the system displays a first detail panel for the first node, wherein the first detail panel displays state information for the first node, wherein the state information is frozen at the time of pinning. Moreover, in response to the user selecting a second node in the tree to be pinned, the system displays a second detail panel for the second node, wherein the second detail panel displays state information for the second node, wherein the state information is frozen at the time of pinning. Note that the first detail panel is displayed concurrently with the second detail panel to facilitate comparing state information between the first and second nodes.

An object of the present invention is to provide a piezoelectric film capable of preventing a short circuit caused by electrodes protruding from a piezoelectric layer in the piezoelectric film having electrode layers and protective layers on both surfaces of the piezoelectric layer, and a method of producing the piezoelectric film. The object can be achieved by the piezoelectric film that includes a laminated film including a piezoelectric layer, an electrode layer provided on each of both surfaces of the piezoelectric layer, and a protective layer covering the electrode layer, and an insulating end surface coating layer which covers at least a part of an end surface of the laminated film.

A vibrator includes: a base portion; a vibrating arm including an arm portion which extends from the base portion, and a weight portion which is located on a tip end side of the arm portion and which has a first main surface and a second main surface that are in a front-back relationship; and a weight film disposed at the first main surface of the weight portion. The first main surface includes a first planar surface, a second planar surface which is located closer to the second main surface than is the first planar surface and which is parallel to the first planar surface, and an inclined surface which couples the first planar surface and the second planar surface and which forms an angle of 100° or less with the first planar surface. A method for manufacturing a vibrator includes: a preparation step of preparing the above-described vibrator; and a removing step of removing a part of the weight film by emitting an energy ray to the weight film from a normal direction of the first planar surface.

A piezoelectric assembly includes at least two piezoelectric components, a positive circuit board, and a negative circuit board. Each piezoelectric component includes a main body portion and a connecting portion. Respective first surfaces of the main body portion and the connecting portion are a positive electrode, and respective second surfaces of the main body portion and the connecting portion are a negative electrode. Main body portions of the at least two piezoelectric components are stacked, connecting portions of the at least two piezoelectric components are distributed in a staggered manner along a set edge. The positive circuit board is coupled to the first surface of the connecting portion, and the negative circuit board is coupled to the second surface of the connecting portion.

A microelectromechanical membrane transducer includes: a supporting structure; a cavity formed in the supporting structure; a membrane coupled to the supporting structure so as to cover the cavity on one side; a cantilever damper, which is fixed to the supporting structure around the perimeter of the membrane and extends towards the inside of the membrane at a distance from the membrane; and a damper piezoelectric actuator set on the cantilever damper and configured so as to bend the cantilever damper towards the membrane in response to an electrical actuation signal.

This method for manufacturing a piezoelectric film includes: a coating step of obtaining a coated film by coating a coating solution on a substrate, wherein the coating solution includes at least lead, zirconium, and titanium, a content ratio of the zirconium and the titanium is in a range of 54:46 to 40:60 in terms of molar ratio, and a perovskite crystal phase is generated by heating the coating solution at a temperature equal to or higher than a crystallization initiation temperature; a drying step of obtaining a dried film by drying the coated film; a first calcining step of obtaining a first calcined film; a second calcining step of obtaining a second calcined film; and a main firing step of obtaining a piezoelectric film by heating the second calcined film at a main firing temperature.

A technology of fabricating a piezoelectric composite applicable to an ultrasonic transducer is disclosed. According to one aspect of the present disclosure, a support member formed with a plurality of through holes is located on one surface of an electrode plate, and lower surfaces of piezoelectric pillars having shapes respectively corresponding to the through holes are adhered onto the one surface of the electrode plate to form the piezoelectric pillars. Further, according to an additional aspect, the plurality of piezoelectric pillars having shapes corresponding to the through holes of the support member are formed by sintering a piezoelectric pellet molded in a pillar shape.

An etching method for forming a vertical structure is provided. The etching method may include: positioning a mask on a substrate, wherein the mask includes an opening pattern and a compensation pattern, and the compensation pattern is disposed at a corner of two adjacent sides of the opening pattern and includes a concave compensation pattern that is indented from one of the two adjacent sides; and forming the vertical structure on the substrate through the opening pattern of the mask by a dry etching process.

In some embodiments, in response to the user selecting a first node in the tree to be pinned, the system displays a first detail panel for the first node, wherein the first detail panel displays state information for the first node, wherein the state information is frozen at the time of pinning. Moreover, in response to the user selecting a second node in the tree to be pinned, the system displays a second detail panel for the second node, wherein the second detail panel displays state information for the second node, wherein the state information is frozen at the time of pinning. Note that the first detail panel is displayed concurrently with the second detail panel to facilitate comparing state information between the first and second nodes.