A micro-electro-mechanical systems (MEMS) sensor includes a substrate, a diaphragm portion and a piezoelectric film. The diaphragm portion is located at the substrate. The piezoelectric film is located on the diaphragm portion. The piezoelectric film is made of scandium aluminum nitride. A carbon concentration of the piezoelectric film is 2.5 atomic percent or less while an oxygen concentration of the piezoelectric film is 0.35 atomic percent or less.

Aspects of the present disclosure relate to a piezoelectric device having at least one piezoelectric element, which has a support plane oriented to a force introduction element, wherein in the event of a thermal loading of the piezoelectric device in the support plane, expansion differences between the piezoelectric element and the force introduction element occur. To compensate for shear loadings, at least one transition element is arranged between the piezoelectric element and the force introduction element, the E-module of which is smaller than the E-module of the piezoelectric element in the support plane.

A piezoelectric power generation system includes a housing defining an opening therethrough and a support structure disposed within the housing, the support structure comprising a plurality of portions. The piezoelectric power generation system also includes one or more piezoelectric elements disposed between two of the plurality of portions of the support structure within the housing. Movement or vibration in the support structure compresses the one or more piezoelectric elements, wherein the one or more piezoelectric elements generate electric energy when compressed. The piezoelectric power generation system further includes one or more exciters coupled to the support structure, wherein the exciters move or vibrate when acted on by a flow of fluid, wherein the motion of vibration of the one or more exciters is translated to the support structure and ultimately to the one or more piezoelectric elements.

An object is to provide a multifunctional multi-piezo material having both high piezoelectric properties and high mechanoluminescence properties. It is a multi functional multi-piezo material represented by the chemical formula Li.sub.(1−X)(1+a)Na.sub.XNbO.sub.3:M.sub.Y (where M is at least one type of metal ion selected from transition metal ions), wherein the value of X is in the range from 0.10 or more to 0.98 or less, the value of Y is in the range from 0.0001 or more to 0.2 or less; and α is in the range from 0 or more. Such a multifunctional multi-piezo material has both high piezoelectric properties and high mechanoluminescence properties.

A high voltage pulse generating system has a latching element coupled in between a ferroelectric generator (FEG) and a load, such as a vector inversion generator. Such a latching element prevents the return of current to the FEG when the FEG undergoes mechanical destruction after depolarization, thereby increasing the useful amount of energy extracted from the FEG. In some embodiments, multiple FEGs are configured with multiple latching elements to deliver multiple high-voltage, high-current pulses.

A method for preparing a static/dynamic three-dimensional (3D) microcrack propagation sensor, a sensor and equipment, belongs to the field of sensor technology. The preparation method includes: preparing a piezoresistive/piezoelectric sensing functional component dispersed material, and then coating the dispersed material to the surface of a fiber cloth substrate to obtain a piezoresistive/piezoelectric sensing fiber cloth; performing a pre-stretching treatment on the piezoresistive/piezoelectric sensing fiber cloth to obtain a piezoresistive/piezoelectric sensing 3D microcrack fiber cloth; ablating the piezoresistive/piezoelectric sensing 3D microcrack fiber cloth by microwave to remove the fiber cloth substrate, then obtaining a piezoresistive/piezoelectric sensing 3D microcrack functional skeleton; coating a conductive layer on both surfaces of the piezoresistive/piezoelectric sensing 3D microcrack functional skeleton, thereby forming an electrode; polarizing the piezoresistive/piezoelectric sensing 3D microcrack functional skeleton with the formed electrodes on the surfaces; and, encapsulating the piezoresistive/piezoelectric sensing 3D microcrack functional skeleton to obtain a static/dynamic 3D microcrack propagation sensor.

A piezoelectric device includes a body provided with a first region and a second region lined along a first direction. The first region deformably extends/contracts along the first direction. The second region deformably curves in such a manner that one or the other side in a second direction intersecting the first direction curves outward.

A combined MicroElectroMechanical structure (MEMS) includes a first piezoelectric membrane having one or more first electrodes, the first piezoelectric membrane being affixed between a first holder and a second holder; and a second piezoelectric membrane having an inertial mass and one or more second electrodes, the second piezoelectric membrane being affixed between the second holder and a third holder.

A multiple layer composition and method for deposition of a solar energy harvesting strip onto a driving surface that will allow electric cars to charge by an inductive coupling is provided. The multiple layer composition includes at least one magnetic material for generating a magnetic field, wherein at least one of the multiple layers comprises the magnetic material. Further, the a multiple layer composition includes at least one solar energy harvesting material for converting at least one of thermal and photonic energy into electrical energy, wherein at least one of the multiple layers comprises the at least one solar energy harvesting material and wherein the at least one solar energy harvesting material is located within a magnetic field generated by the at least one magnetic material. One of the layers may also include a thermal energy harvesting material for converting thermal energy into electrical energy.

A piezoelectric coaxial sensor includes: a center conductor including a conductive wire; a polymer piezoelectric layer covering an outer peripheral surface of the center conductor; a first outer conductor surrounding an outer peripheral surface of the polymer piezoelectric layer; a first jacket layer covering an outer peripheral surface of the first outer conductor; and a second outer conductor surrounding an outer peripheral surface of the first jacket layer. A voltage is generated between the center conductor and the first outer conductor based on induced charges generated in the polymer piezoelectric layer.