Provided are an energy harvester using a mass, and a mobile device including the energy harvester. The energy harvester includes: a mass; first and second substrates spaced apart from each other, wherein one of the first and second substrates is connected to the mass; first and second electrodes provided on the first and second substrates; and an energy generator provided between the first and second electrodes, wherein the energy generator generates electric energy upon a relative movement between the first substrate and the second substrate caused by a movement of the mass.

A sensor includes a substrate having a curved surface, a piezoelectric element, and an adhesive disposed between the piezoelectric element and the curved surface along a vertical direction. The adhesive attaches the piezoelectric element to the substrate. The adhesive has an exterior bond surface that has a tapered shape along the vertical direction from the piezoelectric element to the curved surface.

A wearable article, a system, and methods include a structural material configured to enable the wearable article to the worn on a body, a piezoelectric generator, positioned with respect to the structural material in a configuration to be flexed to output a voltage, a data translator, coupled to the piezoelectric generator, configured to output electronic data based on the voltage, and an electronic data storage, coupled to the data translator, configured to store the electronic data from the data translator.

Hybrid energy harvesting devices that harvest vibrational energy over a broad frequency spectrum using several different energy harvesting mechanisms that are operable over different frequency ranges. In one embodiment, a device uses an inductive current generator to convert vibrational energy at lower frequencies to electrical energy, and also uses one or more piezoelectric charge generators to convert vibrational energy at higher frequencies to electrical energy. The electrical energy produced by these different mechanisms is provided to a controller which processes the input energy and generates an output which is applied to an energy store such as a battery. The energy stored in the battery can then be drawn by a wireless sensor or other device. The energy harvesting device may have the same form factor as a conventional battery to allow installation in battery-powered equipment without modification.

A compliant electrostatic transfer head and method of forming a compliant electrostatic transfer head are described. In an embodiment, a compliant electrostatic transfer head includes a base substrate, a cavity template layer on the base substrate, a first confinement layer between the base substrate and the cavity template layer, and a patterned device layer on the cavity template layer. The patterned device layer includes an electrode that is deflectable toward a cavity in the cavity template layer. In an embodiment, a second confinement layer is between the cavity template layer and the patterned device layer.

An apparatus for converting wave energy into electrical energy including a float element excited at a defined frequency by the waves. A power extraction system collaborates with the float element to convert mechanical energy into electrical energy, the mechanical energy coming from the movement of the float element excited by the waves. The power extraction system takes the form of a frequency amplifier made up of at least two piezoelectric motors each composed of at least one piezoelectric post excited at a frequency higher than that of the float, and a member for activating said piezoelectric motors acting on the piezoelectric motors so as to squash said piezoelectric posts. Each piezoelectric motor has a mechanical amplification device connected to rollers and includes a) jaws able to apply mechanical stress to the posts, b) a lever acting on the jaws with a proximal end connected to said jaws and a distal end connected to a roller in contact with the member so as to activate said piezoelectric motor.

A method and apparatus for waking a battery pack from a dormant mode via shaking. The battery pack has a piezo electric device coupled to a semiconductor control circuit providing a power path between a positive terminal of a battery cell and a boot input of an ASIC charge/discharge controller powered by the battery cell. Shaking of the piezo electric device energizes the semiconductor control circuit, which engages the power path to power the initial booting of the ASIC charge/discharge controller.

An article of apparel, a system, and methods include a structural material configured to enable the article of footwear to the worn on a body. A wireless transmission circuit is included and a piezoelectric generator is positioned with respect to the structural material in a configuration to be flexed to induce a voltage signal output. A voltage sensor is configured to sense the voltage profile and output a sensor signal indicative of the voltage profile. An electronic data storage, coupled to the voltage sensor, is configured to store voltage profile information based on the sensor data. A comparator, coupled to the electronic data storage, is configured to identify a change in the voltage profile information over time. The wireless transmission circuit is configured to transmit data indicative of a physical status of the article of footwear based on the change in the voltage profile information over time.

There are provided an excitation electrode, a quartz crystal vibrator element, a quartz crystal vibrator, a sensor, an oscillator, and a method of manufacturing a quartz crystal vibrator element which are not affected by heat in a process or a use environment to surely prevent a frequency fluctuation from occurring, reduction in size of which can be achieved, and which are low in cost and excellent in productivity. The excitation electrodes are disposed on an outer surface of a quartz crystal plate, apply an electrical field for exciting the quartz crystal plate to the quartz crystal plate, have a single layer structure formed of a two-dimensional layered substance, and are used when arranged as a pair so as to be opposed to each other via the quartz crystal plate.

A method of fabricating a semiconductor substrate includes the following steps. A first wafer is provided and a first surface of the first wafer is etched to form a plurality of cavities. A second wafer is formed on the first surface, where forming the second wafer includes the following steps: providing a core substrate; forming a first insulating layer on the core substrate; and depositing a polysilicon layer on the first insulating layer and the core substrate. In addition, the polysilicon layer is bonded with the first wafer to cover the cavities, where the polysilicon layer is disposed between the first insulating layer and the first wafer. In addition, a semiconductor substrate and MEMS devices using the semiconductor substrate are also provided.