A method of manufacturing bistable strips having different curvatures, each strip including a plurality of portion of layers of materials, wherein at least one specific layer portion is deposited by a plasma spraying method in conditions different for each of the strips.

A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (K.sub.1-xNa.sub.x).sub.mNbO.sub.3-nCaTiO.sub.3, wherein m, n, and x in the general formula are within the ranges of 0.87?m?0.97, 0?n?0.065, and 0?x?1.

A method of manufacturing a piezoelectric element includes: forming a patterned mask layer over a substrate, in which the patterned mask layer has an opening exposing a portion of the substrate; forming a piezoelectric element in the opening; and removing the patterned mask layer to obtain the piezoelectric element, in which the piezoelectric element has a central portion and a peripheral portion adjacent to the central portion, and the peripheral portion has a maximum height greater than a height of the central portion.

A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a first free surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.

An elastic wave device includes a piezoelectric material layer, an IDT electrode on the piezoelectric material layer, and a dielectric film covering the IDT electrode. The IDT electrode includes a first electrode layer and a second electrode layer laminated on the first electrode layer. Each of wavelength normalized film thicknesses of the first and second electrode layers is equal to or greater than about 1.25%, and is normalized using a wave length defined by the electrode finger pitch of the IDT electrode. The second electrode layer has a density lower than that of the first electrode layer. The side of the second electrode layer is inclined with respect to the thickness direction of the IDT electrode.

An audio speaker system includes: an amplifier, where a positive input terminal of the amplifier is configured to be coupled to a first reference voltage node; and a piezo diaphragm including: a metal plate; a first piezo film attached to the metal plate, where the first piezo film is configured to function as a speaker during operation of the audio speaker system; and a second piezo film attached to the metal plate and spaced apart from the first piezo film, where the second piezo film is configured to function as a microphone during operation of the audio speaker system, where an output terminal of the amplifier is coupled to the first piezo film, and where a negative input terminal of the amplifier is coupled to the second piezo film.

A bulk acoustic (BAW) resonator having a multilayer base and method of fabricating the bulk acoustic resonator is disclosed. A BAW resonator comprises a substrate having a cavity and including a frame around the cavity, a multilayer base adjacent the cavity and supported by the frame. The multilayer base includes a first layer of crystalline material having a first lattice constant and a second layer of crystalline material having a second lattice constant that is distinct from the first lattice constant. The BAW resonator further includes a stack over the multilayer base. The stack includes a first electrode formed on the multilayer base, a piezoelectric layer having a first side coupled to the first electrode and a second side opposite to the first side of the piezoelectric layer, and a second electrode coupled to the second side of the piezoelectric layer.

A package that includes an integrated device, an integrated passive device and a void. The integrated device is configured as a filter. The integrated device includes a substrate comprising a piezoelectric material, and at least one metal layer coupled to a first surface of the first substrate. The integrated passive device is coupled to the integrated device. The integrated passive device is configured as a cap for the integrated device. The void is located between the integrated device and the integrated passive device.

Provided is a transparent conductive piezoelectric laminate film that achieves high transparency and low resistance. The present invention relates to a transparent conductive piezoelectric laminate film, wherein a piezoelectric film, a first conductor layer, a metal layer, and a second conductor layer are layered in this order, and the metal layer contains silver or a silver alloy.

There are disclosed acoustic resonators and method of fabricating acoustic resonators. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate except for portions of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A conductor pattern on the front surface includes an interdigital transducer (IDT) with interleaved fingers of the IDT disposed on the diaphragm. A periodic array of holes is provided in the diaphragm.