Circuitry for estimating a displacement of a piezoelectric transducer in response to a drive signal applied to the piezoelectric transducer, the circuitry comprising: monitoring circuitry configured to be coupled to the piezoelectric transducer and to output a sense signal indicative of an electrical signal associated with the piezoelectric transducer as a result of the drive signal; wherein the circuitry is configured to generate a difference signal based on the drive signal and the sense signal; and wherein the circuitry further comprises processing circuitry configured to apply at least one transfer function to the difference signal to generate a signal indicative of the displacement of the piezoelectric transducer.

A control device actuates actuator unit to set a position of an optical element of a lithography system. The control device includes an amplifier unit for providing a control signal for the actuator unit via a voltage signal and a PWM signal. The PWM signal has a duty factor and a clock frequency. The control device also includes a modulator unit designed to provide the PWM signal having the duty factor and a defined clock frequency from a plurality of defined clock frequencies. A defined clock frequency of the plurality of defined clock frequencies is an integer multiple of a basic clock frequency. The basic clock frequency is in the range of 10 kHz to 1 MHz.

A pressing sensor is provided that includes a first sensor element that outputs a voltage corresponding to an amount of displacement in shape of a receiving unit that receives a press operation; a press operation determining unit that determines whether the receiving unit is in a state of receiving a press operation; and a setting unit that, after elapse of a first prescribed time from a point of time at which the press operation determining unit determines that the receiving unit has received a press operation, sets an absolute value of a threshold that is smaller than an absolute value of the threshold before elapse of the first prescribed time, the absolute value of the threshold representing a difference from a ground voltage value for determining whether the receiving unit has ended reception of the press operation.

An active cooling system and method for using the active cooling system are described. The active cooling system includes a cooling element having a first side and a second side. The first side of the cooling element is distal to a heat-generating structure and in communication with a fluid. The second side of the cooling element is proximal to the heat-generating structure. The cooling element is configured to direct the fluid using a vibrational motion from the first side of the cooling element to the second side such that the fluid moves in a direction that is incident on a surface of the heat-generating structure at a substantially perpendicular angle and then is deflected to move along the surface of the heat-generating structure to extract heat from the heat-generating structure.

A composite multiplexer includes a first multiplexer, a second multiplexer, and a second LC circuit. The first multiplexer includes first band pass filter circuits and first LC circuits connected to end portions of the first band pass filter circuits that are opposite to a first terminal, respectively. The second multiplexer includes second band pass filter circuits. The second LC circuit is connected between the first terminal and the second multiplexer.

Airborne pollutants from natural and man-made sources are an increasing where their aerodynamic properties determine how far into the human respiratory system they penetrate. International and national guidelines or regulatory limits specify limits for particulate matter (PM) at different particulate dimensions leading to a requirement for low cost compact PM detectors/sensors. A flow of known and desired size particles are separated and guided by a virtual impactor towards a microelectromechanical systems (MEMS) sensor, e.g. MEMS resonator, yielding the required PM detectors/sensors. Further, in conjunction with the virtual impactor and MEMS sensor additional elements are provided to exploit thermophoresis or di-electrophoresis such that the particles within the sensing area of the MEMS sensor can be removed. Accordingly, the MEMS sensor based particle detector/sensor can be periodically reset allowing for extended operational life of the MEMS sensor based particle detector/sensor and/or enhanced performance over extended periods.

An ultrasonic probe includes: a piezoelectric element; and a backing material including a matrix resin and thermally conductive particles, arranged on one direction side with respect to the piezoelectric element, wherein a ratio of thermal conductivity of the backing material in a thickness direction to the thermal conductivity of the backing material in a horizontal direction is 3 or more.

A piezoelectric element includes a piezoelectric element main body as a laminated body of a first electrode layer, a piezoelectric layer disposed on the first electrode layer, and a second electrode layer disposed on the piezoelectric layer, and a metal layer disposed on the second electrode layer via an insulating layer, the piezoelectric layer extends from an inner side of at least a part of an overlapping part of an outer peripheral edge of the second electrode layer overlapping an outer peripheral edge of the piezoelectric element main body to an outer side, and the metal layer and the insulating layer extend from an inner side of at least a part of the overlapping part to an outer side to overlap the piezoelectric layer on an outer side of an outer peripheral edge of the second electrode layer.

A micro blower includes a base metal sheet, a flowing channel layer, a sandwich metal sheet, a capping layer and two first piezoelectric vibrators. The flowing channel layer is connected to the top of the base metal sheet and includes a first chamber, a second chamber, an inlet channel, a linking channel and an outlet channel. The inlet channel links to the first chamber and includes an inlet channel inlet size and an inlet channel outlet size, and the inlet channel inlet size is smaller than the inlet channel outlet size. The linking channel links to the first chamber and the second chamber and includes a linking channel inlet size and a linking channel outlet size, and the linking channel inlet size is smaller than the linking channel outlet size.

A method is provided. The method comprises obtaining, by a processing system and using a piezoelectric device, piezoelectric signals associated with user input on a sensing region of an input device; obtaining, by the processing system and using a corrective device, corrective signals associated with the user input on the sensing region of the input device; determining, by the processing system and based on the piezoelectric signals and the corrective signals, one or more events to be performed in response to the user input; and performing, by the processing system, the one or more events.