A semiconductor memory device according to an embodiment comprises: a semiconductor substrate extending in a first direction and a second direction, the first and second directions intersecting each other; a first wiring line disposed above the semiconductor substrate and extending in the first direction; a second wiring line disposed above the semiconductor substrate and extending in a third direction, the third direction intersecting the first direction and the second direction; a variable resistance film disposed at an intersection of the first wiring line and the second wiring line; a first insulating film disposed aligned with the second wiring line in the first direction; a first film disposed between the first wiring line and the first insulating film; and a second film disposed between the first insulating film and the first film and configured from a material different from that of the first film.

A resistive memory includes: a bottom electrode; a first contact on the bottom electrode; a switching material pad on the first contact, wherein the switching material pad includes an oxide and a plurality of current conducting filaments in the oxide; a top electrode on the switching material pad; a plurality of sacrificial vias contacting the bottom electrode; a second contact that is connected to the bottom electrode; and a third contact that is connected to the top electrode.

A semiconductor structure and the fabrication method thereof are provided. The semiconductor structure includes: a substrate including a first doped region and a second doped region; a first selection transistor and a second selection transistor located in the substrate; a conductive layer located between the first doped region and the second doped region; a resistive dielectric layer located on sidewalls of the conductive layer, where the conductive layer, the first doped region, and a portion of the resistive dielectric layer facing the first doped region constitute a first variable resistor, and the conductive layer, the second doped region, and a portion of the resistive dielectric layer facing the second doped region constitute a second variable resistor; and an isolation dielectric layer located between the conductive layer and the substrate. The semiconductor structure improves the storage density of resistive random access memory (RRAM).

A resistance switching memory device is provided, including an insulating layer having a top surface, a bottom electrode embedded in the insulating layer, a resistance switching layer disposed on the bottom electrode, and a top electrode formed on the resistance switching layer and covering the resistance switching layer. Also, the bottom electrode has an upper portion protruding from the top surface of the insulating layer, and the upper portion has round corners at edges.

Some embodiments include a method of forming an arrangement. A first tier is formed to include CMOS circuitry. A second tier is formed to include an assembly which has first and second sets of memory cells on opposing sides of a coupling region. A support material is adjacent the first and second sets of the memory cells, and an intervening material is adjacent the support material. The support material has a different composition than the intervening material. A conductive interconnect extends through the intervening material. An upper surface of the assembly is polished to reduce an overall height of the assembly. The support material provides support during the polishing to protect the memory cells from being eroded during the polishing. The conductive interconnect of the second tier is coupled with the CMOS circuitry of the first tier. Some embodiments include multitier arrangements.

A memory device including a first array of rail structures that extend along a first horizontal direction, in which each of the rail structures are formed to serve as a bottom electrode, and a second array of rail structures that laterally extend along a second horizontal direction and are laterally spaced apart along the first horizontal direction. Each of the rail structures in the second array are formed to server as a top electrode. The memory device also includes a continuous dielectric memory layer located between the first array of rail structures and the second array of rail structures. The continuous dielectric memory layer providing protection from current leakage between the rail structures of the first array and the rail structures of the second array.

A phase change memory (PCM) cell comprising a substrate a first electrode located on the substrate. A phase change material layer located adjacent to the first electrode, wherein a first side of the phase change material layer is in direct contact with the first electrode. A second electrode located adjacent to phase change material layer, wherein the second electrode is in direct contact with a second side of the phase change material layer, wherein the first side and the second side are different sides of the phase change material layer. An airgap is located directly above the phase change material layer, wherein the airgap provides space for the phase change material to expand or restrict.

A nonvolatile memory device group includes: (A) a first insulating layer; (B) a second insulating layer that has a first concavity and a second concavity communicating with the first concavity and having a width larger than that of the first concavity and that is disposed on the first insulating layer; (C) a plurality of electrodes that are disposed in the first insulating layer and the top surface of which is exposed from the bottom surface of the first concavity; (D) an information storage layer that is formed on the side walls and the bottom surfaces of the first concavity and the second concavity; and (E) a conductive material layer that is filled in a space surrounded with the information storage layer in the second concavity.

A non-volatile memory device and method of making the same is provided. The memory device includes a first electrode, a first hard mask on the first electrode, a second electrode on the first hard mask, a second hard mask on the second electrode, and a third electrode on the second hard mask. A switching layer is over the electrode stack and the switching layer has a first portion conformal to the side surfaces of the electrode stack.

A method, phase change memory array, and system for controlling heater height variation in phase change memories using a multi-step selective stop method. The method may include depositing a first dielectric layer. The method may also include depositing a second dielectric layer proximately connected to the first dielectric layer, where the second dielectric layer is different than the first dielectric layer. The method may also include depositing a heating material. The method may also include performing a first selective stop to remove excess heating material above the second dielectric layer. The method may also include performing a second selective stop to remove the second dielectric layer.