H10N70/011

RESISTIVE RANDOM-ACCESS MEMORY DEVICES WITH METAL-NITRIDE COMPOUND ELECTRODES
20220367804 · 2022-11-17 · ·

The present disclosure relates to resistive random-access memory (RRAM) devices. In some embodiments, an RRAM device includes: a first electrode including a metal nitride; a second electrode comprising a first conductive material; and a switching oxide layer positioned between the first electrode and the second electrode. The switching oxide layer includes at least one transition metal oxide. In some embodiments, the metal nitride in the first electrode includes titanium nitride and/or tantalum nitride. The first electrode does not include a non-reactive metal, such as platinum (Pt), palladium (Pd), etc.

Phase-change memory device with reduced programming voltage

A device includes an electronic component, and the electronic component includes a first pad, a second pad, and a strip connecting the first pad and the second pad. The device further includes a first electrode in contact with the first pad and a second electrode in contact with the second pad. The electronic component is made of a phase change material. At least one of the first electrode and the second electrode is coated with a material that is configured to increase a difference in workfunction between the first electrode and the second electrode.

REPLACEMENT GATE FORMATION IN MEMORY
20220359716 · 2022-11-10 ·

The present disclosure includes methods for replacement gate formation in memory, and apparatuses and systems including memory formed accordingly. An embodiment includes forming a first oxide material in an opening through alternating layers of a second oxide material and a nitride material. An array of openings can be formed through the first oxide material formed in the opening. The layers of the nitride material can be removed. A metal material can be formed in voids resulting from the removal of the layers of the nitride material.

HIGH-DENSITY MEMORY DEVICES USING OXIDE GAP FILL

A semiconductor structure forms two or more tightly pitched memory devices using a dielectric material for a gap fill material. The approach includes providing two adjacent bottom electrodes in a layer of an insulating material and above a metal layer. Two adjacent pillars are each above one of the two adjacent bottom electrodes where each pillar of the two adjacent pillars is composed of a stack of materials for a memory device. A spacer is around the vertical sides each of the two adjacent pillars. The dielectric material is on the spacer around the vertical sides each of the two adjacent pillars, on the layer of the insulating material between the two adjacent bottom electrodes. The dielectric material fills at least a first portion of a gap between the two adjacent pillars. A low k material covers the dielectric material and exposed portions of the layer of the insulating material.

ARTIFICIAL INTELLIGENCE DEVICE CELL WITH IMPROVED PHASE CHANGE MATERIAL REGION
20230099419 · 2023-03-30 ·

An apparatus includes a heater, a phase change material region, and a top metal layer. The phase change material region includes a doped GST layer and a first GST layer. The first GST layer is between the doped GST layer and the heater, and the doped GST layer is doped differently than the first GST layer. The phase change material region is positioned between the heater and the top metal layer.

PHASE CHANGE MEMORY CELL SIDEWALL PROJECTION LINER

A phase change memory (PCM) cell having a mushroom configuration includes a first electrode, a heater electrically connected to the first electrode, a first projection liner electrically connected to the heater, a PCM material electrically connected to the first projection liner, a second electrode electrically connected to the PCM material, and a second projection liner electrically connected to the first projection liner and the second electrode.

RESISTIVE SWITCHING MEMORY DEVICE INCLUDING DUAL ACTIVE LAYER, MANUFACTURING METHOD THEREOF, AND ARRAY INCLUDING SAME
20230097791 · 2023-03-30 ·

An embodiment of the present disclosure provides a resistive switching memory device including: a lower electrode; an amorphous metal oxide-based first active layer positioned on the lower electrode; an amorphous metal oxide-based second active layer positioned on the first active layer; and an upper electrode positioned on the second active layer, wherein the first active layer and the second active layer are made of the same substance but are different in electrical characteristic, thereby having a voluntary compliance current characteristic and a voluntary current rectification characteristic as a single device having a stable electrical characteristic, a method of manufacturing the resistive switching memory device, and an array including the resistive switching memory device.

RRAM CELL STRUCTURE AND FABRICATION METHOD THEREFOR
20230033747 · 2023-02-02 ·

The present invention disclosures a RRAM cell structure, comprising a first transistor and a second transistor which are connected in parallel and commonly connected to a resistive switching device; wherein, the first transistor is set with a first gate, a first source and a first drain, a first control signal is applied to the first gate, and a first source signal is applied to the first source; the second transistor is set with a second gate, a second source and a second drain, a second control signal is applied to the second gate, and a second source signal is applied to the second source; the first drain is connected with the second drain, which are commonly connected to one terminal of the resistive switching device, and a bit signal is applied to another terminal of the resistive switching device. The present invention uses cell area of a traditional 1T1R to manufacture a 2T1R cell structure, which can take into account various operating voltage requirements of the resistive switching device simultaneously, so as to significantly improve cell performances thereof.

CONTACT STRUCTURE FORMATION FOR MEMORY DEVICES
20230102165 · 2023-03-30 ·

A semiconductor structure comprises a memory device comprising a first electrode, at least one memory element layer disposed on the first electrode, and a second electrode disposed on the at least one memory element layer. An encapsulation layer is disposed around side surfaces of the memory device. The semiconductor structure also comprises a conductive cap layer disposed on a top surface of the encapsulation layer and around a portion of side surfaces of the encapsulation layer. A contact is disposed on the second electrode and extends around the side surfaces of the memory device.

EMBEDDED MEMORY PILLAR

A memory device is provided. The memory device includes a memory stack on a first dielectric layer, and a sidewall spacer on the memory stack. The memory device further includes a conductive cap on the sidewall spacer and the memory stack and an upper metal line on the conductive cap and the sidewall spacer, wherein the upper metal line wraps around the conductive cap, sidewall spacer, and memory stack.