H01J37/266

Compact deflecting magnet
10332718 · 2019-06-25 · ·

A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.

Apparatuses including test segment circuits having latch circuits for testing a semiconductor die

Apparatuses including test segment circuits and methods for testing the same are disclosed. An example apparatus includes a plurality of segment lines configured to form a ring around a die and a plurality of test segment circuits, each test segment circuit coupled to at least two segment lines of the plurality of segment lines. Each test segment circuit is coupled to a portion of a first signal line, a portion of a second signal line, and a portion of a third signal line and each test segment circuit is configured to control an operation performed on at least one segment line of the plurality of segment lines.

Compact deflecting magnet
10290463 · 2019-05-14 · ·

A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.

Arrangement and method for detecting a measured value on the basis of electron holography

The invention relates to a method for detecting a measured value (d?/dx, M). According to the invention, provision is made for a sinusoidal excitation signal (Ue) with a predetermined excitation frequency (f), with or without a superposed DC component (Uoffset), to be fed to an input of a component (100, C), for at least one electron holography measuring step to be carried out, in which an electron beam (Se) is directed on the component (100, C), said electron-beam penetrating and/or passing the component (100, C) and subsequently being superposed with a reference electron-beam (Sr), and for an electrical hologram (EHG) arising by interference of the two electron beams (Se, Sr) during a predetermined measurement window (F) to be measured and the phase image (PB) to be ascertained therefrom, and for the measured value (M) to be formed on the basis of the phase image (PB), wherein the temporal length (Tf) of the measurement window (F) of the electron holography measuring step is shorter than half the period (T) of the sinusoidal excitation signal (Uc).

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAGE CONTRAST DEFECT SIGNAL

Systems and methods for implementing charged particle flooding in a charged particle beam apparatus are disclosed. According to certain embodiments, a charged particle beam system includes a charged particle source and a controller which controls the charged particle beam system to emit a charged particle beam in a first mode where the beam is defocused and a second mode where the beam is focused on a surface of a sample.

Time-of-flight mass spectrometer
10186413 · 2019-01-22 · ·

An ion reflector has a configuration in which multiple plate electrodes having a rectangular opening are arranged. The components are arranged so that a central axial line extending in the longitudinal direction of the opening lies on a plane which contains a straight line (Y-axis) connecting the centroidal position of an ion distribution in an ion trap and a central position on the detection surface of a detector, and a central axial line (X-axis) of an ion-ejecting direction. If the potential distribution along the central axis of the ion reflector is modified so that a portion of the reflecting field becomes a non-uniform electric field intended for improving isochronism for a group of ions to be detected, an area having an ideal potential distribution for realizing the isochronism is spread in the Y-axis direction.

APPARATUSES INCLUDING TEST SEGMENT CIRCUITS AND METHODS FOR TESTING THE SAME

Apparatuses including test segment circuits and methods for testing the same are disclosed. An example apparatus includes a plurality of segment lines configured to form a ring around a die and a plurality of test segment circuits, each test segment circuit coupled to at least two segment lines of the plurality of segment lines. Each test segment circuit is coupled to a portion of a first signal line, a portion of a second signal line, and a portion of a third signal line and each test segment circuit is configured to control an operation performed on at least one segment line of the plurality of segment lines.

COMPACT DEFLECTING MAGNET
20180315578 · 2018-11-01 ·

A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.

OPTICAL-CAVITY BASED PONDEROMOTIVE PHASE PLATE FOR TRANSMISSION ELECTRON MICROSCOPY

An optical cavity is defined by a first mirror and a second mirror. The first mirror has a front surface that includes a first concave mirror. The second mirror has a front surface that includes a second concave mirror. The optical cavity has a resonant optical mode with a small focal spot size. The optical cavity may be used in a method of enhancing phase contrast in an electron beam image, and associated system for electron beam imaging or electron-beam spectroscopy, with a transmission electron beam microscope.

Installation Location Noise Floor Evaluation Device

Concepts and technologies are disclosed herein for installation location noise floor evaluation device. The device can be configured to receive a radio frequency signal emitted by a radio frequency device that emits a radio frequency signal that can enter into an installation location and detect a radio frequency noise floor associated with the installation location based on the radio frequency signal. The installation location noise floor evaluation device can compare the radio frequency noise floor to a noise floor threshold associated with an operating frequency of a device, generating an indication that indicates an outcome of the comparing, and output the indicator.