H01J41/10

Quantum pressure standard and methods for determining and using same

A method determines a total velocity average cross-section parameter custom characterσ.sub.totνcustom character in a relationship of the form Γ.sub.loss(U)=n.sub.bcustom characterσ.sub.totνcustom character.Math.ƒ(U, U.sub.d), where: Γ.sub.loss(U) is a rate of exponential loss of sensor atoms from a cold atom sensor trap of trap depth potential energy U in a vacuum environment due to collisions with residual particles in the vacuum environment; n.sub.b is a number density of residual particles in the vacuum environment; U.sub.d is a parameter given by U d = 2 k B T / m bg 4 π 2 m t .Math. σ tot v .Math.
which relates the masses of the sensor atoms m.sub.t and residual particles m.sub.bg to the total velocity average cross-section parameter custom character

QUANTUM PRESSURE STANDARD AND METHODS FOR DETERMINING AND USING SAME

A method determines a total velocity average cross-section parameter custom-character.sub.totcustom-character in a relationship of the form .sub.loss(U)=n.sub.bcustom-character.sub.totcustom-character.Math.(U, U.sub.d), where: .sub.loss(U) is a rate of exponential loss of sensor atoms from a cold atom sensor trap of trap depth potential energy U in a vacuum environment due to collisions with residual particles in the vacuum environment; n.sub.b is a number density of residual particles in the vacuum environment; U.sub.d is a parameter given by

[00001] U d = 2 .Math. k B .Math. T / m bg .Math. 4 .Math. .Math. .Math. 2 m t .Math. tot .Math. v

which relates the masses of the sensor atoms m.sub.t and residual particles m.sub.bg to the total velocity average cross-section parameter custom-character.sub.totcustom-character; and (U, U.sub.d) is a function of the trap depth potential energy U and the parameter U.sub.d which models a naturally occurring

CHAMBER FOR AN IONIZATION VACUUM GAUGE

Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1, 1) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2, 2) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

CHAMBER FOR AN IONIZATION VACUUM GAUGE

Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1, 1) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2, 2) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

Chamber for an ionization vacuum gauge

Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1, 1) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2, 2) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

Chamber for an ionization vacuum gauge

Chamber (11, 12, 13) for bounding a plasma generation area (42) in a vacuum pressure sensor (40), wherein the chamber comprises an electrically conductive casing element (1, 1, 1) located radially on the outside relative to a central axis, wherein the chamber comprises electrically conductive wall elements (2, 2, 2) arranged substantially perpendicular to the central axis and connected to the casing element, wherein at least one of the wall elements has a first opening (3), through which the central axis extends, wherein the casing element comprises at least a first (B1) and a second region (B2), wherein the first region is located closer to the central axis than the second region. The invention further relates to a vacuum pressure sensor comprising the chamber.

CHAMBER FOR AN IONIZATION VACUUM GAUGE

A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.

CHAMBER FOR AN IONIZATION VACUUM GAUGE

A chamber, for bounding a plasma generation area in a vacuum pressure sensor, includes an electrically conductive casing element located radially on an outside relative to a central axis. The chamber includes electrically conductive wall elements arranged substantially perpendicular to the central axis and connected to the electrically conductive casing element. At least one of the wall elements has a first opening, through which the central axis extends. The electrically conductive casing element comprises at least a first and a second region. The first region is located closer to the central axis than the second region. The electrically conductive casing element is conical at least in part.