A method of analysis using mass spectrometry and/or ion mobility spectrometry is disclosed. The method comprises: using a first device to generate smoke, aerosol or vapour from a target comprising or consisting of a microbial population; mass analysing and/or ion mobility analysing said smoke, aerosol or vapour, or ions derived therefrom, in order to obtain spectrometric data; and analysing said spectrometric data in order to analyse said microbial population.

A method of analysis using mass spectrometry and/or ion mobility spectrometry is disclosed. The method comprises: using a first device to generate smoke, aerosol or vapour from a target comprising or consisting of a microbial population; mass analysing and/or ion mobility analysing said smoke, aerosol or vapour, or ions derived therefrom, in order to obtain spectrometric data; and analysing said spectrometric data in order to analyse said microbial population.

Disclosed is a method for simultaneous determination of particle size distribution, concentrations of nanoparticulate mercury (Hg-NPs) in natural soils. The method uses sodium pyrophosphate as the extractant, and allows quick extraction of Hg-NPs in the soil without dissolution or aggregation. In combination with spICP-MS determination, the method makes it possible to simultaneously determine the particle size distribution and concentration of Hg-NPs in the complex soil matrix, with accurate determination results.

Provided are a method for inspecting a chemical solution, the method being able to analyze minute foreign matter in the chemical solution, a method for producing a chemical solution, a method for controlling a chemical solution, a method for producing a semiconductor device, a method for inspecting a resist composition, the method being able to analyze minute foreign matter in the resist composition, a method for producing a resist composition, a method for controlling a resist composition, and a method for checking a contamination status of a semiconductor manufacturing apparatus, the method being able to control minute foreign matter in the semiconductor manufacturing apparatus.

The method for inspecting a chemical solution includes a step 1X of preparing a chemical solution; a step 2X of applying the chemical solution onto a semiconductor substrate; and a step 3X of measuring whether there is a defect on a surface of the semiconductor substrate to obtain positional information of the defect on the surface of the semiconductor substrate, irradiating, based on the positional information, the defect on the surface of the semiconductor substrate with a laser beam, collecting an analytical sample obtained by the irradiation by using a carrier gas, and subjecting the analytical sample to inductively coupled plasma mass spectrometry.

Techniques and systems for multi-modal ionization for mass spectrometry are provided. In some embodiments, a method may comprise: receiving an analyte; ionizing some molecules of the analyte using a first ionization method to produce first ions; ionizing other molecules of the analyte using a second ionization method to produce second ions; and providing the first and second ions to a mass analyzer.

An apparatus for analyzing peak data generated from mass signals acquired by a mass spectrometric system comprises: a streaming device that comprises a first network interface and is configured to generate peak data from the mass signals or receive peak data generated externally from the mass signals, group the peak data into independently-processable data packets related to a processing task, and distribute the data packets in a task-specific stream via the first network interface onto a network; and at least one analyzing device that comprises a second network interface and is configured to retrieve a data packet of the task-specific stream via the second network interface from the network, perform the processing task on the retrieved data packet to produce result data, package the result data in a result data packet, and distribute the result data packet via the first network interface onto the network.

An apparatus for analyzing peak data generated from mass signals acquired by a mass spectrometric system comprises: a streaming device that comprises a first network interface and is configured to generate peak data from the mass signals or receive peak data generated externally from the mass signals, group the peak data into independently-processable data packets related to a processing task, and distribute the data packets in a task-specific stream via the first network interface onto a network; and at least one analyzing device that comprises a second network interface and is configured to retrieve a data packet of the task-specific stream via the second network interface from the network, perform the processing task on the retrieved data packet to produce result data, package the result data in a result data packet, and distribute the result data packet via the first network interface onto the network.

The present invention comprises novel methods of continuously monitoring the performance of an atmospheric pressure ionization (API) system. The methods of the invention allow for improved quality monitoring of the processes that leads to the formation of ions at atmospheric pressure. The methods of the invention further allow for continuously monitoring for the quality of the ion formation process in API without the addition of extraneous material (such as labelled compounds or control known compounds) to the system being monitored.

According to one embodiment, an analysis apparatus includes a stage on which to place a sample, a light source, a film thickness measurement unit, and a controller. The light source generates a laser beam to irradiate the sample with the laser beam to cause vaporization of the sample. The film thickness measurer measures a thickness of the sample at a first position where the laser beam irradiates the sample. The controller controls at least one irradiation condition of the laser beam based on the measured thickness of the sample.

An ion source may include an ionization chamber to be maintained at atmospheric-pressure. The ion source may further include a reduced-pressure chamber to be maintained at sub-atmospheric pressure, and an ion transfer device comprising an inlet in the ionization chamber and an outlet in the reduced-pressure chamber. The ion transfer device may define an ion path from the inlet to the outlet. The ion transfer device may be positioned to emit ions and neutral gas molecules from the outlet as an expanding beam comprising a low-gas density zone enveloped by a high-gas density region that includes a gas density that is higher than the low-gas density zone. The ion source may be utilized, for example, for ion mobility spectrometry (IMS), mass spectrometry (MS), and hybrid IM-MS.