Apparatus, systems, and methods disclosed herein utilize a lid for closing, substantially sealing, and providing an electrical interface for mass spectrometry systems. In various aspects, the present disclosure provides a lid having a plurality of layers with electrical connections therethrough. In some embodiments, lids for use in a mass spectrometry system as are disclosed herein can include a plurality of layers having electrical connections such that their inputs and outputs are laterally staggered across these layers. In some embodiments, the present disclosure provides methods of making and using disclosed lids and mass spectrometry systems. In some embodiments, implementations of the present disclosure are useful in mass spectrometry systems, including, for example, improving and simplifying assembly.

A mass spectrometer includes a control system arranged to assess an operational state of the mass spectrometer. When a fault is detected, the control system assigns the fault to one of a plurality of categories, including a first category of faults which may be attempted to be rectified automatically by the mass spectrometer, a second category of faults which may be attempted to be rectified by the user, and a third category of faults which may only be attempted to be rectified by a service engineer. When a fault is assigned to the first category of faults, the control system initiates an attempt to automatically rectify the fault. When a fault is assigned to the second category of faults, the control system causes information relating to the fault to be displayed to the user, including data indicative of the fault and data one or more steps to be taken by the user to attempt to rectify the fault (2000). When a fault is assigned to the third category of faults, the control system causes information relating to the fault to be displayed to the user including data indicative of the fault, and an indication that the user should call a service engineer.

A mass spectrometer includes a control system arranged to assess an operational state of the mass spectrometer. When a fault is detected, the control system assigns the fault to one of a plurality of categories, including a first category of faults which may be attempted to be rectified automatically by the mass spectrometer, a second category of faults which may be attempted to be rectified by the user, and a third category of faults which may only be attempted to be rectified by a service engineer. When a fault is assigned to the first category of faults, the control system initiates an attempt to automatically rectify the fault. When a fault is assigned to the second category of faults, the control system causes information relating to the fault to be displayed to the user, including data indicative of the fault and data one or more steps to be taken by the user to attempt to rectify the fault (2000). When a fault is assigned to the third category of faults, the control system causes information relating to the fault to be displayed to the user including data indicative of the fault, and an indication that the user should call a service engineer.

In one aspect, a curtain and orifice plate assembly for use in a mass spectrometry system is disclosed, which comprises a curtain plate including a first printed circuit board (PCB) having an aperture configured for receiving ions generated by an ion source of the mass spectrometry system and at least one gas-flow channel, where said first PCB has at least one metal coating disposed on at least a portion thereof. The assembly further includes an orifice plate coupled to the curtain plate, which includes a PCB providing an orifice that is substantially aligned with the aperture of the curtain plate so that the ions entering the assembly via said aperture of the curtain plate can exit the assembly via said orifice of the orifice plate, where the second PCB has at least one metal coating disposed on at least a portion thereof.

The invention provides hybrid mass spectrometric systems which comprise an ion source, a first trapped ion mobility spectrometry (TIMS) analyzer and a mass analyzer, wherein the TIMS analyzer is located and operated in a first vacuum chamber at an elevated pressure above 500 Pa, and methods for operating the hybrid mass spectrometric systems.

The invention provides hybrid mass spectrometric systems which comprise an ion source, a first trapped ion mobility spectrometry (TIMS) analyzer and a mass analyzer, wherein the TIMS analyzer is located and operated in a first vacuum chamber at an elevated pressure above 500 Pa, and methods for operating the hybrid mass spectrometric systems.

A mass spectrometer comprises an orifice plate having an orifice, a first multipole ion guide in a first chamber downstream of said orifice plate, said first multipole ion guide comprising a plurality of rods, and a second multipole ion guide in a second chamber downstream of said first chamber, said second multipole ion guide comprising a plurality of rods. A first ion lens is between the first and the second multipole ion guides. A third multipole ion guide is in a third chamber downstream of the second chamber, the third multipole ion guide comprises a plurality of rods. A second ion lens is between the second and third chambers. A tunable DC voltage source applies a tunable DC offset voltage to at least one of the above ion guide and ion lenses to increase an axial kinetic energy of the ions to cause at least one of declustering and/or fragmentation.

A mass spectrometer comprises an orifice plate having an orifice, a first multipole ion guide in a first chamber downstream of said orifice plate, said first multipole ion guide comprising a plurality of rods, and a second multipole ion guide in a second chamber downstream of said first chamber, said second multipole ion guide comprising a plurality of rods. A first ion lens is between the first and the second multipole ion guides. A third multipole ion guide is in a third chamber downstream of the second chamber, the third multipole ion guide comprises a plurality of rods. A second ion lens is between the second and third chambers. A tunable DC voltage source applies a tunable DC offset voltage to at least one of the above ion guide and ion lenses to increase an axial kinetic energy of the ions to cause at least one of declustering and/or fragmentation.

A mass spectrometer comprises: a first ion optical device in a relatively low gas pressure region; a second ion optical device in a relatively high gas pressure region, the first and second ion optical devices receiving respective RF voltages from respective RF power supplies for generating respective RF fields that confine ions in respective trapping regions of the ion optical devices; and a gas conductance restriction, restricting gas flow from the relatively high gas pressure region to the relatively low gas pressure region, the gas conductance restriction having an aperture to allow ions to pass from the second to the first ion optical device. The first and second RF power supplies are independent to allow the RF voltages for generating the first RF field to have a different amplitude from the RF voltages for generating the second RF field.

A residual gas analyser (40) for analysis of a residual gas (30), in particular a residual gas in an EUV lithography system (1), includes an inlet system (41) for admission of the residual gas from a vacuum environment (27a) into the residual gas analyser, and a mass analyser (43) having a detector (44) for detecting ionized constituents (30a) of the residual gas. The residual gas analyser includes an ion transfer device (42) for transferring the ionized constituents of the residual gas to the mass analyser, the ion transfer device having an ion filtering device (45) configured for filtering at least one ionic constituent (30a) of the residual gas. Also disclosed is an EUV lithography system, in particular an EUV lithography apparatus, which includes at least one residual gas analyser configured as indicated above for analysing a residual gas in a vacuum environment of the EUV lithography system.