H01J61/12

Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light Source

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

Transformer-less AC-DC input compatible boost resonant inverter

A system for use in generating a power signal includes a first stage circuit having: a first input line coupled to a first stage first parallel line having a first stage first switch positioned thereon, a second input line coupled to a first stage second parallel line having a first stage second switch positioned thereon, and a first stage third parallel line oriented in parallel with the first stage first parallel line and the first stage second parallel line between a positive rail and a negative rail, the first stage third parallel line having a first capacitor positioned thereon. The system further includes a second stage circuit having a resonant inverter coupled between the positive rail and the negative rail and configured to output the power signal.

Transformer-less AC-DC input compatible boost resonant inverter

A system for use in generating a power signal includes a first stage circuit having: a first input line coupled to a first stage first parallel line having a first stage first switch positioned thereon, a second input line coupled to a first stage second parallel line having a first stage second switch positioned thereon, and a first stage third parallel line oriented in parallel with the first stage first parallel line and the first stage second parallel line between a positive rail and a negative rail, the first stage third parallel line having a first capacitor positioned thereon. The system further includes a second stage circuit having a resonant inverter coupled between the positive rail and the negative rail and configured to output the power signal.

A PLASMA LIGHT SOURCE WITH LOW METAL HALIDE DOSE
20210257206 · 2021-08-19 ·

A low-dose, preferably unsaturated, fill of microwave excitable material (9), including at least two metal halides in a noble gas with an optional mercury buffer, is contained in a plasma crucible (2) to form a light emitting plasma therein.

GAS DISCHARGE LAMP, MORE PARTICULARLY DEUTERIUM LAMP
20230402274 · 2023-12-14 ·

An electrode insert that has: (a) an intermediate wall made of an electrically insulating material, (b) a cathode-side assembly which is mounted on a front side of the intermediate wall and comprises a cathode, a cathode window and a light emission window, (c) an anode-side assembly which is mounted on a rear side of the intermediate wall and comprises an anode and at least one diaphragm, which together with the light emission window defines an optical axis along which a beam generated by discharge is emitted out of the light emission window, wherein at least the anode and the diaphragm are grouped to form a component ensemble, and wherein at least one retaining profile for retaining the component ensemble projects from the rear of the intermediate wall.

GAS DISCHARGE LAMP, MORE PARTICULARLY DEUTERIUM LAMP
20230402274 · 2023-12-14 ·

An electrode insert that has: (a) an intermediate wall made of an electrically insulating material, (b) a cathode-side assembly which is mounted on a front side of the intermediate wall and comprises a cathode, a cathode window and a light emission window, (c) an anode-side assembly which is mounted on a rear side of the intermediate wall and comprises an anode and at least one diaphragm, which together with the light emission window defines an optical axis along which a beam generated by discharge is emitted out of the light emission window, wherein at least the anode and the diaphragm are grouped to form a component ensemble, and wherein at least one retaining profile for retaining the component ensemble projects from the rear of the intermediate wall.

BROADBAND ULTRAVIOLET ILLUMINATION SOURCES

A broadband ultraviolet illumination source for a characterization system is disclosed. The broadband ultraviolet illumination source includes an enclosure having one or more walls, the enclosure configured to contain a gas, and a plasma discharge device based on a graphene-dielectric-semiconductor (GOS) planar-type structure. The GOS structure includes a silicon substrate having a top surface, a dielectric layer disposed on the top surface of the silicon substrate, and at least one layer of graphene disposed on a top surface of the dielectric layer. A metal contact may be formed on the top surface of the graphene layer. The GOS structure has several advantages for use in an illumination source, such as low operating voltage (below 50 V), planar surface electron emission, and compatibility with standard semiconductor processes. The broadband ultraviolet illumination source further includes electrodes placed inside the enclosure or magnets placed outside the enclosure to increase the current density.

UV lamp
11037778 · 2021-06-15 · ·

A gas discharge lamp and photoionization sensor employing the gas discharge lamp. The lamp includes a housing containing a working gas sealed within the housing and a primary ultra-violet transparent window through a first longitudinal end of the housing. In a first embodiment the lamp includes an arched band of elastic getter material band with longitudinally extending diametrically opposed legs wedged within the chamber defined by the housing. In a second embodiment the lamp includes a second ultra-violet transparent window within the housing held into positon against the primary ultra-violet transparent window by an arched metal support band within the housing.

Plasma cell for providing VUV filtering in a laser-sustained plasma light source

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

High-power ultraviolet (UV) and vacuum ultraviolet (VUV) lamps with micro-cavity plasma arrays

A product having at least one plasma lamp that includes plates that are approximately parallel, with at least one array of microcavities formed in a surface of at least one plate. When desirable, the plates are separated a fixed distance by spacers with at least one spacer being placed near the plate's edge to form a hermetic seal therewith. A gas makes contact with the microcavity array. Electrodes capable of delivering a time-varying voltage are located such that the application of the time-varying voltage interacts with the gas to form a glow discharge plasma in the microcavities and the fixed volume between the plates. The glow discharge plasma efficiently and uniformly emits radiation that is predominantly in the UV/VUV spectral range with at least a portion of the radiation being emitted from the plasma lamp.