A flash irradiation device includes: a light-emitting tube sealing a light-emitting gas inside; a pair of discharging electrodes being arranged distant from each other in the first direction; a reflecting member that is disposed on an opposite side of the light-emitting tube from the workpiece; a pair of trigger electrodes on an outer wall surface of the light-emitting tube or in a vicinity of the light-emitting tube, the pair of the trigger electrodes being arranged distant from each other in the first direction; a lighting circuit connected to the pair of the discharging electrodes, the lighting circuit being configured to supply electric power between the pair of the discharging electrodes; and a trigger circuit connected to the pair of the trigger electrodes, the trigger circuit configured to apply a voltage for starting lighting across the pair of the trigger electrodes.

A flash irradiation device includes: a light-emitting tube sealing a light-emitting gas inside; a pair of discharging electrodes being arranged distant from each other in the first direction; a reflecting member that is disposed on an opposite side of the light-emitting tube from the workpiece; a pair of trigger electrodes on an outer wall surface of the light-emitting tube or in a vicinity of the light-emitting tube, the pair of the trigger electrodes being arranged distant from each other in the first direction; a lighting circuit connected to the pair of the discharging electrodes, the lighting circuit being configured to supply electric power between the pair of the discharging electrodes; and a trigger circuit connected to the pair of the trigger electrodes, the trigger circuit configured to apply a voltage for starting lighting across the pair of the trigger electrodes.

A flash light source device includes: a flash lamp; a wiring board that is provided with a circuit configured to cause the flash lamp to emit light; a housing that is formed of a conductive material and accommodates the flash lamp and the wiring board; and an electromagnetic shield cable that includes a wire directly connected to the wiring board, an electromagnetic shield layer that covers the wire, and an insulating protective layer that covers the electromagnetic shield layer, and extends to the inside and outside of the housing through an opening formed in the housing. The electromagnetic shield layer is exposed at least at a part corresponding to the opening. The part corresponding to the opening in the electromagnetic shield layer is electrically connected to a part defining the opening in the housing.

A flash light source device includes: a flash lamp; a wiring board that is provided with a circuit configured to cause the flash lamp to emit light; a housing that is formed of a conductive material and accommodates the flash lamp and the wiring board; and an electromagnetic shield cable that includes a wire directly connected to the wiring board, an electromagnetic shield layer that covers the wire, and an insulating protective layer that covers the electromagnetic shield layer, and extends to the inside and outside of the housing through an opening formed in the housing. The electromagnetic shield layer is exposed at least at a part corresponding to the opening. The part corresponding to the opening in the electromagnetic shield layer is electrically connected to a part defining the opening in the housing.

Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

When pressure in a chamber is once reduced lower than that when a flash of light is emitted and is maintained, after a flash lamp irradiates a semiconductor wafer accommodated in the chamber with the flash of light, a portion in the chamber, where gas is liable to remain, is eliminated. Then, when a flow rate of nitrogen gas to be supplied into the chamber is increased to discharge gas in the chamber, particles flying in the chamber due to flash irradiation can be smoothly discharged. As a result, the particles flying in the chamber can be prevented from being attached to an additional semiconductor wafer.

When pressure in a chamber is once reduced lower than that when a flash of light is emitted and is maintained, after a flash lamp irradiates a semiconductor wafer accommodated in the chamber with the flash of light, a portion in the chamber, where gas is liable to remain, is eliminated. Then, when a flow rate of nitrogen gas to be supplied into the chamber is increased to discharge gas in the chamber, particles flying in the chamber due to flash irradiation can be smoothly discharged. As a result, the particles flying in the chamber can be prevented from being attached to an additional semiconductor wafer.

A series (e.g., string) of flashing lights can temporarily blind animals that view the lights within about 25 feet of the lights, deterring them from even approaching the series of flashing lights. The series of flashing lights is placed about the perimeter of an area to be protected. In one embodiment, the flashing lights are gas discharge bulbs connected in series and driven by an electric fence charger.

Flash tubes for photographic use, in particular a flash tube is adapted to provide a light output adapted to FP-sync, Flat Peak. The flash tube includes a length of glass tubing enclosing a gas for use in the flash tube, a cathode inside a first end part of glass tubing and an anode inside a second end part of glass tubing. The cathode includes an element that helps to ionize the gas that is wound around the cathode, such that a spark stream starts from the upper part of the cathode and is prevented from spreading down wards on the cathode and changing the arc length during the light output adapted to FP-sync.