The X-ray tube disclosed herein includes an electron emission part including an electron emission element using a cold cathode; an anode part having an anode surface with which an electron emitted from the electron emission part collides; and a focusing structure disposed between the electron emission part and a target part disposed on the anode surface. The focusing structure has a plurality of focal point areas that are applied with a voltage in a mutually independent manner. The electron emission part has first and second electron beam emission areas that are on/off controlled in a mutually independent manner. The X-ray tube is designed in such a way that a collision area of the electron beam emitted from each of the first and second electron beam emission areas on the anode surface moves in response to a voltage applied to the focusing structure.

A stationary in-vivo grating-enabled micro-CT (computed tomography) architecture (SIGMA) system includes CT scanner control circuitry and a number of imaging chains. Each imaging chain includes an x-ray source array, a phase grating, an analyzer grating and a detector array. Each imaging chain is stationary and each x-ray source array includes a plurality of x-ray source elements. Each imaging chain has a centerline, the centerlines of the number of imaging chains intersect at a center point and a first angle between the centerlines of a first adjacent pair of imaging chains equals a second angle between the centerlines of a second adjacent pair of imaging chains. A plurality of selected x-ray source elements of a first x-ray source array is configured to emit a plurality of x-ray beams in a multiplexing fashion.

The present disclosure relates to a CNT X-ray source apparatus, and more particularly, to a CNT X-ray source apparatus configured to maximize utilization of the internal space of a CNT X-ray tube body, having grooves made of an insulating material, and provided with a base portion for supporting a plurality of electrodes. With this configuration, mass production is possible. The CNT X-ray source apparatus of the present disclosure includes a cathode electrode; an emitter provided on the cathode electrode and responsible for emitting electrons; a gate electrode disposed above the cathode electrode and spaced apart from the cathode electrode by a predetermined interval; a focusing electrode for preventing scattering of electrons emitted from the emitter; and a base portion responsible for supporting one or more of the cathode electrode, the gate electrode, and the focusing electrode and formed of an insulating material. In this case, one or more grooves for accommodating at least one of the cathode electrode, the gate electrode, and the focusing electrode are formed in the base portion.

Disclosed herein is an X-ray source, comprising: a cathode in a recess of a first substrate; a counter electrode on a sidewall of the recess, configured to cause field emission of electrons from the cathode; and a metal anode configured to receive the electrons emitted from the cathode and to emit X-ray from impact by the electrons on the metal anode.

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

Disclosed are a cartridge-type X-ray source apparatus and an X-ray emission apparatus using the same. The X-ray source includes: a cathode electrode provided with an electron emission source by using a nanostructure; an anode electrode having a target emitting X-rays by electron collision; and a housing forming an external appearance, and exposing a cathode electrode terminal connected to the cathode electrode and an anode electrode terminal connected to the anode electrode to an outside thereof, wherein the cathode electrode terminal and the anode electrode terminal differ from each other in at least one of exposure direction, height, size, and shape.

An apparatus includes an electromechanical x-ray generator (MEXRAY) configured to charged capacitors using a small, high-voltage direct current. The apparatus also includes an ultraviolet (UV) light emitting diode (LED) driven photocathode device configured to control/modulate an electron dose rate of the MEXRAY or other vacuum DC, source.

An electron emission structure according to embodiments of the inventive concept includes a cathode electrode and electron emission yarns each having a yarn shape and disposed in the cathode electrode. Here, the cathode electrode includes a plurality of first conductive panels spaced apart from each other in a first direction and at least one second conductive panel that crosses the first conductive panels in the first direction. Also, each of the first conductive panels includes at least one groove at an upper portion thereof. The second conductive panel is inserted to the groove of each of the first conductive panels. Each of the electron emission yarns is disposed between the first conductive panels. Each of the electron emission yarns contacts the second conductive panel. Each of the electron emission yarns is mechanically fixed and vertically aligned as well as arranged regularly by the second conductive panel and one pair of adjacent first conductive panels of the first conductive panels.

An X-ray tube of an embodiment includes an anode; and an electron emission device. In an embodiment, the electron emission device includes at least one electron emitter including at least one emission surface and at least one barrier grid, the at least one barrier grid being spaced apart from the at least one emission surface of the electron emitter and includes a definable number of individually controllable grid segments. According to an embodiment, at least one individually definable grid voltage is applicable to each of the grid segments. In a simple manner, an electron-emission device of an embodiment permits the image quality to be adjusted with minimal anode loading.