A sample holder transfer device is for use in cryo-microscopy and for transferring a sample holder to an analysing or processing unit. The sample holder is configured for holding a sample carrier carrying a sample. The sample holder transfer device is configured to receive the sample holder, the sample holder including a sample carrier fixing element. At least one section of the sample carrier fixing element is configured, when in a first position, to fix the sample carrier to the sample holder, and, when in a second position, to release the sample carrier or provide access to an area where the sample carrier is to be placed. The sample holder transfer device includes a switching mechanism operable to switch the at least one section of the sample carrier fixing element of the sample holder from the first to the second position or from the second to the first position.

Provided is a charged particle beam system capable of reducing the force applied to a sample when a chuck device grips the sample. The charged particle beam system is typified by an electron microscope including a sample chamber, a sample exchange chamber connected to the sample chamber, a sample container capable of being removably attached in the sample exchange chamber, and a transport device for transporting the sample between the sample container and the sample exchange chamber. The transport device includes the chuck device for gripping the sample, a drive mechanism for moving the chuck device in a given direction, a mechanical driver for actuating the chuck device, and a power transmission mechanism for transmitting power of the mechanical driver to the chuck device. The power transmission mechanism includes a shaft and a resilient member that elastically deforms when a force in the given direction is applied to the shaft.

A system for storing and shipping samples for cryo-electron microscopy. The system comprising a cassette puck and support platform that accepts commercial cryo-EM sample cassettes and is compatible to a substantial extent with tools used in cryocrystallography. The system can also work with existing Cryo-EM storage and transport puck and cane systems. The cassette puck comprising a receptacle for holding one or more cassettes and a plurality of holes and grooves. The holes and grooves being configured for use with other tools such as tongs, support platforms, and canes.

The invention relates to a workstation (1), a preparation station (2) and a method for manipulating an electron microscopy grid assembly (3). The workstation (1) comprises a first compartment (101), a first gas inlet (102) for generating an overpressure in the first compartment (101), a first glove (104) and a second glove (105), each being fixed in a respective opening (106, 107) of the workstation (1), wherein the first glove (104) and the second glove (105) are movable in the first compartment (101) to manipulate objects in the first compartment (101), wherein the workstation (1) comprises a port (109) for providing a transfer device (4) for an electron microscopy grid assembly (3) in the first compartment (101). The preparation station (2) comprises a coolant reservoir (201, 202), a first part (210) configured to hold a shuttle (6) for holding an electron microscopy grid assembly (3) in a fixed orientation, wherein the preparation station (2) is configured such that the first part (210) is submergable in the cryogenic coolant when the coolant reservoir (201, 202) contains the cryogenic coolant.

There is provided a sample holder capable of reducing positional deviation of a cartridge in the heightwise direction of a sample. The sample holder includes the cartridge and a holder base having a mounting portion for the cartridge. The mounting portion includes a placement surface, a first tilted surface, and a rotary drive mechanism for imparting a rotary force to the cartridge. The cartridge includes an opposing first tilted surface opposite to the first tilted surface of the mounting portion. As the rotary drive mechanism imparts the rotary force to the cartridge, the first tilted surface of the cartridge is pressed against the first tilted surface of the mounting portion, whereby the cartridge is pressed against the placement surface.

A charged particle beam apparatus includes: a specimen chamber; a specimen holder that is disposed in the specimen chamber; a specimen exchange chamber that is connected to the specimen chamber; a transporting mechanism that transports a specimen between the specimen chamber and the specimen exchange chamber; a first temperature sensor that measures a temperature of the specimen holder; a second temperature sensor that measures a temperature of the transporting mechanism; and a control unit. The control unit: calculates a temperature difference between the specimen holder and the transporting mechanism based on the temperature of the specimen holder and the temperature of the transporting mechanism when the control unit has received an instruction to transport a specimen; determining whether the temperature difference is a threshold or more; and stopping transportation of a specimen when the control unit has determined that the temperature difference is the threshold or more.

The invention relates to a sample transfer device (10) for reception of a sample, having a transfer rod (4) that is configured for reception of a sample holder, the sample holder to be arranged in a chamber (1) of the sample transfer device (10) for the purpose of transferring the sample to a processing unit or analytical unit (200), at least one measurement device (3, 8) for measuring a physical variable being arranged inside the sample transfer device (10).

A sample cartridge carrier apparatus is coupled with a focused ion beam processing apparatus (FIB processing apparatus). A guide mechanism is configured to guide a series of movements of a sample cartridge holder to allow a sample cartridge to be held by a carrier base on a sub stage. Sub cooling equipment is configured to cool the sample cartridge via the sub stage. A carrier mechanism carries the carrier base between the sub stage and a main stage.

Systems and methods for preparing a nanofluidic LCTEM cell are provided. An exemplary method includes coating a photoresist layer onto a top surface of a silicon nitride substrate; etching channels into the photoresist layer; depositing calcite into the etched channels; removing the photoresist; placing the cell on a holder; connecting a first end of an inlet line to the cell; connecting a second end of the inlet line to an ultrasound transducer configured to generate nanobubbles; and connecting an outlet line to the cell.

An electrostatic chuck control system configured to be utilized during an inspection process of a wafer, the electrostatic chuck control system comprising an electrostatic chuck of a stage configured to be undocked during the inspection process, wherein the electrostatic chuck comprises a plurality of components configured to influence an interaction between the wafer and the electrostatic chuck during the inspection process, a first sensor configured to generate measurement data between at least some of the plurality of components and the wafer, and a controller including circuitry configured to receive the measurement data to determine characteristics of the wafer relative to the electrostatic chuck and to generate adjustment data to enable adjusting, while the stage is undocked, at least some of the plurality of components based on the determined characteristics.