Patent classifications
H01L29/84
SURFACE STRESS SENSOR AND METHOD FOR MANUFACTURING SAME
A surface stress sensor in which a surface of a membrane includes a receptor forming region that is a region including the center of the surface and an exterior region that is a region located closer to a holding member than the receptor forming region, that includes a forming region-side recess/protrusion pattern that is formed in the receptor forming region and is formed with a pattern in which a plurality of protruding portions or a plurality of recessed portions continue, and in which the forming region-side recess/protrusion pattern is a pattern having a degree of roughness that allows a solution to be present in gaps formed by the plurality of protruding portions or the plurality of recessed portions forming the forming region-side recess/protrusion pattern.
ORGANIC GATE TFT-TYPE STRESS SENSORS AND METHOD OF MAKING AND USING THE SAME
A thin-film transistor may include an amorphous semiconductor channel layer, an organic material piezoelectric stress gate layer formed adjacent to the amorphous semiconductor channel layer, a source electrode coupled to the organic material piezoelectric stress gate layer, a drain electrode coupled to the organic material piezoelectric stress gate layer and a gate electrode coupled to the organic material piezoelectric stress gate layer. In some embodiments, the amorphous semiconductor channel layer may be amorphous indium gallium zinc oxide. In some embodiments, the organic material piezoelectric stress gate layer may be organic polyvinylidene fluoride. In some embodiments, the amorphous semiconductor channel layer may be formed on a flexible substrate.
Localized strain fields in epitaxial layer over cREO
A layered structure (100) for transmission of an acoustic wave, the layered structure (100) comprising: a substrate layer (102); and a second layer (104) over the substrate layer (102), wherein the second layer (104) comprises a plurality of discrete portions (105) adjacent to each other, each discrete portion (105) of the plurality of discrete portions (105) comprising a first subregion (104A) and a second subregion (104B). Also an epitaxial layer (108), grown over the second layer (104), for transmission of the acoustic wave in a major plane of the epitaxial layer (108), wherein a periodicity (λ) of a wavelength of the acoustic wave to be transmitted through the epitaxial layer (108) is approximately equal to a sum of a width (d.sub.A) of the first subregion (104A) and a width (d.sub.B) of the second subregion (104B).
Localized strain fields in epitaxial layer over cREO
A layered structure (100) for transmission of an acoustic wave, the layered structure (100) comprising: a substrate layer (102); and a second layer (104) over the substrate layer (102), wherein the second layer (104) comprises a plurality of discrete portions (105) adjacent to each other, each discrete portion (105) of the plurality of discrete portions (105) comprising a first subregion (104A) and a second subregion (104B). Also an epitaxial layer (108), grown over the second layer (104), for transmission of the acoustic wave in a major plane of the epitaxial layer (108), wherein a periodicity (λ) of a wavelength of the acoustic wave to be transmitted through the epitaxial layer (108) is approximately equal to a sum of a width (d.sub.A) of the first subregion (104A) and a width (d.sub.B) of the second subregion (104B).
DIAMOND-LIKE CARBON COATING FOR PASSIVE AND ACTIVE ELECTRONICS
Systems and methods for building passive and active electronics with diamond-like carbon (DLC) coatings are provided herein. DLC may be layered upon substrates to form various components of electronic devices. Passive components such as resistors, capacitors, and inductors may be built using DLC as a dielectric or as an insulating layer. Active components such as diodes and transistors may be built with the DLC acting substantially like a semiconductor. The amount of sp.sup.2 and sp.sup.3 bonded carbon atoms may be varied to modify the properties of the DLC for various electronic components.
DIAMOND-LIKE CARBON COATING FOR PASSIVE AND ACTIVE ELECTRONICS
Systems and methods for building passive and active electronics with diamond-like carbon (DLC) coatings are provided herein. DLC may be layered upon substrates to form various components of electronic devices. Passive components such as resistors, capacitors, and inductors may be built using DLC as a dielectric or as an insulating layer. Active components such as diodes and transistors may be built with the DLC acting substantially like a semiconductor. The amount of sp.sup.2 and sp.sup.3 bonded carbon atoms may be varied to modify the properties of the DLC for various electronic components.
Pressure sensor enabling high linearity of change in electrostatic capacitance
A pressure sensor includes a base, a membrane disposed at a distance from the base, a first fixed electrode provided on the base so as to be opposite to the membrane and including a dielectric layer, and a second fixed electrode provided on the base so as to be opposite to the membrane. When pressure that acts on the membrane increases to cause the membrane to sag toward the base, the membrane comes in contact with the dielectric layer of the first fixed electrode before a distance between the membrane and the second fixed electrode becomes constant.
SURFACE STRESS SENSOR, HOLLOW STRUCTURAL ELEMENT, AND METHOD FOR MANUFACTURING SAME
Provided are a surface stress sensor that enables deterioration in measurement precision to be suppressed and a method for manufacturing the same. A surface stress sensor includes: a membrane configured to be bent by applied surface stress; a frame member configured to surround the membrane with gaps interposed therebetween when viewed from the thickness direction of the membrane; at least a pair of coupling portions configured to couple the membrane and the frame member; a flexible resistor configured to be disposed on at least one of the coupling portions and have a resistance value that changes according to bending induced in the coupling portion; and a support base member configured to be connected to the frame member and overlap the frame member when viewed from the thickness direction of the membrane, in which a cavity portion is disposed between the membrane and the support base member.
SEMICONDUCTOR DEVICE
A semiconductor device includes: a channel; a gate structure on the channel; a first source/drain arranged at a first end of the channel and including a metal; a first tunable band-gap layer arranged between the channel and the first source/drain and having a band gap that changes according to stress; a first electrostrictive layer between the gate structure and the first tunable band-gap layer, the first electrostrictive layer having a property of being deformed based on and upon application of an electric field; and a second source/drain at a second end of the channel.
Piezo-resistive transistor based resonator with ferroelectric gate dielectric
Describe is a resonator that uses ferroelectric (FE) materials in the gate of a transistor as a dielectric. The use of FE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, FE material expands or contacts depending on the applied electric field on the gate of the transistor. As such, acoustic waves are generated by switching polarization of the FE materials. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above the FE based transistor.