Patent classifications
H01L2924/0556
THIN FILM TRANSISTOR AND METHOD FOR MAKING THE SAME
The disclosure relates to a thin film transistor and a method for making the same. The thin film transistor includes a substrate; a semiconductor layer on the substrate, wherein the semiconductor layer includes nano-scaled semiconductor materials; a source and a drain, wherein the source and the drain are on the substrate, spaced apart from each other, and electrically connected to the semiconductor layer; a dielectric layer on the semiconductor layer, wherein the dielectric layer is an oxide dielectric layer formed by magnetron sputtering; and a gate in direct contact with the dielectric layer. The thin film transistor has inverse current hysteresis.
THIN FILM TRANSISTOR AND METHOD FOR MAKING THE SAME
The disclosure relates to a thin film transistor and a method for making the same. The thin film transistor includes a substrate; a gate located on the substrate; a dielectric layer located on the gate; a semiconductor layer located on the dielectric layer and including nano-scaled semiconductor materials; and a drain and a source spaced apart from each other and electrically connected to the semiconductor layer. The dielectric layer is an oxide layer formed by magnetron sputtering and in direct contact with the gate. The thin film transistor has inverse current hysteresis.