H01S3/095

Plasma confinement of a laser gain media for gain-amplified lasers

Laser amplification utilizing plasma confinement of a gas laser gain media is described. The gas laser gain media is compressed into plasma utilizing a self-reinforcing magnetic field referred to a plasma pinch (e.g., a flow stabilized z-pinch). In the pinch, the gas laser gain media is compressed to a high density, which improves the gain of the media. Coherent light is transmitted through the plasma pinch, which is amplified by the plasma pinch.

Laser apparatus and extreme ultraviolet light generation system
10122145 · 2018-11-06 · ·

A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.

Laser apparatus and extreme ultraviolet light generation system
10122145 · 2018-11-06 · ·

A laser apparatus may include a master oscillator, a plurality of amplifiers, a photodetector device configured to detect a light beam traveling back along a laser beam path, and a controller. The photodetector device may include a first photodetector configured to detect energy of a light beam traveling back along the laser beam path and a second photodetector configured to detect power of the light beam traveling back along the laser beam path. The controller may be configured to determine that a return beam is generated when the intensity of the energy detection signal exceeds a first threshold. The controller may be configured to determine that a self-oscillation beam is generated when the intensity of the power detection signal exceeds a second threshold.

PLASMA CONFINEMENT OF A LASER GAIN MEDIA FOR GAIN-AMPLIFIED LASERS

Laser amplification utilizing plasma confinement of a gas laser gain media is described. The gas laser gain media is compressed into plasma utilizing a self-reinforcing magnetic field referred to a plasma pinch (e.g., a flow stabilized z-pinch). In the pinch, the gas laser gain media is compressed to a high density, which improves the gain of the media. Coherent light is transmitted through the plasma pinch, which is amplified by the plasma pinch.

Dual channel method for pumping and cooling lasers and laser device

A laser pumping method pumps a primary amount of energy into a laser medium to populate an intermediate level near an upper laser level. A lesser amount of energy is pumped into the laser medium to populate an excited level that lies above the upper laser level and transfers atomic or molecular population to the upper laser level by a nonradiative process. A laser device includes a laser medium supporting four levels, including a lower laser level, an upper laser level, an excited level above the laser level from which population transfers to the upper laser level via nonradiative transition, and an intermediate level within a few kT of the upper laser level.

DUAL CHANNEL METHOD FOR PUMPING AND COOLING LASERS AND LASER DEVICE
20170201060 · 2017-07-13 ·

A laser pumping method pumps a primary amount of energy into a laser medium to populate an intermediate level near an upper laser level. A lesser amount of energy is pumped into the laser medium to populate an excited level that lies above the upper laser level and transfers atomic or molecular population to the upper laser level by a nonradiative process. A laser device includes a laser medium supporting four levels, including a lower laser level, an upper laser level, an excited level above the laser level from which population transfers to the upper laser level via nonradiative transition, and an intermediate level within a few kT of the upper laser level.

Gas Flow Laser
20170179668 · 2017-06-22 ·

Apparatus and methods relating to a gas flow laser are disclosed herein. The gas flow laser includes an eccentrically aligned inner casing within a cylindrical or oval outer shell thereby creating a narrow gas flow path in which the speed of the gas flow may approach sonic or supersonic speeds. An optical resonator is within the narrow gas flow path, and one or more diffusers are located downstream of the optical resonator to improve operating efficiency of the gas flow laser.

Optically pumped micro-plasma

A laser and methods for providing a continuous wave output beam. The laser and method includes positioning a micro-plasma chip capable of creating micro-plasmas within a resonant cavity. A gas is input into the resonant cavity and flows around the micro-plasma chip. Micro-plasmas ignite and excite the gas to create metastables. The metastables are further excited by an optical pump having an energy sufficient to cause the metastables to lase.

Optically pumped micro-plasma

A laser and methods for providing a continuous wave output beam. The laser and method includes positioning a micro-plasma chip capable of creating micro-plasmas within a resonant cavity. A gas is input into the resonant cavity and flows around the micro-plasma chip. Micro-plasmas ignite and excite the gas to create metastables. The metastables are further excited by an optical pump having an energy sufficient to cause the metastables to lase.