An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

A method and apparatus for control of a dose of extreme ultraviolet (EUV) radiation generated by a laser produced plasma (LPP) EUV light source that combines pulse control mode and pulse modulation. The EUV energy created by each pulse is measured and total EUV energy created by the fired pulses determined, a desired energy for the next pulse is determined based upon whether the total EUV energy is greater or less than a desired average EUV energy times the number of pulses. If the desired pulse energy for the next droplet is within the range of one or more pulse modulation actuators, the pulse is modulated; otherwise, the pulse is fired to miss the droplet. This provides greater control of the accumulated dose as well as uniformity of the EUV energy over time, greater ability to compensate for pulses that generate EUV energy that is higher or lower than nominal expected values, and ability to provide an average EUV energy per pulse that is less than the nominal minimum EUV energy per pulse of the system.

A method of emitting wavelength-swept light includes controlling either one or both of magnitudes and on/off timings of currents to be applied to a first gain medium of a first optical generator and a second gain medium of a second optical generator to control an intensity and a wavelength region of each of first wavelength-swept light and second wavelength-swept light; generating the first wavelength-swept light having a first center wavelength based on the current applied to the first gain medium of the first optical generator; generating the second wavelength-swept light having a second center wavelength based on the current applied to the second gain medium of the second optical generator; and emitting output wavelength-swept light by coupling the first wavelength-swept light and the second wavelength-swept light.

The invention provides an excimer laser system including a means for calibrating laser output to compensate for increased variation in laser optical fibers.

A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.

A light amplifier according to an aspect of the present invention includes: a seed light source configured to generate a pulsing seed light; an excitation light source configured to generate excitation light; a light amplifying fiber configured to amplify the seed light by the excitation light and output the amplified light; and a control unit configured to control the seed light source and the excitation light source. The control unit has a mode to control the excitation light's power such that as a set value of a pulse width of the amplified light increases, the amplified light's peak energy increases within a threshold value at a minimum set value of the pulse width.

A method of spectrally multiplexing diode pump modules to increase brightness includes generating one or more pump beams from respective diode lasers at a first wavelength in a diode laser package, generating one or more pump beams from respective diode lasers at a second wavelength different from the first wavelength in the diode laser package, wavelength combining at least one of the pump beams at the first wavelength with at least one of the pump beams at the second wavelength to form one or more combined pump beams, and receiving the combined pump beams in a pump fiber coupled to the diode laser package. Laser systems can include multi-wavelength pump modules and a gain fiber having a core actively doped so as to have an absorption spectrum corresponding to the multiple wavelength, the gain fiber situated to receive the pump light and to produce an output beam at an output wavelength.

A laser that emits light at all available frequencies distributed throughout the spectral bandwidth or emission bandwidth of the laser in a single pulse or pulse train is disclosed. The laser is pumped or seeded with photons having frequencies distributed throughout the superunitary gain bandwidth of the gain medium. The source of photons is a frequency modulated photon source, and the frequency modulation is controlled to occur in one or more cycles timed to occur within a time scale for pulsing the laser.

The present disclosure provides a laser pulse sequence energy correction system and method. The correction system includes a fundamental frequency light source, a control unit, an energy adjusting unit and a frequency multiplication crystal; the fundamental frequency light source is configured to output a fundamental frequency pulse laser, and the frequency multiplication crystal is configured to convert the fundamental frequency pulse laser into a multiple frequency pulse laser; the control unit prestores an energy-time curve of the multiple frequency pulse laser, and the control unit is configured to control the energy adjusting unit to adjust the intensity of the fundamental frequency pulse laser incident on the frequency multiplication crystal according to the energy-time curve, so that energy of each pulse in the multiple frequency pulse laser is identical. The technical solution of the present disclosure has advantages of simple structure, reliable device, convenient adjustment and the like.

Embodiments discussed herein refer to LiDAR systems and methods that enable substantially instantaneous power and frequency control over fiber lasers. The systems and methods can simultaneously control seed laser power and frequency and pump power and frequency to maintain relative constant ratios among each other to maintain a relatively constant excited state ion density of the fiber laser over time.