H01S3/10069

SYSTEMS AND METHODS FOR CALIBRATING LASER PULSES

A medical laser system for outputting laser pulses includes at least one laser cavity configured to generate at least one laser pulse, a rotating mirror configured to receive and reflect the at least one laser pulse, a beam splitter configured to receive and reflect a portion of the at least one laser pulse received from the rotating mirror, an energy-sensing device configured to detect the portion of the at least one laser pulse, an energy measurement assembly configured to generate a measurement signal based on the portion of the at least one laser pulse detected by the energy-sensing device, and a controller. The controller may include a calibration module. The calibration module may be configured to generate at least one categorized calibration table, determine calibration parameters, interpolate the calibration parameters, and cause the at least one laser cavity to generate at least one calibrated laser pulse.

BURST STATISTICS DATA AGGREGATION FILTER
20220365445 · 2022-11-17 ·

A system includes a laser source configured to generate one or more bursts of laser pulses and a data collection and analysis system. The data collection and analysis system is configured to receive, from the laser source, data associated with the one or more bursts of laser pulses and determine, based on the received data, that the one or more bursts of laser pulses are for external use. The data collection and analysis system is further configured to determine, based on the received data, whether the one or more bursts of laser pulses are for an on-wafer operation or are for a calibration operation.

Laser apparatus and extreme ultraviolet light generation system
11586032 · 2023-02-21 · ·

A laser apparatus may include: a mirror configured to reflect a laser beam; an actuator configured to operate the mirror; and a controller configured to transmit a movement instruction to the actuator, wherein the controller predicts a movement completion time of the actuator, and transmits a polling signal so that the actuator receives the polling signal after expiration of the predicted movement completion time.

Methods and systems for aligning master oscillator power amplifier systems

The present disclosure provides a method for aligning a master oscillator power amplifier (MOPA) system. The method includes ramping up a pumping power input into a laser amplifier chain of the MOPA system until the pumping power input reaches an operational pumping power input level; adjusting a seed laser power output of a seed laser of the MOPA system until the seed laser power output is at a first level below an operational seed laser power output level; and performing a first optical alignment process to the MOPA system while the pumping power input is at the operational pumping power input level, the seed laser power output is at the first level, and the MOPA system reaches a steady operational thermal state.

Laser apparatus, laser apparatus management system, and laser apparatus management method
11502478 · 2022-11-15 · ·

A laser apparatus according to the present disclosure includes: a laser output unit configured to perform laser oscillation; and a control unit configured to acquire first laser performance data obtained when the laser output unit performs laser oscillation based on a first laser control parameter, and second laser performance data obtained when the laser output unit performs laser oscillation based on a second laser control parameter, while laser output from the laser output unit to an external device is stopped, and determine whether the second laser performance data has been improved as compared to the first laser performance data.

METHOD AND APPARATUS FOR PULSED LASER BEAM CONTROL IN LASER SHOCK PEENING PROCESS

An apparatus is provided, the apparatus comprising: (i) a diode-pumped solid-state laser oscillator configured to generate a pulsed laser beam having predefined beam characteristics corresponding to a current setting selection of a controller; and (ii) an amplifier configured to amplify an energy and modify a beam profile of the pulse laser beam. A beam detector is coupled to the generated beam to monitor a combination of: (i) a beam pulse width; (ii) a beam diameter; and (iii) an energy level, and generates an error signal to be sent back as a feedback signal to the controller. The controller configures the current source to output a correction current to tune the DPSSL oscillator, the wave plate, and the first polarizer to rotate a correction polarization angle and adjust the energy amplification or temporal profile to within a defined performance tolerance.

RAMAN OPTICAL AMPLIFIER WITH FABRY-PEROT PUMP LASER
20230102535 · 2023-03-30 · ·

A fixed input current is provided to a pump laser of an optical pumping block. Further, a first tuning temperature is provided to the pump laser while providing the fixed input current. The first tuning temperature is based on a target band of a pumping beam and causes the pump laser to generate a light beam having a first frequency band that is dictated by the first tuning temperature and the fixed input current. Further, a second tuning temperature is provided to a temperature dependent optical reflector configured to receive the light beam. The second tuning temperature is based on the target band of the pumping beam and causes the optical reflector to reflect light of the light beam that is within a second frequency band that corresponds to the target frequency band. The reflected light beam is emitted into a transmission optical medium configured to carry an optical signal.

INFORMATION PROCESSING DEVICE, INFORMATION PROCESSING METHOD, AND SEMICONDUCTOR MANUFACTURING SYSTEM

An information processing device includes a processor and a storage device. The processor is configured to acquire data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; to perform classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure; to associate attribute information indicating an attribute according to the classification with each of the records; to cause the storage device to store the data and the time data associated with the attribute information; and to generate a chart using data read from the storage device.

AUTOMATIC CONFIGURATION OF PUMP ATTRIBUTES OF A RAMAN AMPLIFIER TO ACHIEVE A DESIRED GAIN PROFILE
20230085524 · 2023-03-16 ·

Disclosed herein are methods and systems for configuring a raman amplifier. One exemplary system may be provided with a raman amplifier having a plurality of raman pumps and a controller, and a network administration device. The network administration device generates and deploys a first machine learning model and a second machine learning model to the controller of the raman amplifier. A desired gain profile may be automatically assessed using the first machine learning model to determine raman pump configurations for each of the plurality of raman pumps of the raman amplifier. The raman pump configurations for each of the plurality of raman pumps of the raman amplifier may be processed with the second machine learning model to produce an output gain profile. The determined raman pump configurations are deployed only if the output gain profile and the desired gain profile match to within a margin of error.

METHOD FOR PROVIDING CONTROL DATA OF A LASER DEVICE FOR THE NON-DESTRUCTIVE LASER-INDUCED PROPERTY CHANGE OF A POLYMER STRUCTURE
20230130789 · 2023-04-27 ·

The invention relates to a method for providing control data of a laser device (10) for the non-destructive laser-induced property change of a polymer structure (14). As steps, the method includes ascertaining (S10) a respective irradiation parameter range for preset irradiation parameters of the laser device (10) by means of an irradiation model, wherein a property change model is provided in the irradiation model, in which a caused property change of the polymer structure (14) is modelled depending on the irradiation parameters, wherein a destruction threshold value model is provided in the irradiation model, in which at least one threshold value for a laser-induced optical breakthrough of the polymer structure is modelled depending on the irradiation parameters, and wherein the caused property change from the property change model is optimized while limiting by the threshold value from the destruction threshold value model for ascertaining the irradiation parameter ranges.