A method for assembling a beam combiner array including providing an array block having a back wall, a front surface and a plurality of aligned channels extending from the back wall to the front surface, where a bore extends through the back wall and into each channel, and providing a lens array including a plurality of lenses. The method further includes securing the lens array to the front surface of the block so that one of the lenses is aligned with each channel and threading a separate hollow core fiber through one of the bores in the back wall so that an end of the fiber is positioned within the channel. The method also includes aligning each fiber to the lens array so that a beam that propagates down the fiber is emitted into the channel, focused by the lens and emitted from the array as a collimated beam.

In a laser device that emits pulsed laser light by emitting excitation light to a laser medium in a state in which a first voltage is applied to a Q switch and changing the voltage applied to the Q switch from a first voltage to a second voltage after the emission of the excitation light, the application start timing of the first voltage during a normal operation is set to a timing at which the intensity of the pulsed laser light periodically changing due to the vibration of the Q switch is maximized.

The present invention provides an optical amplifier and a control method therefor, with which it is possible to stably control an optical amplifier that uses a multicore optical fiber. The optical amplifier uses, in a gain medium, a multicore optical fiber having a plurality of cores, and comprises: an input-light power monitor that monitors the optical power of input light to the plurality of cores of the multicore optical fiber; an output-light power monitor that monitors the optical power of medium-passed output light from the plurality of cores that has passed through the multicore optical fiber; a crosstalk monitor that monitors the amount of inter-core crosstalk among the plurality of cores; and a controller that controls the pump-light power of pump light superimposed on the input light to the plurality of cores on the basis of the monitored optical power of input light, the monitored optical power of output light, and the monitored amount of inter-core crosstalk.

A laser control device includes a processor configured to control, when a control circuit of a laser device detects occurrence of an abnormality in a laser oscillator or a laser optical system and stops laser output from the laser oscillator, the control circuit based on a result of determining whether to enable or disable re-outputting of laser light from the laser oscillator by inputting, to a classifier, input data being at least a part of environmental data and state data about the laser device in a predetermined period including a stop time of laser output. Then, the state data and the input data in the predetermined period include at least one of time-series data about a light amount of laser light and time-series data about a light amount of return light propagating in a direction opposite to a direction of the laser light in the predetermined period.

An excimer laser apparatus according to the present disclosure includes a chamber configured to accommodate a laser gas and a pair of electrodes and generate pulse-oscillating laser light when the gas pressure of the laser gas is controlled in accordance with voltage applied between the pair of electrodes, a power supply configured to apply the voltage between the pair of electrodes, and a controller to which a target value of the spectral linewidth of the laser light is inputted, the controller configured to correct the voltage used to control the gas pressure, when the target value changes from a first target value to a second target value, based on a first function having the second target value as a parameter and control the gas pressure in accordance with the corrected voltage.

A system is disclosed which includes a laser which has a calibrated optical power and a calibrated tolerance. The system includes a driving circuit configured to generate a first current pulse and a second current pulse. The system includes a primary observer module configured to observe a first and second primary input. The system includes one or more secondary observer modules configured to observe one or more first and one or more second secondary inputs. The system includes a controller communicatively coupled to the laser, driving circuit, primary observer module, and the one or more secondary observer modules. The controller is configured to receive an information packet, calculate an optical power, determine a deviation of the optical power from the calibrated optical power, compare the deviation with the calibrated tolerance, and perform an action if the deviation exceeds the calibrated tolerance.

A method for assembling a beam combiner array including providing an array block having a back wall, a front surface and a plurality of aligned channels extending from the back wall to the front surface, where a bore extends through the back wall and into each channel, and providing a lens array including a plurality of lenses. The method further includes securing the lens array to the front surface of the block so that one of the lenses is aligned with each channel and threading a separate hollow core fiber through one of the bores in the back wall so that an end of the fiber is positioned within the channel. The method also includes aligning each fiber to the lens array so that a beam that propagates down the fiber is emitted into the channel, focused by the lens and emitted from the array as a collimated beam.

A burst logging system logs and transmits to a local or remote computing system event data related to errors in and or potential failures of laser system components. The system further provides for capturing data at different rates from different sensors, synchronization of data capture associated with system events and the possibility for aggregation of data from multiple systems, which can in turn be leveraged to predict and or remediate future system events.

A device includes a laser source, an amplifier, an optical sensor and a spectrometer. The laser source is configured to produce a seed laser beam. The amplifier includes gain medium and a discharging unit. The discharging unit is configured to pump the gain medium for amplifying power of the seed laser beam. The optical sensor is coupled to the amplifier and configured for sensing an optical emission generated in the amplifier while the gain medium is discharging. The spectrometer is coupled with the optical sensor and configured to measure a spectrum of the optical emission.

A laser system's laser light energy control and resulting dose control is improved by creating and using a set of gain estimators, one for each of a set or range of laser light pulse repetition rates. When a new repetition rate is used, its corresponding gain estimator is retrieved, used to compute the voltage to fire the laser source, and updated. The resulting generated laser light thereby avoids the convergence delay inherent in prior laser systems and, further, can repeatedly do so with subsequent specified repetition rates.