A method and apparatus for control of a dose of extreme ultraviolet (EUV) radiation generated by a laser produced plasma (LPP) EUV light source that combines pulse control mode and pulse modulation. The EUV energy created by each pulse is measured and total EUV energy created by the fired pulses determined, a desired energy for the next pulse is determined based upon whether the total EUV energy is greater or less than a desired average EUV energy times the number of pulses. If the desired pulse energy for the next droplet is within the range of one or more pulse modulation actuators, the pulse is modulated; otherwise, the pulse is fired to miss the droplet. This provides greater control of the accumulated dose as well as uniformity of the EUV energy over time, greater ability to compensate for pulses that generate EUV energy that is higher or lower than nominal expected values, and ability to provide an average EUV energy per pulse that is less than the nominal minimum EUV energy per pulse of the system.

An intra-cavity doubled OPS-laser has a laser-resonator including a birefringent filter (BRF) for coarse wavelength-selection, and an optically nonlinear (ONL) crystal arranged for type-II frequency-doubling and fine wavelength-selection. Laser-radiation circulates in the laser-resonator at one of a range of fundamental wavelengths dependent on the resonator length. The ONL crystal has a transmission peak-wavelength dependent on the crystal temperature. Reflection of circulating radiation from the BRF is monitored. The reflection is at a minimum when the ONL crystal transmission-peak wavelength is at the circulating radiation wavelength. The temperature of the ONL crystal is selectively varied to maintain the monitored reflection at about a minimum.

A device and method for tuning a ring resonator using self-heating stabilization is provided. A light source is controlled to produce an optical signal, input to an optical ring resonator, at a power where self-heating shifts a resonance wavelength of the optical ring resonator by at least 10 picometers, the self-heating comprising absorption in the optical ring resonator of optical power from a received optical signal. Prior to using the optical ring resonator at least one of modulate and filter the optical signal at the optical ring resonator, a heater of the optical ring resonator is controlled to an operating temperature at which the resonance wavelength of the optical ring resonator is greater than a respective wavelength of the optical signal.

A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.

A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.

An object information acquiring apparatus is used which includes a laser medium that oscillates laser light, an excitation source that excites the laser medium, a voltage accumulator that applies a voltage to the excitation source, a voltage supplier that supplies a voltage to the voltage accumulator, a voltage controller that limits a maximum supplied voltage from the voltage supplier, a receiver that receives a photoacoustic wave generated by an object irradiated with the laser light, and a constructor that acquires characteristic information relating to the object in use of the photoacoustic wave, wherein the voltage controller compares a measured voltage value obtained by implementing division of a supplied voltage from the voltage supplier with a reference voltage value defining the maximum supplied voltage.

A method for controlling the exposure of a selective laser sintering or laser melting apparatus. The method includes providing a selective laser sintering apparatus or laser melting apparatus that uses successive solidification of layers of a powder-type construction material that can be solidified using radiation. The apparatus comprises an irradiation device for irradiating layers of the construction material that has a plurality of scanners that can separately be actuated, simultaneously irradiating the construction material, the separate detection of irradiation times of each scanner and/or the irradiation areas detected by each scanner, and storing the detected irradiation times and/or irradiation areas; comparing the irradiation times and/or irradiation areas of the scanners with each other; re-determining the surface sections of a powder layer to be irradiated by each scanner so the irradiation times for each scanner are approximated to each other and/or the irradiation areas of each scanner are aligned.

A method for controlling the exposure of a selective laser sintering or laser melting apparatus. The method includes providing a selective laser sintering apparatus or laser melting apparatus that uses successive solidification of layers of a powder-type construction material that can be solidified using radiation. The apparatus comprises an irradiation device for irradiating layers of the construction material that has a plurality of scanners that can separately be actuated, simultaneously irradiating the construction material, the separate detection of irradiation times of each scanner and/or the irradiation areas detected by each scanner, and storing the detected irradiation times and/or irradiation areas; comparing the irradiation times and/or irradiation areas of the scanners with each other; re-determining the surface sections of a powder layer to be irradiated by each scanner so the irradiation times for each scanner are approximated to each other and/or the irradiation areas of each scanner are aligned.

A laser comprises a first end mirror and a second end mirror defining an optical cavity therebetween, a first gain medium and a second gain medium positioned in the optical cavity, at least one radiation source configured to provide pump radiation to the first and second gain media, wherein the pump radiation comprises a first pump beam directed to be incident on the first gain medium and a second pump beam directed to be incident on the second gain medium so as to stimulate emission of radiation from the first and second gain media thereby establishing a laser beam in the optical cavity and a control apparatus operable to adjust a property of at least one of the first and second pump beams and thereby control a thermal lens of at least one of the first and second gain media so as to substantially remove an instability zone from the power curve of the laser.

A system is disclosed which includes a laser which has a calibrated optical power and a calibrated tolerance. The system includes a driving circuit configured to generate a first current pulse and a second current pulse. The system includes a primary observer module configured to observe a first and second primary input. The system includes one or more secondary observer modules configured to observe one or more first and one or more second secondary inputs. The system includes a controller communicatively coupled to the laser, driving circuit, primary observer module, and the one or more secondary observer modules. The controller is configured to receive an information packet, calculate an optical power, determine a deviation of the optical power from the calibrated optical power, compare the deviation with the calibrated tolerance, and perform an action if the deviation exceeds the calibrated tolerance.