Compact optical frequency sources are described. The comb source may include an intra-cavity optical element having a multi-material integrated structure with an electrically controllable active region. The active region may comprise a thin film. By way of example, the thin film and an insulating dielectric material disposed between two electrodes can provide for rapid loss modulation. In some embodiments the thin film may comprise graphene. In various embodiments of a frequency comb laser, rapid modulation of the CEO frequency can be implemented via electric modulation of the transmission or reflection loss of an additional optical element, which can be the saturable absorber itself. In another embodiment, the thin film can also be used as a saturable absorber in order to facilitate passive modelocking. In some implementations the optical element may be formed on a cleaved or polished end of an optical fiber.

A tunable laser includes a reflective silicon optical amplifier (RSOA) with a reflective end and an interface end and an array of narrow-band reflectors, which each have a different center wavelength. It also includes a silicon-photonic optical switch, having an input port and N output ports that are coupled to a different narrow-band reflector in the array of narrow-band reflectors. The tunable laser also includes an optical waveguide coupled between the interface end of the RSOA and the input of the silicon-photonic optical switch. The frequency of this tunable laser can be tuned in discrete increments by selectively coupling the input port of the silicon-photonic optical switch to one of the N output ports, thereby causing the RSOA to form a lasing cavity with a selected narrow-band reflector coupled to the selected output port. The tunable laser also includes a laser output optically coupled to the lasing cavity.

A method of emitting wavelength-swept light includes controlling either one or both of magnitudes and on/off timings of currents to be applied to a first gain medium of a first optical generator and a second gain medium of a second optical generator to control an intensity and a wavelength region of each of first wavelength-swept light and second wavelength-swept light; generating the first wavelength-swept light having a first center wavelength based on the current applied to the first gain medium of the first optical generator; generating the second wavelength-swept light having a second center wavelength based on the current applied to the second gain medium of the second optical generator; and emitting output wavelength-swept light by coupling the first wavelength-swept light and the second wavelength-swept light.

Devices and methods for generating EUV light are disclosed. The device comprises an oscillator having an oscillator cavity length, L.sub.o, and defining an oscillator path and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L.sub.combined, where L.sub.combined=(N+x)*L.sub.o, where “N” is an integer and “x” is a number between 0.4 and 0.6. The amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to the first polarization out of the amplifier along a second beam path.

Devices and methods for generating EUV light are disclosed. The device comprises an oscillator having an oscillator cavity length, L.sub.o, and defining an oscillator path and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, L.sub.combined, where L.sub.combined=(N+x)*L.sub.o, where “N” is an integer and “x” is a number between 0.4 and 0.6. The amplifier comprises a polarization discriminating optic inputting light traveling along a first beam path from the oscillator and having substantially a first linear polarization into the amplifier and outputting light having substantially a linear polarization orthogonal to the first polarization out of the amplifier along a second beam path.

Disclosed is a semiconductor laser device assembly including a semiconductor laser device; and a dispersion compensation optical system, where a laser light exited from the semiconductor laser device is incident and exits to control a group velocity dispersion value of the laser light exited from the semiconductor laser device per wavelength.

A method of calibrating a tunable laser includes shifting a filter output peak defined by a tunable optical feedback filter of the tunable laser in an optical spectral domain to align with a target etalon output peak of a plurality of spaced etalon output peaks defined by an etalon of the tunable laser. The method also includes shifting a cavity frequency grid defined by cavity modes of the tunable laser to align a target cavity mode of the cavity frequency grid with the filter output peak and shifting the spaced output peaks defined by the etalon to align a target etalon output peak with a target wavelength of an output wavelength grid. The method includes modifying a bias current and a modulation current of a gain section of the tunable laser to achieve a defined output modulation amplitude and a defined extinction ratio.

An external-cavity semiconductor laser includes a semiconductor laser element containing a gallium nitride material, a first lens disposed in an optical path of light emitted from the semiconductor laser element, a wavelength selective element disposed in an optical path of light transmitted through the first lens and configured to selectively transmit light having a predetermined wavelength, a second lens disposed in an optical path of light transmitted through the wavelength selective element, an output coupler disposed in an optical path of light condensed through the second lens, and a light-transmissive protective member bonded to at least one surface of the output coupler. The second lens is configured to cause light transmitted through the second lens and incident on the output coupler to form an image on a surface of the output coupler. The protective member covers the surface of the output coupler on which the image is formed.

Exemplary apparatus and method are provided. In particular, an electromagnetic radiation can be emitted with, e.g. a light source arrangement. For example, the light source arrangement can include a cavity and a filter, and a spectrum of the electromagnetic radiation can be controlled, e.g., with such cavity and filter, to have a mean frequency that changes (i) at an absolute rate that is greater than about 100 terahertz per millisecond, and (ii) over a range that is greater than about 10 terahertz. Additionally or alternatively, the light source arrangement can include a frequency shifting device which can shift the mean frequency of the electromagnetic radiation.

A frequency comb laser providing large comb spacing is disclosed. At least one embodiment includes a mode locked waveguide laser system. The mode locked waveguide laser includes a laser cavity having a waveguide, and a dispersion control unit (DCU) in the cavity. The DCU imparts an angular dispersion, group-velocity dispersion (GVD) and a spatial chirp to a beam propagating in the cavity. The DCU is capable of producing net GVD in a range from a positive value to a negative value. In some embodiments a tunable fiber frequency comb system configured as an optical frequency synthesizer is provided. In at least one embodiment a low phase noise micro-wave source may be implemented with a fiber comb laser having a comb spacing greater than about 1 GHz. The laser system is suitable for mass-producible fiber comb sources with large comb spacing and low noise. Applications include high-resolution spectroscopy.