Patent classifications
H01S3/11
Laser irradiation method and laser irradiation system
A laser irradiation method of irradiating, with a pulse laser beam, an irradiation object in which an impurity source film is formed on a semiconductor substrate includes: reading fluence per pulse of the pulse laser beam with which a rectangular irradiation region set on the irradiation object is irradiated and the number of irradiation pulses the irradiation region is irradiated, the fluence being equal to or larger than a threshold at or beyond which ablation potentially occurs to the impurity source film when the irradiation object is irradiated with pulses of the pulse laser beam in the irradiation pulse number and smaller than a threshold at or beyond which damage potentially occurs to the surface of the semiconductor substrate; calculating a scanning speed Vdx; and moving the irradiation object at the scanning speed Vdx relative to the irradiation region while irradiating the irradiation region with the pulse laser beam at the repetition frequency f.
Laser irradiation method and laser irradiation system
A laser irradiation method of irradiating, with a pulse laser beam, an irradiation object in which an impurity source film is formed on a semiconductor substrate includes: reading fluence per pulse of the pulse laser beam with which a rectangular irradiation region set on the irradiation object is irradiated and the number of irradiation pulses the irradiation region is irradiated, the fluence being equal to or larger than a threshold at or beyond which ablation potentially occurs to the impurity source film when the irradiation object is irradiated with pulses of the pulse laser beam in the irradiation pulse number and smaller than a threshold at or beyond which damage potentially occurs to the surface of the semiconductor substrate; calculating a scanning speed Vdx; and moving the irradiation object at the scanning speed Vdx relative to the irradiation region while irradiating the irradiation region with the pulse laser beam at the repetition frequency f.
FIBER LASER FREQUENCY TUNING WITH INTRACAVITY SPECTRAL FILTER
Apparatus include a mode-locked laser cavity configured to produce a mode-locked output beam, wherein the laser cavity includes a gain medium situated in the laser cavity and an intracavity optical coating filter situated in the laser cavity to receive an intracavity beam, wherein the intracavity optical coating filter has an attenuation profile configured to suppress laser oscillation over a selected portion of the gain bandwidth of the gain medium and to increase a bandwidth of the mode-locked output beam based on the suppression. Related optical coatings are disclosed. Methods of arranging coatings and reducing pulse duration are also disclosed.
Laser Device for Generating an Optical Frequency Comb
The invention relates to a laser device comprising a laser source (1), which is configured to emit pulsed laser radiation (2) with a spectrum in the form of a frequency comb having a plurality of equidistant spectral lines, an optical modulator (3), which is configured to shift the frequency of the laser radiation (2), and a control unit (10), which is configured to control the modulator (3) by means of a control signal (6). It is the object of the present invention to demonstrate an improved way, compared to the prior art, of generating an optical frequency comb that is stabilized in terms of the CEO frequency, in which the CE phase is also adjustable. To this end, the invention proposes that the laser radiation (2) emitted by the laser source (1) is stabilized in terms of the carrier-envelope frequency. Furthermore, the invention relates to a method of generating an optical frequency comb.
Laser
A laser is disclosed having a housing formed of a block of glass-ceramic. The block is machined (or otherwise formed) to define one or more channels that act as a waveguide in two dimensions for light within the laser resonator. The channels extend between cavities also formed within the block which retain optical components of the laser, e.g. one or more of the gain medium, cavity mirrors, intermediate reflectors etc. The positioning, shape and size of each cavity is bespoke for the optical component it holds in order that each optical component is retained in optical alignment rigidly against the sides of the cavity.
Laser projector
A laser projector steers a pulsed laser beam to form a pattern of stationary dots on an object, the pulsed laser beam having a periodicity determined based at least in part on a maximum allowable spacing of the dots and on a maximum angular velocity at which the beam can be steered, wherein a pulse width of the laser beam and a pulse peak power of the laser beam are based at least in part on the determined periodicity and on laser safety requirements.
OPTICAL FREQUENCY COMB CONTROL
Optical frequency combs are used for a wide range of applications, some of which require precise control of the amplitude and phase of individual comb teeth. A technique is provided for tooth-level optical frequency comb control. A frequency comb may include a plurality of comb teeth that are separated from one another by a comb frequency spacing. This technique includes generating a train of control pulses, each of the control pulses being frequency-locked to a corresponding tooth of an optical frequency comb to be controlled. The tooth-level control of the frequency comb is enabled via stimulated Brillouin scattering using the train of control pulses.
System and method for determining absolute carrier-envelope phase of ultrashort laser pulses
A system for determining an absolute carrier-envelope phase (CEP) of ultrashort laser pulses includes a laser system for generating a laser beam including ultrashort optical pulses of a duration of less than 10 fs, an ultrabroadband quarter-wave plate configured to polarize the laser beam, and a gas jet emitting a continuous jet stream into the laser beam. The system includes focusing optics to adjust a focal spot of the laser beam to the gas jet, and a detector arrangement including a beam block and a microchannel plate (MCP) imaging detector, wherein the laser beam is directed to the detector arrangement. The method involves using angular streaking to determine the absolute CEP of both elliptically and linearly polarized light.
Fractional handpiece with a passively Q-switched laser assembly
A fractional handpiece and systems thereof for skin treatment include a passively Q-switched laser assembly operatively connected to a pump laser source to receive a pump laser beam having a first wavelength and a beam splitting assembly operable to split a solid beam emitted by the passively Q-switched laser assembly and form an array of micro-beams across a segment of skin. The passively Q-switched laser assembly generates a high power sub-nanosecond pulsed laser beam having a second wavelength.
OPTICAL SYSTEM FOR INCREASING THE CONTRAST OF PULSED LASER RADIATION, LASER SYSTEM AND METHOD FOR INCREASING THE CONTRAST OF PULSED LASER RADIATION
An optical system for increasing contrast of pulsed laser radiation includes a first polarization setting optical unit for setting an elliptical polarization state of the pulsed laser radiation, and a multipass cell having at least two opposing mirrors. The pulsed laser radiation passes the multipass cell with formation of a plurality of intermediate focus zones. The multipass cell is filled with a gas having an optical nonlinearity that causes an intensity-dependent rotation of an alignment of the elliptical polarization state of the pulsed laser radiation, such that the multipass cell outputs beam portions having differently aligned elliptical polarization states on account of the intensity-dependent rotation. The optical system further includes an optical beam splitting system for splitting the beam portions having differently aligned elliptical polarization states.