An extreme ultraviolet light generation system includes a target supply unit configured to supply a target substance to a first predetermined region, a laser system configured to output pulse laser light to be radiated to the target substance in the first predetermined region, a first sensor configured to detect an arrival timing at which the target substance has reached a second predetermined region between the target supply unit and the first predetermined region, an optical adjuster arranged on an optical path of the pulse laser light between the laser system and the first predetermined region, and a processor configured to control transmittance of the pulse laser light through the optical adjuster based on the arrival timing.

A manufacturing method of a channel type planar waveguide amplifier and a channel type planar waveguide amplifier. The method is to pattern the channel structures on the surface of the optical substrate, and then seal them together with rare earth doped chalcogenide glass into the quartz tube, and finally the channel-type waveguide structure is directly created via the melt-quenching method to achieve high quality planar waveguide amplifier. Excellent side wall roughness can be assured since the present invention does not have any direct etching of rare earth ions. Chemical composition and the activity of the rare earth ions can be maintained since the whole process is not involved in any decomposition of the glass into atoms, ions or clusters as that occurs during the fabrication process of the films deposited by the traditional methods like thermal evaporation and magnetron sputtering.

A system includes a master oscillator configured to generate a first optical beam and a beam controller configured to modify the first optical beam. The system also includes a PWG amplifier configured to receive the modified first optical beam and generate a second optical beam having a higher power than the first optical beam. The second optical beam has a power of at least about ten kilowatts. The PWG amplifier includes a single laser gain medium configured to generate the second optical beam. The system further includes a feedback loop configured to control the master oscillator, PWG amplifier, and beam controller. The feedback loop includes a laser controller. The laser controller may be configured to process wavefront information or power in bucket information associated with the second optical beam to control an adaptive optic or perform a back-propagation algorithm to provide wavefront correction at an output of the PWG amplifier.

In an example, a tandem pumped fiber amplifier may include a seed laser, one or more diode pumps, and a single or plural active core fiber. The single or plural active core fiber may include a first section to operate as an oscillator and a second different section to operate as a power amplifier. The one or more diode pumps may be optically coupled to the first section of the single or plural active core fiber, and the seed laser may be optically coupled to the single active core or an innermost core of the plural active core fiber.

The system and method of producing a first path comprising a pulse stretcher for a mid-wave infrared (MWIR) signal, an optical parametric chirped-pulse amplification (OPCPA) amplifier, and a MWIR compressor for producing a first beam in a MWIR portion of the spectrum and a second path comprising a pulse stretcher for a long wave infrared (LWIR) signal, an OPCPA amplifier, and a LWIR compressor for producing a second beam in a LWIR portion of the spectrum. Each beam, on its own, is configured to produce laser-matter interactions at long range (100s of meters), having nonlinear effects and favoring supercontinuum generation spanning multiple octaves, that is temporally and spatially overlapped with the fundamental laser beam.

A delivery fiber assembly suitable for delivering broad band light and including a delivery fiber and a connector member. The delivery fiber has a length, an input end for launching light, and a delivery end. The delivery fiber includes along its length a core region and a cladding region surrounding the core region, the cladding region includes a cladding background material having a refractive index N.sub.bg and a plurality of microstructures in the form of inclusions of solid material having refractive index up to N.sub.inc and extending in the length of the longitudinal axis of the delivery fiber, wherein N.sub.inc<N.sub.bg. The plurality of inclusions in the cladding region is arranged in a cross-sectional pattern including at least two rings of inclusions surrounding the core region. The connector member is mounted to the delivery fiber at a delivery end section of the delivery fiber including the delivery end.

A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.

A laser apparatus and a polycrystalline material are described. The apparatus includes the polycrystalline material which is configured to receive pumping light at a pump wavelength and to produce an optical gain for laser oscillation at a laser wavelength different from the pump wavelength. The polycrystalline material includes a ceramic material with a predetermined grain size. The polycrystalline material further includes a rare earth dopant with a predetermined concentration, wherein the predetermined grain size and the predetermined concentration cause the polycrystalline material to exhibit the optical gain at the laser wavelength.

In an example, a tandem pumped fiber amplifier may include a seed laser, one or more diode pumps, and a single or plural active core fiber. The single or plural active core fiber may include a first section to operate as an oscillator and a second different section to operate as a power amplifier. The one or more diode pumps may be optically coupled to the first section of the single or plural active core fiber, and the seed laser may be optically coupled to the single active core or an innermost core of the plural active core fiber.

The present invention discloses a high-peak-power single-frequency narrow-linewidth nanosecond fiber laser based on a triangular pulse, wherein the laser includes: pulsed laser generated by the laser seed injecting into a first power pre-amplifier through a first isolator, and then injecting into a second pre-amplifier and then injecting into a power amplifier; wherein triangle-shaped pulsed laser with fast rising edge is obtained by using electro-optic and acousto-optic modulator to modulate continuous wave single-frequency laser or a single-frequency semiconductor laser directly modulated by radio frequency signal; single-frequency triangle-shaped pulsed laser is employed as the laser source according to the characteristics of narrow intrinsic linewidth and suppression of linewidth broadening caused by SPM, and the power of pulsed laser is amplified through the MOPA system.