H01S5/0092

MONOLITHIC PHOTONIC RESONATOR AND ASSOCIATED LASER FREQUENCY STABILIZATION METHOD
20210376555 · 2021-12-02 ·

A monolithic photonic resonator includes a bulk optic with first and second superpolished facets, and a high-reflectivity coating applied to each of the first and second superpolished facets. The superpolished facets form an optical resonator. The bulk optic is a single piece of an optical material that is solid, i.e., has no internal holes, gaps, or pockets. The bulk optic therefore serves as an intraresonator optical medium while still supporting a finesse of 10,000 or more. The superpolished facets may be counterfacing to form a Fabry-Perot cavity. Alternatively, the bulk optic may include forms one or more additional facets off of which light inside the bulk optic undergoes total internal reflection. The monolithic photonic resonator may be mounted in a support structure that minimizes the overall vibration sensitivity of the resonator's resonance frequency.

Pulsed light generation device, pulsed light generation method, exposure apparatus having pulsed light generation device and inspection apparatus having pulsed light generation device
11366070 · 2022-06-21 · ·

A pulsed light generation device includes: an optical coupler having four input/output ports including a first port, a second port, a third port and a fourth port; a connection optical path that connects the third port with the fourth port; and a phase modulation element disposed in the connection optical path. The optical coupler branches pulsed light input to the first port and outputs the branched input pulsed light as first-direction pulsed light and second-direction pulsed light to the third port and to the fourth port. The modulation element applies phase modulation to either one of the first-direction pulsed light and the second-direction pulsed light, thereby outputs output pulsed lights through the first port and the second port, wherein a waveform of one of the pulsed lights output through the first port is different from a waveform of the other of the output pulsed lights output through the second port.

LIGHT SOURCE WITH OPTICAL FREQUENCY MIXING

A light source based on an optical frequency mixer is disclosed. The light source has a first laser for emitting light at a first optical frequency, and a plurality of second lasers for emitting light at different second optical frequencies. The optical frequency mixer provides output light beams at mixed optical frequencies of the first and second lasers. Wavelength of output light beams may be tuned by tuning wavelength of any of the first or second lasers. In this manner, RGB wavelength-tunable light sources may be constructed based on red or near-infrared lasers. The wavelength tunability of the output light beams may be used to angularly scan or refocus the light beams.

HETEROGENEOUS INTEGRATION OF FREQUENCY COMB GENERATORS FOR HIGH-SPEED TRANSCEIVERS

A photonics frequency comb generator includes two integrated dies: an indium phosphide die laser of a first wavelength is grown on from, and a silicon photonics die having a microring resonator connected to the laser and frequency modulators. The microring resonator converts the first wavelength into a number of second wavelengths. One type of the microring resonator is a hybrid non-linear optical wavelength generator, comprising non-silicon materials, such as SiC or SiGe built on silicon to yield a non-linear wavelength generation. The second wavelengths are generated by adjusting the ring's geometric size and a distance between the ring and the traverse waveguide. Another type of microring resonator splits the first wavelength into a plurality of second wavelengths and transmits the multiple second wavelengths to filters and modulators, and each selects and modulates one of the second wavelengths in a one-to-one relationship. This frequency comb generator has applications in WDM/CWDM and multi-chip modules in high speed transceivers.

DEVICES FOR GENERATION OF ELECTROMAGNETIC RADIATION OF PREDETERMINED PROFILE
20220181840 · 2022-06-09 · ·

A device for producing an electromagnetic radiation of predetermined properties is configured as a layered structure and includes a light interacting layer, in communication with at least one light emitting source, and having one or more light interacting regions, each configured to define a closed-loop light mixing path for optically coupling a pair of input coherent light components of predetermined first and second frequencies to create an output radiation component of a third beating frequency of a predetermined high-frequency profile. The device further includes a control layer interfacing with said light interacting layer and configured for controllable switching between inoperative opaque and operative transparent states with respect to the at least one third beating frequency, to selectively prevent and allow transmission of the at least one output radiation component of the third frequency towards a medium in the vicinity of the layered structure.

Device and method for interaction between an agile laser beam and a hyperfine energy transition of a chemical species

Disclosed is a device for interaction between a laser beam and a hyperfine energy transition of a chemical species. The device further includes an electro-optic modulator with a single sideband with an input optical waveguide suitable for receiving a source laser beam and an output optical waveguide suitable for generating an output laser beam and an electronic system suitable for generating and applying, simultaneously, a first modulated electrical signal, sin(Ω.sub.1t)) to a first hyperfrequency pulse on a first high-frequency electrode of the electro-optic modulator and, respectively, another modulated electrical signal, cos(Ω.sub.1t)) to the first pulse on another high-frequency electrode of the electro-optic modulator, in such a way as to frequency-switch the output laser beam to a first optical frequency offset from the first pulse with respect to the initial optical frequency.

LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
20220131335 · 2022-04-28 · ·

A laser apparatus according to an aspect of the present disclosure includes a plurality of semiconductor lasers, a plurality of optical switches disposed in the optical paths of the plurality of respective semiconductor lasers, a wavelength conversion system configured to convert pulsed beams outputted from the plurality of optical switches in terms of wavelength to generate wavelength-converted beams, an ArF excimer laser amplifier configured to amplify the wavelength-converted beams, and a controller configured to control the operations of the plurality of semiconductor lasers and the plurality of optical switches, and the plurality of semiconductor lasers are each configured to output a laser beam so produced that wavelengths of the wavelength-converted beams are wavelengths at which the ArF excimer laser amplifier performs amplification and differ from the optical absorption lines of oxygen.

Wavelength conversion member, method of manufacturing same, and light-emitting device
11719415 · 2023-08-08 · ·

A method of manufacturing a wavelength conversion member includes: preparing a composite by layering a layered body and a ceramic sheet that includes a phosphor, the layered body including a pair of light-reflective green sheets each containing a reflective material, and a light-shielding green sheet containing a light shielding material with the light-shielding green sheet being layered between the pair of reflective green sheets; and pressurizing and firing the composite.

Laser system and method for manufacturing electronic device

In a laser system according to a viewpoint of the present disclosure, a first amplifier amplifies first pulsed laser light outputted from a first semiconductor laser system into second pulsed laser light, a wavelength conversion system converts the second pulsed laser light in terms of wavelength into third pulsed laser light, and an excimer amplifier amplifies the third pulsed laser light. The first semiconductor laser system includes a first current controller that controls current flowing through a first semiconductor laser in such a way that first laser light outputted from the first semiconductor laser is caused to undergo chirping and a first semiconductor optical amplifier that amplifies the first laser light into pulsed light. The laser system includes a control section that controls the amount of chirping performed on the first pulsed laser light in such a way that excimer laser light having a target spectral linewidth is achieved.

TUNABLE DUAL AND MULTIPLE WAVELENGTH LASER SYSTEM

A tunable laser system includes a laser diode producing a light beam having a plurality of frequencies in a visible portion of a light spectrum. A collimating lens arranged in front of the laser diode produces a collimated light beam from the light beam produced by the laser diode. A partial reflector arranged in a path of the collimated laser beam reflects a first portion of the collimated light beam and passes a second portion of the collimated light beam as an output light beam. The first portion of the collimated light beam enters the laser diode and mixes with the plurality of frequencies of the light beam produced by the laser diode so that the laser diode produces a self-injection-locked light beam including at least two frequencies having a frequency difference in a terahertz frequency range. A translational stage adjusts a distance between the laser diode and the partial reflector. The laser diode or the partial reflector is mounted on the translational stage. The at least two frequencies of the self-injection-locked light beam are based on the distance between the laser diode and the partial reflector.