An input device includes a brake applying unit configured to apply a braking force to a rotating body and a torque applying unit configured to apply a driving torque to the rotating body. The brake applying unit includes a rotary plate rotatable together with the rotating body, magnetic viscous fluid disposed in a gap between a fixed portion and the rotary plate, and a brake applying coil configured to apply a magnetic field to the magnetic viscous fluid. The torque applying unit includes a stator and a rotor. One of the stator and the rotor includes a magnet and the other includes torque applying coils inducing magnetic fields for generating the driving torque. A controller is provided to control currents applied to the brake applying coil and the torque applying coils. The torque applying unit is disposed to surround an outer periphery of the brake applying unit.

A screen turning-over mechanism includes a rotating shaft connected to a screen and a motor drivably connected to the rotating shaft. The motor is connected to an electromagnetic damping loop which forms a closed path with the motor only when the motor is in a de-energized state. The rotating shaft is also connected to an elastic mechanism. When the motor is energized, the motor drives the rotating shaft to rotate to extend the screen, and the rotating shaft drives the elastic mechanism to deform elastically to store energy; and when the motor is de-energized, the elastic mechanism releases the stored energy to drive the rotating shaft to rotate to retract the screen. The screen turning-over mechanism according to the present application has a simple and compact structure, occupies a small volume of space, and has a long service life.

A screen turning-over mechanism includes a rotating shaft connected to a screen and a motor drivably connected to the rotating shaft. The motor is connected to an electromagnetic damping loop which forms a closed path with the motor only when the motor is in a de-energized state. The rotating shaft is also connected to an elastic mechanism. When the motor is energized, the motor drives the rotating shaft to rotate to extend the screen, and the rotating shaft drives the elastic mechanism to deform elastically to store energy; and when the motor is de-energized, the elastic mechanism releases the stored energy to drive the rotating shaft to rotate to retract the screen. The screen turning-over mechanism according to the present application has a simple and compact structure, occupies a small volume of space, and has a long service life.

Exemplary substrate supporting apparatus and method for attaching and/or detaching substrate are provided. In one aspect, substrate supporting apparatus has a plurality of supporting members 10 that contacts a circumferential part of a substrate W and rotate the substrate W; a pair of driven members 30 on which the plurality of supporting members 10 are provided; a connecting member 20 connecting one driven member 31 and another driven member 32; and a driving device 40 that brings the pair of driven members 30 close to each other or separates the pair of driven members 30 from each other, linearly along a first direction, by moving at least a part of the connecting member 20. Numerous other aspects are provided.

Exemplary substrate supporting apparatus and method for attaching and/or detaching substrate are provided. In one aspect, substrate supporting apparatus has a plurality of supporting members 10 that contacts a circumferential part of a substrate W and rotate the substrate W; a pair of driven members 30 on which the plurality of supporting members 10 are provided; a connecting member 20 connecting one driven member 31 and another driven member 32; and a driving device 40 that brings the pair of driven members 30 close to each other or separates the pair of driven members 30 from each other, linearly along a first direction, by moving at least a part of the connecting member 20. Numerous other aspects are provided.

A motor unit including a drive motor that includes an output shaft having a hollow portion; a torque sensor arranged within the hollow portion; and a cooling mechanism. The cooling mechanism has one end of a coolant path arranged inside the hollow portion and cools the drive motor and the torque sensor. A vehicle can include the motor unit. The drive motor can act as a traction motor generating traction drive force of the vehicle.

A motor unit including a drive motor that includes an output shaft having a hollow portion; a torque sensor arranged within the hollow portion; and a cooling mechanism. The cooling mechanism has one end of a coolant path arranged inside the hollow portion and cools the drive motor and the torque sensor. A vehicle can include the motor unit. The drive motor can act as a traction motor generating traction drive force of the vehicle.

It is enabled to facilitate fine adjustment of power as well as reduction of the amount of movement required to maximize the power. An actuator 13 is moved by operation of a user. A pressure sensitive sensor 15 detects applied pressing force. A pressing member 14 presses the pressure sensitive sensor 15. When the amount of movement of the actuator 13 is smaller than a predetermined amount, the pressing member 14 presses the pressure sensitive sensor 15 to apply force corresponding to the amount of movement of the actuator 13. When the amount of movement of the actuator 13 is not smaller than the predetermined amount, the pressing member 14 presses the pressure sensitive sensor 15 to apply force corresponding to pressing force applied to the actuator 13 by the user.

It is enabled to facilitate fine adjustment of power as well as reduction of the amount of movement required to maximize the power. An actuator 13 is moved by operation of a user. A pressure sensitive sensor 15 detects applied pressing force. A pressing member 14 presses the pressure sensitive sensor 15. When the amount of movement of the actuator 13 is smaller than a predetermined amount, the pressing member 14 presses the pressure sensitive sensor 15 to apply force corresponding to the amount of movement of the actuator 13. When the amount of movement of the actuator 13 is not smaller than the predetermined amount, the pressing member 14 presses the pressure sensitive sensor 15 to apply force corresponding to pressing force applied to the actuator 13 by the user.

A tool driver for use in robotic surgery includes a base configured to couple to a distal end of a robotic arm, and a tool carriage slidingly engaged with the base and configured to receive a surgical tool. In one variation, the tool carriage may include a plurality of linear axis drives configured to actuate one or more articulated movements of the surgical tool. In another variation, the tool carriage may include a plurality of rotary axis drives configured to actuate one or more articulated movements of the surgical tool. Various sensors, such as a capacitive load cell for measuring axial load, a position sensor for measuring linear position of the guide based on the rotational positions of gears in a gear transmission, and/or a capacitive torque sensor based on differential capacitance, may be included in the tool driver.