A three-phase AC reactor according to an embodiment of the present invention includes three-phase coils that are not arranged in parallel, an input and output terminal block having an input and output unit having a parallel arrangement, and an external connection position change unit disposed between a coil end of each of the three-phase coils and the input and output terminal block to connect the coil end to the input and output terminal block.

Embodiments provided herein generally include apparatus, e.g., plasma processing systems, and methods for the plasma processing of a substrate in a processing chamber. Some embodiments are directed to a waveform generator. The waveform generator generally includes a first voltage stage having: a first voltage source; a first switch; and a second switch, where a first terminal of the first voltage source is coupled to a first terminal of the first switch, and where a second terminal of the first voltage source is coupled to a first terminal of the second switch. The waveform generator also includes a current stage coupled to a common node between second terminals of the first switch and the second switch, the current stage having a current source and a third switch coupled to the current source.

A power apparatus applied in a solid state transformer structure includes an AC-to-DC conversion unit, a first DC bus, and a plurality of bi-directional DC conversion units. First sides of the bi-directional DC conversion units are coupled to the first DC bus. Second sides of the bi-directional DC conversion units are configured to form at least one second DC bus, and the number of the at least one second DC bus is a bus number. The bi-directional DC conversion units receive a bus voltage of the first DC bus and convert the bus voltage into at least one DC voltage, or the bi-directional DC conversion units receive at least one external DC voltage and convert the at least one external DC voltage into the bus voltage.

A power apparatus applied in a solid state transformer structure includes an AC-to-DC conversion unit, a first DC bus, and a plurality of bi-directional DC conversion units. First sides of the bi-directional DC conversion units are coupled to the first DC bus. Second sides of the bi-directional DC conversion units are configured to form at least one second DC bus, and the number of the at least one second DC bus is a bus number. The bi-directional DC conversion units receive a bus voltage of the first DC bus and convert the bus voltage into at least one DC voltage, or the bi-directional DC conversion units receive at least one external DC voltage and convert the at least one external DC voltage into the bus voltage.

Circuit arrangement via which a voltage type and value of an input voltage of a. power supply or a switching-mode power supply is ascertained is configured such that the input voltage of the power supply decreases at the input side and includes a differential amplifier for converting the input voltage into a signal rectified by a first rectifier such that a forward voltage of the first rectifier is compensated, includes an inverter which generates an inverted signal rectified by a second rectifier such that a forward voltage of the second rectifier is compensated, includes a mixer via which a first output signal is generated from the useful signals, from which first output signal a second output signal is derived via a filter such that the voltage type is determinable from the first output signal, and a voltage value of the input voltage can be determined from the second output signal.

Circuit arrangement via which a voltage type and value of an input voltage of a. power supply or a switching-mode power supply is ascertained is configured such that the input voltage of the power supply decreases at the input side and includes a differential amplifier for converting the input voltage into a signal rectified by a first rectifier such that a forward voltage of the first rectifier is compensated, includes an inverter which generates an inverted signal rectified by a second rectifier such that a forward voltage of the second rectifier is compensated, includes a mixer via which a first output signal is generated from the useful signals, from which first output signal a second output signal is derived via a filter such that the voltage type is determinable from the first output signal, and a voltage value of the input voltage can be determined from the second output signal.

A power module includes N inverter units outputting N AC voltages and being coupled to N high-frequency AC terminals, wherein the N high-frequency AC terminals are cascaded and connected to a post-stage rectifier circuit. A phase-shift control method for the power module includes: setting at least two phase-shift sequences, wherein phase sequence numbers of the N AC voltages of the N inverter units are different in the at least two phase-shift sequences; in one switching period, controlling the N AC voltages of the N inverter units to shift a first angle according to a first phase-shift sequence of the at least two phase-shift sequences; and in another switching period, controlling the N AC voltages of the N inverter units to shift the first angle according to a second phase-shift sequence of the at least two phase-shift sequences.

A power module includes N inverter units outputting N AC voltages and being coupled to N high-frequency AC terminals, wherein the N high-frequency AC terminals are cascaded and connected to a post-stage rectifier circuit. A phase-shift control method for the power module includes: setting at least two phase-shift sequences, wherein phase sequence numbers of the N AC voltages of the N inverter units are different in the at least two phase-shift sequences; in one switching period, controlling the N AC voltages of the N inverter units to shift a first angle according to a first phase-shift sequence of the at least two phase-shift sequences; and in another switching period, controlling the N AC voltages of the N inverter units to shift the first angle according to a second phase-shift sequence of the at least two phase-shift sequences.

A power apparatus applied in a solid state transformer structure includes an AC-to-DC conversion unit, a first DC bus, and a plurality of bi-directional DC conversion units. First sides of the bi-directional DC conversion units are coupled to the first DC bus. Second sides of the bi-directional DC conversion units are configured to form at least one second DC bus, and the number of the at least one second DC bus is a bus number. The bi-directional DC conversion units receive a bus voltage of the first DC bus and convert the bus voltage into at least one DC voltage, or the bi-directional DC conversion units receive at least one external DC voltage and convert the at least one external DC voltage into the bus voltage.

A power apparatus applied in a solid state transformer structure includes an AC-to-DC conversion unit, a first DC bus, and a plurality of bi-directional DC conversion units. First sides of the bi-directional DC conversion units are coupled to the first DC bus. Second sides of the bi-directional DC conversion units are configured to form at least one second DC bus, and the number of the at least one second DC bus is a bus number. The bi-directional DC conversion units receive a bus voltage of the first DC bus and convert the bus voltage into at least one DC voltage, or the bi-directional DC conversion units receive at least one external DC voltage and convert the at least one external DC voltage into the bus voltage.