A capacitive transducer comprising a top electrode and a bottom electrode, and a sidewall between the top electrode and the bottom electrode. The sidewall is configured to separate the top electrode and the bottom electrode by a gap. There is a high contact resistance part on one or both of a bottom side of the top electrode or a top side of the bottom electrode.

A hydraulically amplified self-healing electrostatic (HASEL) transducer includes a composite, multi-layered structure. In an example, a HASEL transducer includes a dielectric layer including at least one fluid dielectric layer. The dielectric layer includes a first side and a second side opposing the first side. The HASEL transducer further includes a first electrode disposed at the first side of the dielectric layer, a second electrode disposed at the second side of the dielectric layer, a first outer layer disposed at the first electrode opposite the dielectric layer, and a second outer layer disposed at the second electrode opposite the dielectric layer. The first outer layer and second outer layer exhibit different mechanical and electrical properties from the dielectric layer.

A microelectromechanical system (MEMS) device includes a substrate and a movable element at least partially suspended above the substrate and having at least one degree of freedom. The MEMS device further includes a protrusion extending from the substrate and configured to contact the movable element when the movable element moves in the at least one degree of freedom, wherein the protrusion comprises a surface having a water contact angle of higher than about 15° measured in air.

A variable stiffening device that include a first electrode structure and a second electrode structure. The first electrode structure includes an electrode extension that extends into a cavity defined between an electrode of the first electrode structure and an opposing electrode of the second electrode structure. The first and second electrode structures may be arranged in a load-bearing state by applying a voltage thereto to electrostatically attract the electrode to the opposing electrode to press the electrode extension within the cavity. Friction between the electrode extension and engaging surfaces defining the cavity prevent the electrode extension from slipping within the cavity, thereby maintaining a structural relationship among the components of the first and second electrode structures in response to an application of a load to the variable stiffening device.

An artificial muscle stack that includes a plurality of artificial muscle layers. Each artificial muscle layer includes one or more artificial muscles having a housing with an electrode region and an expandable fluid region, a dielectric fluid housed within the housing, and an electrode pair having a first and second electrode positioned in the electrode region. The first and second electrodes each include two or more tab portions and two or more bridge portions. The two or more bridge portions interconnects adjacent tab portions. At least one of the first and second electrode includes a central opening positioned between the tab portions and encircling the expandable fluid region. The plurality of artificial muscle layers are arranged such that the expandable fluid region of the artificial muscles of each artificial muscle layer overlaps at least one tab portion of one or more artificial muscles of an adjacent artificial muscle layer.

An actuator has a flexible electrode having flexibility, and a base electrode having an opposed face that is opposed to the flexible electrode and is covered with an insulating layer. The flexible electrode deforms to get closer to the opposed face when a voltage is applied to the flexible electrode and the base electrode. The flexible electrode is a rotating body placed on the opposed face. The base electrode is divided into a plurality of electrode portions insulated from each other. The electrode portions are arranged along a predetermined direction. The flexible electrode moves in the predetermined direction relative to the base electrode, while rotating on the opposed face, when the voltage is sequentially applied to the electrode portions in the predetermined direction.

A form birefringent optical element includes a structured layer and a dielectric environment disposed over the structured layer. At least one of the structured layer and the dielectric environment includes a nanovoided polymer, the nanovoided polymer having a first refractive index in an unactuated state and a second refractive index different than the first refractive index in an actuated state. Actuation of the nanovoided polymer can be used to reversibly control the form birefringence of the optical element. Various other apparatuses, systems, materials, and methods are also disclosed.

A method for manufacturing an electromechanical actuator includes providing a primary stack of layers comprising a monocrystalline layer, providing a secondary stack of layers, and forming, in the etching layer, at least three pads. The method further includes encapsulating the three pads by a first encapsulation layer, assembling the primary stack of layers with the secondary stack of layers, removing the first substrate, and forming a movable electrode in the monocrystalline layer.

An artificial muscle actuator that includes a housing, a dielectric fluid housed within the housing, and an electrode pair positioned in the housing. The electrode pair includes a first electrode and a second electrode. The first electrode and the second electrode each include a metal film. The first electrode includes an insulation bilayer disposed on the metal film of the first electrode in an orientation facing the second electrode. In addition, the insulation bilayer includes an acryl-based polymer layer disposed on the metal film and a biaxially oriented polypropylene (BOPP) layer disposed on the acryl-based polymer layer.

A camera system incorporating a MEMS actuator to achieve focus adjustments to compensate for the thermal expansion of the lens assembly is disclosed. The camera comprises a lens barrel, lens holder, infra-red (IR) filter, board circuit, MEMS actuator, housing package for the actuator, and an image sensor. The image sensor is directly wire bonded to pads on the circuit board such that these pads are movable at the image sensor end and fixed at the circuit board end. When the camera is exposed to temperature variations, the MEMS actuator moves the sensor along the optical axis to maintain the image in focus.